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Rounded and curved integrated tethers for quartz resonators

  • US 9,991,863 B1
  • Filed: 04/07/2015
  • Issued: 06/05/2018
  • Est. Priority Date: 04/08/2014
  • Status: Active Grant
First Claim
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1. A piezoelectric quartz shear-mode resonator comprising quartz isolation tethers, each comprising a mount for mounting to a semiconductor substrate, wherein the quartz tethers each have at least one rounded corner.

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