Force sensor and structure body used therein

• US 9,995,644 B2
• Filed: 04/07/2015
• Issued: 06/12/2018
• Est. Priority Date: 04/07/2015
• Status: Active Grant

• Current Assignee: Wacoh Company
• Original Assignee: Wacoh Company
• Inventors: Nishioki, Nobuhisa, Okada, Kazuhiro
• Primary Examiner(s): Shah, Manish S
• Assistant Examiner(s): GRAVES, TIMOTHY P
• Application Number:
  US14/904,559
• Publication Number:
  US 20170248482A1
• Time in Patent Office: 1,162 Days
• CPC Class Codes: G01L 1/14 by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
• CPC Class Codes: G01L 1/142 using capacitors
• CPC Class Codes: G01L 5/1627 of strain gauges using piezoresistors G01L5/162
• CPC Class Codes: G01L 5/165 using variations in capacitance
• CPC Class Codes: G01L 5/223 to joystick controls

Abstract

A plate-like supporting body (200) is arranged below a plate-like force receiving body (100) and a deformation body (300) is connected between them. The deformation body (300) is provided with an elastically deformed portion (310) arranged along a connection channel (R1) which connects a first force receiving point (P1) with a second force receiving point (P2), a first base portion (320) and a second base portion (330) which support the elastically deformed portion (310) from below. The upper end of the first base portion (320) supports the vicinity of a first relay point (m1) on the connection channel (R1) so as to sway freely, and the upper end of the second base portion (330) supports the vicinity of a second relay point (m2) on the connection channel (R1) so as to sway freely. An arm-like member (312) which couples a pair of relay points (m1, m2) is used to lower the detection sensitivity of moment around an origin (O) which is exerted on the force receiving body (100), thereby easily adjusting the balance of detection sensitivity between moment and force.

Claims

1. A force sensor which detects at least force Fz in a direction of a Z-axis and moment My around a Y-axis, of force in respective directions of each coordinate axis and moment around each coordinate axis in an XYZ three-dimensional orthogonal coordinate system, the force sensor comprising:

a basic structure body (1000) which includes a force receiving body (100) arranged on the Z-axis when the coordinate system is defined so that the Z-axis is a perpendicular axis, a supporting body (200) which is arranged below the force receiving body, and a deformation body (300) which connects the force receiving body with the supporting body to yield at least partially elastic deformation by exertion of force or moment;

detection elements (C1 to C4) which detect deformation or displacement of the deformation body or displacement of the force receiving body or the supporting body; and

a detection circuit (900) which outputs electric signals indicating force Fz in the direction of the Z-axis and moment My around the Y-axis which have been exerted on one of the force receiving body and the supporting body in a state that loads are applied to the other on the basis of detection results of the detection elements;

wherein the deformation body (300) includes an elastically deformed portion (310) which is connected at a predetermined site to the force receiving body (100) to yield elastic deformation, a first base portion (320) and a second base portion (330) fixing a predetermined site of the elastically deformed portion to the supporting body (200), wherein the first base portion and second base portion are rigid, when the basic structure body (1000) is cut along an XZ plane or a plane parallel to the XZ plane and when a geometric figure appearing on a cross section of the force receiving body is referred to as a force receiving body figure (100f), a geometric figure appearing on a cross section of the supporting body is referred to as a supporting body figure (200f) and a geometric figure appearing on a cross section of the deformation body is referred to as a deformation body figure (300f), the deformation body figure includes an elastically deformed portion figure (310f) which is a cross section of the elastically deformed portion (310), a first base portion figure (320f) which is a cross section of the first base portion (320) and a second base portion figure (330f) which is a cross section of the second base portion (330), the elastically deformed portion figure (310f) is arranged along a predetermined connection channel (R1) which connects a first force receiving point (P1) with a second force receiving point (P2) which are defined at discrete locations on a contour of the force receiving body figure (100f), the elastically deformed portion figure couples the first force receiving point (P1) to the second force receiving point (P2), wherein the elastically deformed portion figure forms a continuous structure along the predetermined connection channel (R1) between the first force receiving point (P1) to the second force receiving point (P2), the first base portion figure (320f) is connected to the elastically deformed portion figure (310f) in a vicinity of a first relay point (m1) defined on the connection channel (R1), and the second base portion figure (330f) is connected to the elastically deformed portion figure (310f) in a vicinity of a second relay point (m2) defined on the connection channel (R1), the elastically deformed portion (310) couples the first force receiving point (P1) to the second force receiving point (P2), the first base portion (320) couples the vicinity of the first relay point (m1) at the elastically deformed portion (310) to a first supporting point (Q1) defined on the supporting body (200), and the second base portion (330) couples the vicinity of the second relay point (m2) at the elastically deformed portion (310) to a second supporting point (Q2) defined on the supporting body (200), the first force receiving point (P1) is arranged at a position having a negative coordinate value of an X-axis and the second force receiving point (P2) is arranged at a positive coordinate value of the X-axis, and when force Fz is exerted on the force receiving body (100) in a state that the supporting body (200) is fixed and when moment My is exerted on the force receiving body (100) in a state that the supporting body (200) is fixed, the vicinity of the first relay point (m1) at the elastically deformed portion (310) sways in the direction of the X-axis in relation to the first base portion (320), with a connection point (m1′

