Atomic force microscope and method for imaging surfaces with atomic resolution

• US RE33,387 E
• Filed: 11/16/1988
• Issued: 10/16/1990
• Est. Priority Date: 11/26/1985
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Binnig, Gerd K.
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US07/273,354
• Time in Patent Office: 699 Days
• Field of Search: 250/306, 250/307, 250/423 F
• US Class Current: 250/306
• CPC Class Codes: G01Q 20/00 Monitoring the movement or position of the probe
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

A sharp point (5) is brought so close to the surface of a sample (4) to be investigated that the forces occurring between the atoms at the apex of the point (5) and those at the surface cause a spring-like cantilever (7) to deflect. The cantilever (7) forms one electrode of a tunneling microscope, the other electrode being a sharp tip (8). The deflection of the cantilever (7) provokes a variation of the tunnel current, and that variation is used to generate a correction signal which can be employed to control the distance between said point (5) and the sample (4), in order, for example, to maintain the force between them constant as the point (5) is scanned across the surface of the sample (4) by means of an xyz-drive (3). In certain modes of operation, either the sample (4) or the cantilever (7) may be excited to oscillate in z-direction. If the oscillation is at the resonance frequency of the cantilever (7), the resolution is enhanced.

Claims

1. A method for generating a topographical image of a surface of a sample with a resolution better than 100 nm, comprising the steps of:

moving a sharp point (5) which is fixed to one end of a spring-like cantilever (7) toward the surface of the sample (4) to be inspected to a distance where the forces occurring between the atoms at the apex of said point (5) and on the sample'"'"'s surface are larger than 10^-20 N and the resulting force deflects said cantilever (7);

detecting the deflection of said cantilever (7) by means of a tunnel tip (8) disposed adjacent said cantilever (7);

maintaining the tunnel current flowing across the tunnel gap between said cantilever (7) and said tunnel tip (8) at a substantially constant preselected value by using any detected variations of the tunnel current from said preselected value to generate a correction signal;

using said correction signal to maintain the point-to-sample distance substantially constant; and

moving the sample relative to said point (5).

2. The method in accordance with claim 1, comprising the further steps of:

generating a series of successive position signals (via

     33), each indicative of the then current position of the point (5) relative to the sample (4), and

using changes in the correction signal in conjunction with the position signals to generate (via

     37) a human readable topographical image of the surface of the sample.

3. The method in accordance with claim 1, wherein during the detecting step the sample (4) is oscillated in z-direction by appropriately modulating the xyz-drive (3) on which the sample is held, at the eigen frequency of said cantilever (7) and with an amplitude between 0.1 and 1 nanometer, for causing the cantilever (7) to oscillate and thus modulate the tunnel current.

4. The method in accordance with claim 1, wherein during the detecting step said cantilever (7) is excited to oscillate in z-direction at an amplitude in the 0.01 . . . 0.1 nanometer range, and including the further step of deriving an additional correction signal from the changes in amplitude occurring as the sample (4) is scanned.

5. The method in accordance with claim 1, including the step of exciting said cantilever (7) to oscillate in z-direction at an amplitude in the 0.01 . . . 0.1 nanometer range, and deriving an additional correction signal from changes in the phase of the cantilever'"'"'s oscillation occurring as the sample (4) is scanned.

6. The method in accordance with claim 1, including the steps of:

feeding back one predetermined percentage of said correction signal to the control mechanism (9) for the tunnel tip (8); and

applying another predetermined percentage of said correction signal to the control mechanism (3) for the sample holder (3) for driving the sample (4) and the tunnel tip (8) in opposite directions for correction of such distance.

7. An atomic force microscope for evaluating the surface of a sample (4), said microscope comprising:

means including first and second tunnel electrodes and associated electronics for measuring the distance between said tunnel electrodes and for generating a correction signal in response to deviations of said distance from a predetermined value;

said first tunnel electrode including a cantilever (7) having at one end thereof a pint (5) adjacent which the sample surface is disposed;

said second tunnel electrode (8) being disposed adjacent and spaced distance from said first tunnel electrode (7);

means (9) for moving said second electrode relative to said first electrode;

means responsive to said correction signal for maintaining the distance between the sample and point constant; and

means for moving the sample relative to said point.

8. A microscope in accordance with claim 7, including:

means (33) for generating a series of successive position signals, each indicative of the then current position of the point (5) relative to the sample (4), and

means (37) responsive to the correction signal and position signals to generate a human readable topographical image of the surface of the sample.

9. A microscope in accordance with claim 7, wherein said point (5) consists of a diamond needle attached to said cantilever (7).

