×

Vibratory angular rate sensor system

  • US RE32,931 E
  • Filed: 01/22/1988
  • Issued: 05/30/1989
  • Est. Priority Date: 01/23/1984
  • Status: Expired due to Term
First Claim
Patent Images

1. A vibratory angular rate sensor system comprising:

  • (a) a mounting, .[.frame of substantially rectangular configuration having a substantially rectangular opening.]. said .[.frame.]. .Iadd.mounting .Iaddend.consisting of a piezoelectric material .[.of Z-cut crystalline quartz.].;

    (b) a first pair and a second pair of tines .Iadd.forming a tine structure.Iaddend., .[.disposed in said opening.]. said first pair forming vibrating drive tines.[.,.]. vibrating toward and away from each other .Iadd.in a plane of motion .Iaddend.and said second pair of tines forming vibrating output tines.[.,.]. vibrating in .Iadd.directions perpendicular to said plane of motion .[.opposite directions up and down.].;

    (c) .[.a stem.]. .Iadd.interconnecting means .Iaddend.interconnecting said first and second .[.pair.]. .Iadd.pairs .Iaddend.of tines .Iadd.to effect an interdependency between the first and second pairs of tines whereby motion in one pair of tines is transferred to the other pair of tines.Iaddend., the tines of each pair being disposed parallel to each other and corresponding tines of .[.both pairs.]. .Iadd.each pair .Iaddend.being disposed along a common axis;

    (d) means including .[.two pairs of.]. input electrodes in contact with the first pair of tines for exciting said tines substantially at the resonant frequency thereof, .[.said input electrodes being in the X-Y and Y-Z planes of said wafer.].;

    (e) means including .[.two pairs of.]. output electrodes .[.disposed.]. in contact with the second pair of tines .[.in the Y-Z plane.]. for deriving an output signal representative of the angular rate experienced by said system, the flexural .Iadd.resonant .Iaddend.frequency of said first pair of tines being .[.lower than.]. .Iadd.different from .Iaddend.that of said second pair of tines and(f) .[.a plurality of bridges,.]. .Iadd.bridge means .Iaddend.integral with said .[.frame.]. .Iadd.mounting .Iaddend.and connected to said .[.stem.]. .Iadd.means interconnecting said first and second pairs of tines for supporting said first and second pairs of tines on said mounting.Iaddend..

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×