) with the first base portion (320) given as a supporting point, and the vicinity of the second relay point (m2) at the elastically deformed portion (310) sways in the direction of the X-axis in relation to the second base portion (330), with a connection point with the second base portion (330) given as a supporting point.

2. The force sensor according to claim 1, wherein

the elastically deformed portion figure (310f) includes a first external arm-like portion FIG. 3110 which is arranged along a zone from the first force receiving point (P1) to the first relay point (m1) on the connection channel (R1), an internal arm-like portion figure (312f) which is arranged along a zone from the first relay point (m1) to the second relay point (m2) on the connection channel (R1) and a second external arm-like portion figure (313f) which is arranged along a zone from the second relay point (m2) to the second force receiving point (P2) on the connection channel (R1).

3. The force sensor according to claim 2, wherein

a connection end of the first base portion figure (320f) is connected below in the vicinity of the first relay point (m1) at the elastically deformed portion figure (310f) and a connection end of the second base portion figure (330f) is connected below in the vicinity of the second relay point (m2) at the elastically deformed portion figure (310f).

4. The force sensor according to claim 3, wherein

the first base portion figure (320f) is arranged along a first supporting channel (R2) which connects the first relay point (m1) defined on the connection channel (R1) with the first supporting point (Q1) defined on a contour of the supporting body figure (200f) so that the first base portion figure couples the elastically deformed portion figure (310f) to the supporting body FIG. (200f), and

the second base portion figure (330f) is arranged along a second supporting channel (R3) which connects the second relay point (m2) defined on the connection channel (R1) with the second supporting point (Q2) defined on a contour of the supporting body figure (200f) so that the second base portion figure couples the elastically deformed portion figure (310f) to the supporting body figure (200f).

5. The force sensor according to claim 4, wherein

when force Fz is exerted on the force receiving body (100) in a state that the supporting body (200) is fixed and when moment My is exerted on the force receiving body (100) in a state that the supporting body (200) is fixed, the vicinity of the first relay point (m1) at the elastically deformed portion figure (310f) sways in relation to the first base portion figure (320f), with an intersection point (m1′

) of the first supporting channel (R2) and the contour of the elastically deformed portion figure (310f) given as a supporting point, and the vicinity of the second relay point (m2) at the elastically deformed portion figure (310f) sways in relation to the second base portion figure (330f), with an intersection point (m2′

) of the second supporting channel (R3) and the contour of the elastically deformed portion figure (310f) given as a supporting point.

6. The force sensor according to claim 3, wherein

a connection channel (R1, R4, R5, R7) which is traced from the first relay point (m1) to the second relay point (m2) includes a descending channel running downward along a first longitudinal direction axis (L1, L2, L4) intersecting with an XY plane and an ascending channel running upward along a second longitudinal direction axis (Z, L3, L5) intersecting with the XY plane, and

the internal arm-like portion figure (312f, 342f, 352f) includes a descending arm-like portion along the descending channel and an ascending arm-like portion along the ascending channel.

7. The force sensor according to claim 6, wherein

the first longitudinal direction axis (L1, L2) and the second longitudinal direction axis (Z, L3) are parallel to the Z-axis.

8. The force sensor according to claim 7, wherein

the first longitudinal direction axis or the second longitudinal direction axis (Z) is an axis included in the YZ plane.

9. The force sensor according to claim 7, wherein

the connection channel (R1, R4, R5, R7) includes a lengthwise direction channel which is parallel to the Z-axis and a crosswise direction channel which is parallel to the X-axis, and

the lengthwise-direction channel expands from the first force receiving point (P1) or the second force receiving point (P2), and the first relay point (m1) and the second relay point (m2) are defined on the crosswise direction channel.

10. The force sensor according to claim 3, wherein

a curved channel which is curved below and then curved above is installed at a zone between the first relay point (m1) and the second relay point (m2) on the connection channel (R6), and

the internal arm-like portion figure (362f) includes a curved portion along the curved channel.

