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MEMS resonator with functional layers

  • US 9,991,872 B2
  • Filed: 04/06/2015
  • Issued: 06/05/2018
  • Est. Priority Date: 04/04/2014
  • Status: Active Grant
First Claim
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1. A micro-electrical-mechanical system (MEMS) device comprising:

  • a substrate;

    at least one anchor on a surface of the substrate; and

    a vibrating body suspended over the substrate by the at least one anchor and comprising;

    a periodically poled piezoelectric thin-film layer;

    a first conductive layer on a first surface of the vibrating body opposite the surface of the substrate;

    a second conductive layer on a second surface of the vibrating body opposite the first surface; and

    a functional layer over the first conductive layer.

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