Vacuum processing equipment configuration

• US D473,354 S1
• Filed: 01/12/1999
• Issued: 04/15/2003
• Est. Priority Date: 08/29/1990
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Itou, Atsushi, Tsubone, Tsunehiko, Kato, Shigekazu, Nishihata, Kouji
• Primary Examiner(s): MCINROY, RUTH T
• Application Number:
  US29/099,071
• Time in Patent Office: 1,554 Days
• Field of Search: 344/06, 342/29, 34/92, 342/28, 134/902
• US Class Current: D32/1
• CPC Class Codes: N/A

Claims

1. The ornamental design for a vacuum processing equipment configuration, as shown and described.