11. The force sensor according to claim 2, wherein

a connection end of the first base portion figure (425f) is connected below in the vicinity of the first relay point (m1) at the elastically deformed portion figure (470f) and a connection end of the second base portion figure (435f) is connected above in the vicinity of the second relay point (m2) at the elastically deformed portion figure (470f).

12. The force sensor according to claim 11, wherein

the connection channel (R8) which is traced from the first relay point (m1) to the second relay point (m2) includes a descending channel which runs downward along a longitudinal direction axis (L6) intersecting with the XY plane, and

the internal arm-like portion figure (472f) includes a descending arm-like portion along the descending channel.

13. The force sensor according to claim 12, wherein

the longitudinal direction axis (L6) is parallel to the Z-axis.

14. The force sensor according to claim 2, wherein

a connection end of the first base portion figure is connected above in the vicinity of the first relay point (m1) at the elastically deformed portion figure, and a connection end of the second base portion figure is connected above in the vicinity of the second relay point (m2) at the elastically deformed portion figure.

15. The force sensor according to claim 1, wherein

a third relay point (m3) is further defined between the second relay point (m2) and the second force receiving point (P2) on the connection channel (R9),

the deformation body includes a third base portion, in addition to the elastically deformed portion, the first base portion and the second base portion,

the third base portion couples a vicinity of the third relay point (m3) at the elastically deformed portion to a third supporting point (Q3) defined on the supporting body (250), and

the elastically deformed portion figure (480f) includes a first external arm-like portion figure (481f) which is arranged along a zone from the first force receiving point (P1) to the first relay point (m1) on the connection channel (R9), a first internal arm-like portion figure (482f) which is arranged along a zone from the first relay point (m1) to the second relay point (m2) on the connection channel (R9), a second internal arm-like portion figure (483f) which is arranged along a zone from the second relay point (m2) to the third relay point (m3) on the connection channel (R9) and a second external arm-like portion figure (484f) which is arranged along a zone from the third relay point (m3) to the second force receiving point (P2) on the connection channel (R9).

16. The force sensor according to claim 15, wherein

a connection end of the first base portion figure (426f) is connected below in the vicinity of the first relay point (m1) at the elastically deformed portion figure (480f), a connection end of the second base portion figure (436f) is connected below in the vicinity of the second relay point (m2) at the elastically deformed portion figure (480f), and a connection end of a third base portion figure (496f) which is a cross section of the third base portion is connected above in the vicinity of the third relay point (m3) at the elastically deformed portion figure (480f).

17. The force sensor according to claim 2, wherein

a first U-letter shaped by-pass (U1) having a U-letter shape is formed at a zone between the first force receiving point (P1) and the first relay point (m1) on the connection channel (R7), and the first external arm-like portion figure (411f) includes a first U-letter shaped by-pass portion along the first U-letter shaped by-pass, and

a second U-letter shaped by-pass (U2) having a U-letter shape is formed at a zone between the second relay point (m2) and the second force receiving point (P2) on the connection channel (R7), and the second external arm-like portion figure (413f) includes a second U-letter shaped by-pass portion along the second U-letter shaped by-pass.

18. The force sensor according to claim 17, wherein

the first U-letter shaped by-pass (U1) and the second U-letter shaped by-pass (U2) are constituted in combination with a pair of lengthwise direction by-passes parallel to the Z-axis and a crosswise direction by-pass parallel to the X-axis which connects the pair of lengthwise direction by-passes.

19. The force sensor according to claim 2, wherein

a constricted portion (41-43;

51a, 51b, 52a, 52b, 53a, 53b) which is narrow in width in a direction orthogonal to the connection channel, is installed at all or some of the first external arm-like portion figure (441f;

451f), the internal arm-like portion figure (442f;

452f) and the second external arm-like portion figure (443f;

453f).

20. The force sensor according to claim 2, wherein

a weight adjusting portion figure (62f) which projects in a direction orthogonal to the connection channel is installed at all or some of the first external arm-like portion figure (461f), the internal arm-like portion figure (462f) and the second external arm-like portion figure 463f).

21. The force sensor according to claim 2, wherein

a flange portion figure (61f, 63f) which projects in a direction orthogonal to the connection channel is installed at a connection portion of the first external arm-like portion figure (461f) with the force receiving body figure (150f) and a connection portion of the second external arm-like portion figure (463f) with the force receiving body figure (150f).

22. The force sensor according to claim 1, wherein

a connection end of the first base portion figure (320f) with the elastically deformed portion figure (310f) and a connection end of the second base portion figure (330f) therewith each constitute a constricted figure which is narrower in width than the other portion.

23. The force sensor according to claim 1, wherein

the force receiving body (100) and the supporting body (200) are constituted with a plate member which has an upper face and a lower face, each of which is parallel to the XY plane.

