Substrate supporter for semiconductor deposition apparatus
First Claim
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1. The ornamental design for a substrate supporter for semiconductor deposition apparatus, as shown and described.
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1 Claim
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1. The ornamental design for a substrate supporter for semiconductor deposition apparatus, as shown and described.
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Current AssigneeASM IP Holding B.V. (ASM International NV)
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Original AssigneeASM IP Holding B.V. (ASM International NV)
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InventorsChoi, Seung Woo, Kim, Dae Youn, Jang, Hyun Soo, Noh, Hyung Wook, Woo, Jeong Jun
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Primary Examiner(s)Oswecki, Elizabeth J
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Application NumberUS29/484,673Time in Patent Office370 DaysField of SearchD13/182, 118/500, 118/715, 118/728, 118/729, 156/345.51, 156/345.52, 156/345.53, 156/345.55, 279/128, 361/234, 414/217, 414/220.01, 414/416.03, 414/935, 414/936, 414/937, 414/939, 414/940, 414/941US Class CurrentD13/182CPC Class CodesN/A
