Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization

• US 9,996,647 B2
• Filed: 09/07/2017
• Issued: 06/12/2018
• Est. Priority Date: 02/08/2016
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Tetiker, Mehmet Derya, Sriraman, Saravanapriyan, Bailey, III, Andrew D., Paterson, Alex, Gottscho, Richard A.
• Primary Examiner(s): Ngo, Brian
• Application Number:
  US15/698,458
• Publication Number:
  US 20170371991A1
• Time in Patent Office: 278 Days
• Field of Search: 716 51, 716 52, 716 53, 716 54, 716 55
• CPC Class Codes: G01B 11/002 for measuring two or more coordinates
• CPC Class Codes: G01B 2210/56 Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
• CPC Class Codes: G01N 21/55 Specular reflectivity
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
• CPC Class Codes: G03F 1/80 Etching
• CPC Class Codes: G03F 1/84 Inspecting
• CPC Class Codes: G03F 7/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using photoresist structures for special production processes, see the relevant places, e.g. B44C, H01L, e.g. H01L21/00, H05K
• CPC Class Codes: G06F 30/367 Design verification, e.g. using simulation, simulation program with integrated circuit emphasis [SPICE], direct methods or relaxation methods
• CPC Class Codes: G06F 30/39 Circuit design at the physical level physical level design for reconfigurable circuits G06F30/347

Abstract

Disclosed are methods of optimizing a computer model which relates the etch profile of a feature on a semiconductor substrate to a set of independent input parameters (A), via the use of a plurality of model parameters (B). In some embodiments, the methods may include modifying one or more values of B so as to reduce a metric indicative of the differences between computed reflectance spectra generated from the model and corresponding experimental reflectance spectra with respect to one or more sets of values of A. In some embodiments, calculating the metric may include an operation of projecting the computed and corresponding experimental reflectance spectra onto a reduced-dimensional subspace and calculating the difference between the reflectance spectra as projected onto the subspace. Also disclosed are etch systems implementing such optimized computer models.

Claims

1. A method of generating a lithography mask by optimizing a computer model which relates an etch profile of a feature on a semiconductor substrate to a set of independent input parameters, via the use of a plurality of model parameters, the method comprising:

(a) identifying a set of values for a selected set of the model parameters to be optimized;

(b) identifying multiple sets of values for a selected set of independent input parameters to optimize over;

(c) for each set of values identified in (b), receiving an experimental reflectance spectra generated from an optical measurement of an experimental etch process performed using the set of values specified in (b);

(d) for each set of values identified in (b), generating a computed reflectance spectra from the model using the set of values specified in (a) and (b);

(e) modifying one or more values identified in (a) for the selected set of model parameters and repeating (d) with the modified set of values so as to reduce a metric indicative of the differences between the experimental reflectance spectra received in (c) and corresponding computed reflectance spectra generated in (d) with respect to one or more sets of values for the selected independent input parameters specified in (b), thereby producing modified values for the selected set of model parameters;

(f) using the computer model with the modified values for the selected set of model parameters to design and generate the lithographic mask.

2. The method of claim 1, wherein at least some of the computed reflectance spectra are generated by a process comprising:

(i) generating a computed etch profile represented by a series of etch profile coordinates using the model;

(ii) from the computed etch profile generated in (i), generating a computed reflectance spectrum by simulating the reflection of electromagnetic radiation off of said computed etch profile.

3. The method of claim 1, wherein:

the experimental reflectance spectra generated in (c) comprise reflectance spectra corresponding to a sequence of etch times representing different durations of etch processes; and

the computed reflectance spectra generated in (d) comprise reflectance spectra computed from the model so as to correspond to the sequence of etch times in (c).

4. The method of claim 3, wherein the experimental reflectance spectra are generated in (c) from optical measurements taken during ongoing etch processes at the sequence of etch times.

5. The method of claim 4, wherein consecutive etch times over at least a portion of the sequence of etch times are separated by 0.01-1 second.

6. The method of claim 4, wherein consecutive etch times over at least a portion of the sequence of etch times are separated by 0.05-0.5 second.

7. The method of claim 4, wherein at least some of the experimental reflectance spectra generated in (c) have been adjusted based on comparisons with optical measurements taken with respect to, and after the conclusion of, substrate etch processes of various durations.

8. The method of claim 7, wherein the optical measurements corresponding to the concluded etch processes of various duration are taken after the corresponding etched substrates have been removed from the processing chambers in which they were etched.

9. The method of claim 1, further comprising repeating (e).

10. The method of claim 9, further comprising further repeating (e) until a substantially local minimum in error with respect to the model parameters selected in (a) is obtained.

11. The method of claim 1, wherein the computer model calculates local etch rates at a grid of points representing the etch profile of the feature on the semiconductor substrate as a function of time.

12. The method of claim 11, wherein the model parameters include reaction rate constants, reactant and product sticking coefficients, and/or reactant and product diffusion constants.

13. The method of claim 1, wherein the selection in (b) of the multiple sets of values for the set of independent input parameters comprises performing PCA.

14. The method of claim 13, wherein the PCA is performed with respect to concatenated vectors of independent input parameters and corresponding measured etch profiles.