24. The force sensor according to claim 1, wherein

the elastically deformed portion (310) is constituted with a structure body formed by bending an elongated arm-like member.

25. The force sensor according to claim 1, wherein

the detection element electrically detects an expansion/contraction state at a predetermined site of the elastically deformed portion, thereby detecting a deformed state of the deformation body.

26. The force sensor according to claim 1, wherein

the detection element electrically detects a distance between a predetermined site of the elastically deformed portion and a predetermined site of the supporting body, thereby detecting a displaced state of the deformation body.

27. The force sensor according to claim 26, wherein

the detection element is constituted with a plurality of capacitive elements, each of which has a displacement electrode formed at a predetermined site of the elastically deformed portion and a fixed electrode formed at a position of the supporting body opposite to the displacement electrode, and

the detection circuit performs arithmetic processing on the basis of capacitance values of the plurality of capacitive elements, thereby outputting electric signals indicating force Fz in the direction of the Z-axis and moment My around the Y-axis.

28. The force sensor according to claim 1, wherein

the deformation body (500) includes an elastically deformed portion (510) with regard to the X-axis which is connected at a predetermined site thereof to the force receiving body (150) to yield elastic deformation, a first base portion (520) with regard to the X-axis and a second base portion (530) with regard to the X-axis, each of which fixes the predetermined site of the elastically deformed portion with regard to the X-axis to the supporting body (250), an elastically deformed portion (540) with regard to the Y-axis which is connected at a predetermined site thereof to the force receiving body (150) to yield elastic deformation, and a first base portion (550) with regard to the Y-axis and a second base portion (560) with regard to the Y-axis, each of which fixes the predetermined site of the elastically deformed portion with regard to the Y-axis to the supporting body (250),

when the basic structure body is cut along an XZ plane or a plane parallel to the XZ plane and when a geometric figure appearing on a cross section of the force receiving body is referred to as a force receiving body figure (150fx) with regard to the X-axis, a geometric figure appearing on a cross section of the supporting body is referred to as a supporting body figure (250fx) with regard to the X-axis, and a geometric figure appearing on a cross section of the deformation body is referred to as a deformation body figure (500fx) with regard to the X-axis, and at this time,

the deformation body figure with regard to the X-axis includes an elastically deformed portion figure (510f) with regard to the X-axis which is a cross section of the elastically deformed portion (510) with regard to the X-axis, a first base portion figure (520f) with regard to the X-axis which is a cross section of the first base portion (520) with regard to the X-axis, and a second base portion figure (530f) with regard to the X-axis which is a cross section of the second base portion (530) with regard to the X-axis,

when the basic structure body is cut along a YZ plane or a plane parallel to the YZ plane and when a geometric figure appearing on a cross section of the force receiving body is referred to as a force receiving body figure (150fy) with regard to the Y-axis, a geometric figure appearing on a cross section of the supporting body is referred to as a supporting body figure (250fy) with regard to the Y-axis, and a geometric figure appearing on a cross section of the deformation body is referred to as a deformation body figure (500fy) with regard to the Y-axis, and at this time,

the deformation body figure with regard to the Y-axis includes an elastically deformed portion figure (540f) with regard to the Y-axis which is a cross section of the elastically deformed portion (540) with regard to the Y-axis, a first base portion figure (550f) with regard to the Y-axis which is a cross section of the first base portion (550) with regard to the Y-axis, and a second base portion figure (560f) with regard to the Y-axis which is a cross section of the second base portion (560) with regard to the Y-axis,

the elastically deformed portion figure (510f) with regard to the X-axis is arranged along a predetermined connection channel (R10) with regard to the X-axis which connects a first force receiving point (P11) with regard to the X-axis with a second force receiving point (P12) with regard to the X-axis defined on a contour of the force receiving body figure (150fx) with regard to the X-axis, and is a figure which couples the first force receiving point (P11) with regard to the X-axis to the second force receiving point (P12) with regard to the X-axis,

the first base portion figure (520f) with regard to the X-axis is connected to the elastically deformed portion figure (510f) with regard to the X-axis in a vicinity of a first relay point (m11) with regard to the X-axis defined on the connection channel (R10) with regard to the X-axis, and the second base portion figure (530f) with regard to the X-axis is connected to the elastically deformed portion figure (510f) with regard to the X-axis in a vicinity of a second relay point (m12) with regard to the X-axis defined on the connection channel (R10) with regard to the X-axis,

the elastically deformed portion figure (540f) with regard to the Y-axis is arranged along a predetermined connection channel (R11) with regard to the Y-axis which connects a first force receiving point (P21) with regard to the Y-axis with a second force receiving point (P22) with regard to the Y-axis defined on a contour of the force receiving body figure (150fy) with regard to the Y-axis, and is a figure which couples the first force receiving point (P21) with regard to the Y-axis to the second force receiving point (P22) with regard to the Y-axis,

