Reactant source vessel

• US D614,153 S1
• Filed: 04/06/2009
• Issued: 04/20/2010
• Est. Priority Date: 10/10/2006
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Shero, Eric J, White, Carl L, Fondurulia, Kyle, Verghese, Mohith
• Primary Examiner(s): SNAPP, SANDRA S
• Application Number:
  US29/334,984
• Time in Patent Office: 379 Days
• Field of Search: D23355-369, D28/5, D28/6, 261/DIG.17, 261/DIG.42, 261/DIG.65, 261/DIG.88, 261/DIG.89, 392/386, 392/390, 392/391, 392/392, 392/394, 392/395, 392/389, 392/393, 239/34, 239/35, 239 43- 45, 239/53, 239/56, 239/57, 239/60, 239/326, 239/42, 239/50, 239/55, D13/182, 156/345.29, 156/345.33, 156/345.4, 156/345.5, 156/345.51, 156/345.52, 156/345.53, 156/345.54, 279/128, 361/230
• US Class Current: D13/182
• CPC Class Codes: C23C 16/4401 Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
• CPC Class Codes: C23C 16/4402 Reduction of impurities in the source gas
• CPC Class Codes: C23C 16/448 characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: H01L 21/205 using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition

Claims

1. The ornamental design for a reactant source vessel, as shown and described.