15. A method of etching a semiconductor substrate by using an optimized computer model which relates an etch profile of a feature on a semiconductor substrate to a set of independent input parameters, via the use of a plurality of model parameters, the method comprising:

(a) identifying a set of values for a selected set of the model parameters to be optimized;

(b) identifying multiple sets of values for a selected set of independent input parameters to optimize over;

(c) for each set of values specified in (b), receiving an experimental reflectance spectra generated from an optical measurement of an etch process performed using the set of values specified in (b);

(d) for each set of values specified in (b), generating a computed reflectance spectra from the model using the set of values specified in (a) and (b);

(e) modifying one or more values specified in (a) for the selected set of model parameters and repeating (d) with the modified set of values so as to reduce a metric indicative of the differences between the experimental reflectance spectra received in (c) and corresponding computed reflectance spectra generated in (d) with respect to one or more sets of values for the selected independent input parameters specified in (b), thereby producing modified values for the selected set of model parameters; and

(f) etching the semiconductor substrate using or adjusting a set of etch conditions determined using the computer model with the modified values for the selected set of model parameters.

16. The method of claim 15, wherein at least some of the computed reflectance spectra are generated by a process comprising:

(i) generating a computed etch profile represented by a series of etch profile coordinates using the model;

(ii) from the computed etch profile generated in (i), generating a computed reflectance spectrum by simulating the reflection of electromagnetic radiation off of said computed etch profile.

17. The method of claim 15, wherein:

the experimental reflectance spectra generated in (c) comprise reflectance spectra corresponding to a sequence of etch times representing different durations of etch processes; and

the computed reflectance spectra generated in (d) comprise reflectance spectra computed from the model so as to correspond to the sequence of etch times in (c).

18. The method of claim 17, wherein the experimental reflectance spectra are generated in (c) from optical measurements taken during ongoing etch processes at the sequence of etch times.

19. The method of claim 18, wherein at least some of the experimental reflectance spectra generated in (c) have been adjusted based on comparisons with optical measurements taken with respect to, and after the conclusion of, substrate etch processes of various durations.

20. The method of claim 19, wherein the optical measurements corresponding to the concluded etch processes of various duration are taken after the corresponding etched substrates have been removed from the processing chambers in which they were etched.

21. An optimized computer model which generates a computed etch profile of a feature on a semiconductor substrate from a set of values for a set of independent input parameters, the computer model having been optimized by operations (a)-(e) of claim 15.

22. A method of approximately determining the profile of a feature on a semiconductor substrate after the feature has been etched by an etch process, the method comprising:

specifying a set of values for a set of independent input parameters corresponding to the etch process; and

generating an etch profile using the optimized computer model of claim 21 with the specified set of values for the independent input parameters.

23. A method of determining a set of values for a set of independent input parameters for an etch process which will approximately yield a desired etch profile of a feature on a semiconductor substrate after the feature is etched by said etch process, the method comprising:

(a) specifying a set of values for a set of independent input parameters corresponding to an etch process;

(b) generating a computed etch profile using the optimized computer model of claim 21 with the specified set of values for the independent input parameters;

(c) computing a metric indicative of the difference between the desired etch profile and the computed etch profile; and

(d) modifying one or more values for the set of independent input parameters specified in (a) so as to reduce the difference between desired and computed etch profiles as ascertained by repeating (b)-(c).

24. The method of claim 23, further comprising:

(e) repeating (d) until a substantially local minimum in error with respect to the values for the set of independent input parameters selected in (d) is obtained.

25. A system for processing semiconductor substrates, the system comprising:

an etcher apparatus for etching semiconductor substrates whose operation is adjusted by a set of independent input parameters; and

a controller for controlling the operation of the etcher apparatus, the controller comprising a processor and a memory;

wherein;

the memory stores an etched feature profile model optimized by operations (a)-(e) of claim 15; and

the processor is configured to use the etched feature profile model stored in the memory to compute an etched feature profile from a set of values for the set of independent input parameters.

26. The system of claim 25, wherein the controller adjusts the operation of the etcher apparatus by varying one or more values of the set of independent input parameters in response to the computed etched feature profile.

27. The system of claim 26, wherein the set of independent input parameters whose values are varied in response to the computed etched feature profile include one or more parameters selected from:

RF plasma frequency and RF plasma power level.

28. The system of claim 25, wherein the etcher apparatus comprises:

a processing chamber;

a substrate holder for holding a substrate within the processing chamber;

a plasma generator for generating a plasma within the processing chamber, the plasma generator comprising an RF power supply;

one or more valve-controlled process gas inlets for flowing one or more process gases into the processing chamber; and

one or more gas outlets fluidically connected to one or more vacuum pumps for evacuating gases from the processing chamber.

29. The system of claim 28, wherein the controller adjusts the frequency and/or the power level of the RF power supply to modify characteristics of the plasma in the processing chamber in response to the computed etched feature profile.

30. The system of claim 28, wherein the controller operates the one or more valve-controlled process gas inlets to adjust the flow rates of one or more process gases into the processing chamber in response to the computed etched feature profile.

31. The system of claim 28, wherein the controller adjusts a temperature and/or a pressure within the processing chamber in response to the computed etched feature profile.