the first base portion figure (550f) with regard to the Y-axis is connected to the elastically deformed portion figure (540f) with regard to the Y-axis in a vicinity of a first relay point (m21) with regard to the Y-axis defined on the connection channel (R11) with regard to the Y-axis, and the second base portion figure (560f) with regard to the Y-axis is connected to the elastically deformed portion figure (540f) with regard to the Y-axis in a vicinity of a second relay point (m22) with regard to the Y-axis defined on the connection channel (R11) with regard to the Y-axis,

the elastically deformed portion (510) with regard to the X-axis couples the first force receiving point (P11) with regard to the X-axis to the second force receiving point (P12) with regard to the X-axis, the first base portion (520) with regard to the X-axis couples the vicinity of the first relay point (m11) with regard to the X-axis at the elastically deformed portion (510) with regard to the X-axis to the first supporting point (Q11) with regard to the X-axis defined on the supporting body (250), and the second base portion (530) with regard to the X-axis couples the vicinity of the second relay point (m12) with regard to the X-axis at the elastically deformed portion (510) with regard to the X-axis to the second supporting point (Q12) with regard to the X-axis defined on the supporting body (250),

the elastically deformed portion (540) with regard to the Y-axis couples the first force receiving point (P21) with regard to the Y-axis to the second force receiving point (P22) with regard to the Y-axis, the first base portion (550) with regard to the Y-axis couples the vicinity of the first relay point (m21) with regard to the Y-axis at the elastically deformed portion (540) with regard to the Y-axis to a first supporting point (Q21) with regard to the Y-axis defined on the supporting body (250), and the second base portion (560) with regard to the Y-axis couples the vicinity of the second relay point (m22) with regard to the Y-axis at the elastically deformed portion (540) with regard to the Y-axis to a second supporting point (Q22) with regard to the Y-axis defined on the supporting body (250),

the first force receiving point (P11) with regard to the X-axis is arranged at a position having a negative coordinate value of the X-axis, the second force receiving point (P12) with regard to the X-axis is arranged at a position having a positive coordinate value of the X-axis, the first force receiving point (P21) with regard to the Y-axis is arranged at a position having a negative coordinate value of the Y-axis, and the second force receiving point (P22) with regard to the Y-axis is arranged at a position having a positive coordinate value of the Y-axis,

when force Fz is exerted on the force receiving body (150) in a state that the supporting body (250) is fixed and when moment My is exerted on the force receiving body (150) in a state that the supporting body (250) is fixed, the vicinity of the first relay point (m11) with regard to the X-axis at the elastically deformed portion (510) with regard to the X-axis sways in the direction of the X-axis in relation to the first base portion (520) with regard to the X-axis, with a connection point with the first base portion (520) with regard to the X-axis given as a supporting point, and the vicinity of the second relay point (m12) with regard to the X-axis at the elastically deformed portion (510) with regard to the X-axis sways in the direction of the X-axis in relation to the second base portion (530) with regard to the X-axis, with a connection point with the second base portion (530) with regard to the X-axis given as a supporting point,

when force Fz is exerted on the force receiving body (150) in a state that the supporting body (250) is fixed and when moment Mx is exerted on the force receiving body (150) in a state that the supporting body (250) is fixed, the vicinity of the first relay point (m21) with regard to the Y-axis at the elastically deformed portion (540) with regard to the Y-axis sways in the direction of the Y-axis in relation to the first base portion (550) with regard to the Y-axis, with a connection point with the first base portion (550) with regard to the Y-axis given as a supporting point, and the vicinity of the second relay point (m22) with regard to the Y-axis at the elastically deformed portion (540) with regard to the Y-axis sways in the direction of the Y-axis in relation to the second base portion (560) with regard to the Y-axis, with a connection point with the second base portion (560) with regard to the Y-axis given as a supporting point, and

the detection circuit (900) outputs not only electric signals indicating force Fz in the direction of the Z-axis and moment My around the Y-axis, but also an electric signal indicating moment Mx around the X-axis which have been exerted on one of the force receiving body and the supporting body in a state that loads are applied to the other, on the basis of detection results of the detection element.

29. The force sensor according to claim 28, wherein

the elastically deformed portion (510) with regard to the X-axis is constituted with a structure body formed by bending an elongated arm-like member arranged on the XZ plane, the elastically deformed portion (540) with regard to the Y-axis is constituted with a structure body formed by bending an elongated arm-like member arranged on the YZ plane, and the elastically deformed portion (510) with regard to the X-axis is integrated with the elastically deformed portion (540) with regard to the Y-axis at a position intersecting with the Z-axis.

