Apparatus for etching high aspect ratio features

• US 9,991,109 B2
• Filed: 05/03/2013
• Issued: 06/05/2018
• Est. Priority Date: 05/03/2006
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Zhou, Xiaoping, Dietz, Jeffrey William
• Primary Examiner(s): Lund, Jeffrie R
• Application Number:
  US13/886,660
• Publication Number:
  US 20140020834A1
• Time in Patent Office: 1,859 Days
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings
• CPC Class Codes: H01L 21/02002 Preparing wafers
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

Claims

1. A showerhead assembly, comprising:

an upper section having a top surface, a bottom surface and a plurality of gas flow passages extending from the top surface to the bottom surface, and the upper section separating an upper plenum above the top surface from a lower plenum below the bottom surface;

a gas distribution plate having an upper surface, wherein the upper surface is mechanically coupled to the bottom surface of the upper section, and the gas distribution plate has a plurality of gas flow holes fluidly coupled to the lower plenum; and

a member disposed over the gas distribution plate, wherein a plurality of holes are formed through the member defining an optically transmissive passage though the upper section and the gas distribution plate.

2. The showerhead assembly of claim 1, wherein the upper section further comprises:

a base having a stepped recess;

a first plate disposed in the recess;

a second plate disposed in the recess between the first plate and the base; and

a barrier wall disposed between the first and second plates and separating the upper and lower plenums.

3. The showerhead assembly of claim 2, wherein the upper section further comprises:

a plurality of pins spacing the first plate from the second plate.

4. The showerhead assembly of claim 3, wherein the pins are press fit into the first and second plates.

5. The showerhead assembly of claim 2, wherein the first plate comprises a plurality of gas passages, wherein each gas passage further comprises:

an orifice hole disposed between a first bore hole and a second bore hole, wherein the first and second bore holes have substantially greater diameter and depth relative to the orifice hole.

6. The showerhead assembly of claim 1, wherein the gas distribution plate is fabricated from bulk Yttria.

7. The showerhead assembly of claim 1, wherein the optically transmissive passage further comprises a plurality of high aspect ratio holes.

8. The showerhead assembly of claim 1 further comprising:

concentric rings of adhesive coupling the gas distribution plate to the upper section, wherein the concentric rings form radially isolated concentric plenums defined between gas distribution plate and the upper section.

9. The showerhead assembly of claim 8 further comprising:

beads of adhesive disposed between the concentric rings of adhesive, wherein gases present between the gas distribution plate, the upper section and a pair of adhesive rings may flow around the beads.

10. A showerhead assembly, comprising:

an upper section having a plurality of gas flow passages and the upper section separating an upper plenum from a lower plenum;

a gas distribution plate coupled to a bottom surface of the upper section and having a plurality of gas flow holes fluidly coupled to the lower plenum; and

an optically transmissive passage defined though the upper section and the gas distribution plate, wherein the optically transmissive passage further comprises;

a sealed window;

a member disposed between the window and the gas distribution plate; and

a plurality of high aspect ratio holes formed in the member.

11. The showerhead assembly of claim 10, wherein the high aspect ratio holes have an aspect ratio (height to diameter) of at least about 10:

1.

12. The showerhead assembly of claim 10, wherein the high aspect ratio holes have a diameter of less than or comparable to at least one of the DEBYE length and the electron mean free path.

13. The showerhead assembly of claim 10, wherein the high aspect ratio holes have a diameter less than about 1.5 mm.

14. The showerhead assembly of claim 10, wherein the high aspect ratio holes define an open area of up to about 60 percent of the optically transmissive passage.

15. The showerhead assembly of claim 10, wherein the high aspect ratio holes have 37 holes.

16. The showerhead assembly of claim 10, wherein the member further comprises ceramic.

17. A showerhead assembly, comprising:

a base having a stepped recess;

a first plate disposed in the recess;

a second plate disposed in the recess between the first plate and the base;

a ceramic plug having a plurality of high aspect ratio holes formed therethrough, the high aspect ratio holes have a diameter less than about 1.5 mm and an aspect ratio (height to diameter) of at least about 10;

1;

a barrier wall disposed between the first and second plates and separating a first and second plenums defined between the first and second plates;

a gas distribution plate coupled to the first plate by a plurality of concentric adhesive lines and having a plurality of gas flow holes aligned between adhesive lines; and

an optically transmissive passage defined though the base, first and second plates, ceramic plug, and gas distribution plate.