30. The force sensor according to claim 28, wherein

the deformation body figure (500fx) with regard to the X-axis is a cross section figure obtained when the deformation body (500) is cut along the XZ plane, and the deformation body figure (500fy) with regard to the Y-axis is a cross section figure obtained when the deformation body (500) is cut along the YZ plane,

each of the elastically deformed portion figure (510f) with regard to the X-axis and the elastically deformed portion figure (540f) with regard to the Y-axis is formed to be symmetrical with the Z-axis, the elastically deformed portion figure (510f) with regard to the X-axis and the elastically deformed portion figure (540f) with regard to the Y-axis are geometrically congruent figures, and the elastically deformed portion (510) with regard to the X-axis and the elastically deformed portion (540) with regard to the Y-axis are constituted with a part of an elastically deformed integrated portion (570) composed of a rotation body obtained by rotating the congruent figure, with the Z-axis given as the central axis.

31. The force sensor according to claim 30, wherein

each of a base portion figure group with regard to the X-axis constituted with the first base portion figure (520f) with regard to the X-axis and the second base portion figure (530f) with regard to the X-axis and a base portion figure group with regard to the Y-axis constituted with the first base portion figure (550f) with regard to the Y-axis and the second base portion figure (560f) with regard to the Y-axis is formed to be symmetrical with the Z-axis, the base portion figure group with regard to the X-axis and the base portion figure group with regard to the Y-axis are geometrically congruent figures, and the first base portion (520) with regard to the X-axis, the second base portion (530) with regard to the X-axis, the first base portion (550) with regard to the Y-axis, and the second base portion (560) with regard to the Y-axis are constituted with a part of an integrated base portion (580) composed of a rotation body obtained by rotating the congruent figure, with the Z-axis given as the central axis.

32. The force sensor according to claim 28, wherein

a first U-letter shaped by-pass (U11) with regard to the X-axis having a U-letter shape is installed at a zone between the first force receiving point (P11) with regard to the X-axis and the first relay point (m11) with regard to the X-axis on the connection channel (R10) with regard to the X-axis, and a second U-letter shaped by-pass (U12) with regard to the X-axis having a U-letter shape is installed at a zone between the second relay point (m12) with regard to the X-axis and the second force receiving point (P12) with regard to the X-axis on the connection channel (R10) with regard to the X-axis,

a first U-letter shaped by-pass (U21) with regard to the Y-axis having a U-letter shape is installed at a zone between the first force receiving point (P21) with regard to the Y-axis and the first relay point (m21) with regard to the Y-axis on the connection channel (R11) on the Y-axis, and a second U-letter shaped by-pass (U22) with regard to the Y-axis having a U-letter shape is installed at a zone between the second relay point (m22) with regard to the Y-axis and the second force receiving point (P22) with regard to the Y-axis on the connection channel (R11) with regard to the Y-axis,

the detection element comprises;

a first capacitive element (C1) which is constituted with a first displacement electrode (E11) fixed on a bottom of a part of the elastically deformed portion (510) with regard to the X-axis which is arranged along the first U-letter shaped by-pass (U11) with regard to the X-axis and a first fixed electrode (E21) fixed at a part opposite to the first displacement electrode on an upper face of the supporting body (250),

a second capacitive element (C2) which is constituted with a second displacement electrode (E12) fixed on a bottom of a part of the elastically deformed portion (510) with regard to the X-axis which is arranged along the second U-letter shaped by-pass (U12) with regard to the X-axis and a second fixed electrode (E22) fixed at a part opposite to the second displacement electrode on the upper face of the supporting body (250),

a third capacitive element (C3) which is constituted with a third displacement electrode (E13) fixed on a bottom of a part of the elastically deformed portion (540) with regard to the Y-axis which is arranged along the first U-letter shaped by-pass (U21) with regard to the Y-axis and a third fixed electrode (E23) fixed at a part opposite to the third displacement electrode on the upper face of the supporting body (250), and

a fourth capacitive element (C4) which is constituted with a fourth displacement electrode (E14) fixed on a bottom of a part of the elastically deformed portion (540) with regard to the Y-axis which is arranged along the second U-letter shaped by-pass (U22) with regard to the Y-axis and a fourth fixed electrode (E24) fixed at a part opposite to the fourth displacement electrode on the upper face of the supporting body (250),

the detection circuit (900) outputs a difference in capacitance value between the first capacitive element (C1) and the second capacitive element (C2) as an electric signal indicating moment My around the Y-axis, a difference in capacitance value between the third capacitive element (C3) and the fourth capacitive element (C4) as an electric signal indicating moment Mx around the X-axis, and a sum of capacitance values of the first capacitive element (C1), the second capacitive element (C2), the third capacitive element (C3) and the fourth capacitive element (C4) as an electric signal indicating force Fz in a direction of the Z-axis.

33. An auxiliary structure body for a force sensor which is identical in structure with the deformation body of the force sensor according to claim 1.

34. A force sensor (5000) into which the auxiliary structure body according to claim 33 is incorporated,

the force sensor which has a function to detect at least force Fz in a direction of the Z-axis and moment My around the Y-axis, of force in respective directions of each coordinate axis and moment around each coordinate axis in an XYZ three-dimensional orthogonal coordinate system, and

when the coordinate system is defined so that the Z-axis is given as a perpendicular axis, the force sensor includes a force receiving body (5100) arranged on the Z-axis, a supporting body (5200) arranged below the force receiving body, a detection-use deformation body (5300) which connects the force receiving body with the supporting body to yield at least partially elastic deformation upon exertion of force or moment, the auxiliary structure body (5401 to 5404) connected between the force receiving body and the supporting body, a detection element which detects deformation or displacement of the detection-use deformation body or displacement of the force receiving body or the supporting body, and a detection circuit which outputs electric signals indicating force Fz in the direction of the Z-axis and moment My around the Y-axis which have been exerted on the other in a state that loads are applied to one of the force receiving body and the supporting body on the basis of detection results of the detection element.

35. An auxiliary structure body (5400) which is used as a part of components by being incorporated into a force sensor which includes a force receiving body (5100), a supporting body (5200) and a detection-use deformation body (5300) connecting the force receiving body with the supporting body, said force censor detects elastic deformation of the detection-use deformation body occurring upon exertion of force or moment, thereby detecting the force or moment which has been exerted, the auxiliary structure body for a force sensor providing an elastically deformed portion (5410), a first base portion (5420) and a second base portion (5430), wherein the first base portion and second base portion are rigid, wherein the elastically deformed portion (5410) is a structure body which yields at least partially elastic deformation and provided at one end thereof with a first force receiving point (P1) for fixing it to a first site of the force receiving body (5100) and at the other end thereof with a second force receiving point (P2) for fixing it to a second site of the force receiving body (5100), wherein the first and second force receiving points are defined at discrete locations on the force receiving body, thereby forming an arm-like structure body along a predetermined connection channel (R12) which connects the first force receiving point with the second force receiving point, wherein the elastically deformed portion forms a continuous structure along the predetermined connection channel (R12) between the first force receiving point (P1) to the second force receiving point (P2), the first base portion (5420) is connected at one end thereof to the elastically deformed portion (5410) in a vicinity of a first relay point (m1) defined on the connection channel (R12) and provided at the other end thereof with a first supporting point (Q1) for fixing it to a first site of the supporting body (5200), the second base portion (5430) is connected at one end thereof to the elastically deformed portion (5410) in a vicinity of a second relay point (m2) defined on the connection channel (R12) and provided at the other end thereof with a second supporting point (Q2) for fixing it to a second site of the supporting body (5200), and when force is exerted on the first force receiving point (P1) and the second force receiving point (P2) at the elastically deformed portion (5410) in a state that the first supporting point (Q1) of the first base portion (5420) and the second supporting point (Q2) of the second base portion (5430) are fixed, the vicinity of the first relay point (m1) at the elastically deformed portion (5410) sways in relation to the first base portion (5420), with a connection point with the first base portion (5420) given as a supporting point, and the vicinity of the second relay point (m2) at the elastically deformed portion (5410) sways in relation to the second base portion (5430), with a connection point with the second base portion (5430) given as a supporting point.

36. The auxiliary structure body for a force sensor according to claim 35, wherein

the connection channel (R12) is installed on a VW plane of a VW two-dimensional orthogonal coordinate system and the elastically deformed portion (5410) is formed in an arm-like structure body expanding along the VW plane, and

when an origin (G) of the VW two-dimensional orthogonal coordinate system is defined at a position of the center of gravity, the first force receiving point (P1) is positioned at a second quadrant of the VW two-dimensional orthogonal coordinate system, the second force receiving point (P2) is positioned at a first quadrant of the VW two-dimensional orthogonal coordinate system, the first supporting point (Q1) is positioned at a third quadrant of the VW two-dimensional orthogonal coordinate system, and the second supporting point (Q2) is positioned at a fourth quadrant of the VW two-dimensional orthogonal coordinate system.

37. The auxiliary structure body for a force sensor according to claim 36 which is constituted with a plate member having an upper face composed of a plane parallel to the VW plane and a lower face composed of a plane parallel to the VW plane.

38. The auxiliary structure body for a force sensor according to claim 36, wherein

when the connection channel (R12) is traced so as to move from the first relay point (m1) to the second relay point (m2), the connection channel (R12) is provided with a first advancing channel (r1) which advances in the negative direction of the W-axis and a second advancing channel (r2) which advances in the positive direction of the W-axis.

39. The auxiliary structure body for a force sensor according to claim 38, wherein

the first advancing channel (r1) or the second advancing channel (r2) is a channel which passes through the origin (G) of the VW two-dimensional orthogonal coordinate system.

40. The auxiliary structure body for a force sensor according to claim 36, wherein

the connection channel (R12) is provided with a lengthwise direction channel which is parallel to the W-axis and a crosswise direction channel which is parallel to the V-axis, and

the lengthwise direction channel expands from the first force receiving point (P1) or the second force receiving point (P2), and the first relay point (m1) and the second relay point (m2) are defined on the crosswise direction channel.

41. The auxiliary structure body for a force sensor according claim 36, wherein

a first U-letter shaped by-pass (U1) which is formed in a U-letter shape is installed at a zone between the first force receiving point (P1) and the first relay point (m1) on the connection channel (R12), and a second U-letter shaped by-pass (U2) which is formed in a U-letter shape is installed at a zone between the second relay point (m2) and the second force receiving point (P2) on the connection channel (R12).

42. The auxiliary structure body for a force sensor according to claim 41, wherein

each of the first U-letter shaped by-pass (U1) and the second U-letter shaped by-pass (U2) is constituted in combination with a pair of lengthwise direction by-passes parallel to the W-axis and a crosswise direction by-pass parallel to the V-axis which connects the pair of lengthwise direction by-passes.

43. The auxiliary structure body for a force sensor according to claim 36, wherein

a constricted portion (54;

55) narrow in width in a direction orthogonal to the connection channel (R12) is installed at a part of the arm-like structure body which constitutes the elastically deformed portion (5410;

5510).

44. The auxiliary structure body for a force sensor according of claim 36, wherein

a weight adjusting portion (62) which projects in a direction orthogonal to the connection channel (R12) is installed at a specific site of the arm-like structure body which constitutes the elastically deformed portion (5410;

5510).

45. The auxiliary structure body for a force sensor according claim 36, wherein

a connection end of the first base portion (5420;

5520) and the second base portion (5430;

5530) with the elastically deformed portion (5410;

5510) constitutes a constricted leading end (5421, 5431;

5521, 5531) narrower in width than the other part.

46. The force sensor (5000) into which the auxiliary structure body according to claim 36 is incorporated as a part of components,

the force sensor providing a force receiving body (5100), a supporting body (5200), a detection-use deformation body (5300) connecting the force receiving body with the supporting body, a detection element (D) which detects elastic deformation of the detection-use deformation body, a detection circuit (5900) which outputs a detection signal of force or moment which has been exerted on the basis of detection results of the detection element, and the auxiliary structure body (5400;

5500), wherein

the first force receiving point (P1) and the second force receiving point (P2) at the auxiliary structure body are joined to a lower face of the force receiving body (5100), and the first supporting point (Q1) and the second supporting point (Q2) at the auxiliary structure body are joined to an upper face of the supporting body (5200).

47. The force sensor according to claim 46, wherein

the force receiving body (5100) and the supporting body (5200) are constituted with a plate member which has an upper face and a lower face, each of which is parallel to the XY plane, and the Z-axis penetrates through the force receiving body (5100) and the supporting body (5200),

four sets of auxiliary structure bodies are incorporated so as to surround a periphery of the detection-use deformation body (5300) which connects the force receiving body (5100) with the supporting body (5200),

a first auxiliary structure body (5401) is arranged so that the V-axis is parallel to the Y-axis and the W-axis is parallel to the Z-axis at a position at which the VW plane intersects with the positive X-axis,

a second auxiliary structure body (5402) is arranged so that the V-axis is parallel to the X-axis and the W-axis is parallel to the Z-axis at a position at which the VW plane intersects with the positive Y-axis,

a third auxiliary structure body (5403) is arranged so that the V-axis is parallel to the Y-axis and the W-axis is parallel to the Z-axis at a position at which the VW plane intersects with the negative X-axis,

a fourth auxiliary structure body (5404) is arranged so that the V-axis is parallel to the X-axis and the W-axis is parallel to the Z-axis at a position at which the VW plane intersects with the negative Y-axis, and

the first force receiving point (P1) and the second force receiving point (P2) at each of the auxiliary structure bodies are joined on a lower face of the force receiving body (5100), and the first supporting point (Q1) and the second supporting point (Q2) at each of the auxiliary structure bodies are joined on an upper face of the supporting body (5200).