10. A microscope in accordance with claim 7, wherein said cantilever (7) is fixed to apart (6) of a base (1) and a piezoelectric element (13) is arranged between said cantilever (7) and said part (6).

11. A microscope in accordance with claim 7, wherein said sample holder (3) is supported by a base (1, 2) by means of vibration damping means (11,17).

12. A microscope in accordance with claim 11, wherein the sample holder (3) is attached to a supporting member (16) which in turn is fixed to said vibration damping means (17), and means (14) is provided for coarse adjustment of said sample (4) with respect to said point (5) in z-direction, for moving said supporting member (16) against the resistance of said vibration means (17).

13. A microscope in accordance with claim 7, wherein said cantilever (7) has one end rigidly connected to a common base (1), supporting means (16,20) respectively supporting an xyz-drive and sample holder (3) and a z-drive and tunnel tip support (9), and vibration damping means (17, 19) carried by said base interposed between said base and supporting means.

14. A microscope in accordance with claim 7, wherein said cantilever (7) is electrically conductive on its side facing said tunnel tip (8), and an electrical potential difference is maintained between said tunnel tip (8) and the side of the cantilever (7) which it faces.

15. A microscope in accordance with claim 7, wherein said cantilever (7) consists of a gold foil of about 25 micrometer thickness.

16. A method for generating a topographical image of a surface of a sample with a resolution better than 100 nm, comprising the following steps:

moving a point (5) which is fixed to the free end of a spring-like cantilever (7) toward the surface of the sample (4) to be inspected to a distance where the forces occurring between the atoms at the apex of said point (5) and on the sample'"'"'s surface ar larger than 10^-20 N and the resulting force deflects said cantilever (7);

detecting the deflection of said cantilever (7) by means of a detector (8) which is disposed adjacent said free end of said cantilever (7) and provides an output signal indicative of the distance between the cantilever (7) and said sample (4);

using variations in the output signal of the detector (8) to generate a correction signal;

maintaining said distance substantially at a constant value by using said correction signal in a servo-like system; and

moving the sample relative to said point (5).

17. The method in accordance with claim 16, comprising the further steps of:

generating a series of successive position signals (via

     33), each indicative of the then current position of the point (5) relative to the sample (4), and

using changes in the correction signal in conjunction with the position signals to generate (via

     37) a human readable topographical image of the surface of the sample. .Iadd.

18. A method for examining a surface of a sample, comprising the following steps:

providing relative motion in a z direction between a point on a deflectable cantilever of an atomic force microscope and a surface of said sample to be inspected, said point and said surface being brought sufficiently close that the interatomic force between atoms at the apex of said point and at a first area on said sample surface cause a deflection of said cantilever;

detecting and using the deflection of said cantilever to produce a signal indicative of a property of said area of said sample;

producing relative lateral motion between said sample and said point to scan said point with respect to said sample surface; and

detecting and using the deflection of said cantilever when it is scanned across said sample surface to produce further signals indicative of a property of other areas of said sample surface, thereby examining said surface. .Iaddend. .Iadd.

19. The method of claim 18, where said point and said sample surface are sufficiently close that said force is at least 10^-20 N. .Iadd.

20. The method of claim 18, where during lateral scanning of said point relative to the surface of said sample, said force is held substantially constant. .Iaddend. .Iadd.21. The method of claim 18, where during lateral scanning of said point relative to said sample surface the distance between said point and said sample surface is held substantially constant. .Iaddend. .Iadd.22. The method of claim 18 including the further steps of:

sensing variations in said signals produced by deflection of said cantilever to generate correction signals, and

during lateral scanning of said point relative to said sample surface selectively maintaining said force or the distance between said point and said sample surface substantially constant. .Iaddend. .Iadd.23. The method of claim 18, including the further steps of;

generating a series of successive position signals indicative of the lateral positions of said point relative to said sample surface; and

using said position signals and said signals arising from the deflection of said cantilever to produce a topographical image of said sample surface.

21. Iaddend. .Iadd.24. The method of claim 18, wherein said cantilever is

22. oscillated in the z direction. .Iaddend. .Iadd.25. An atomic force microscope for evaluating the surface of sample, comprising:

a spring-like cantilever including a pointed tip;

a sample holder for holding said sample in a position where said surface faces said pointed tip;

first means for producing relative motion in the z direction between said pointed tip and said sample surface to bring said pointed tip and said sample surface sufficiently close that the interatomic force between atoms on said tip and at a first area on said sample surface causes a deflection of said cantilever;

second means for producing relative motion in the lateral directions between said pointed tip and said sample surface to scan said pointed tip across other areas on said sample surface; and

means including detector means for detecting the deflections of said cantilever during said scanning of said areas to produce signals indicative of a property of said sample surface, thereby evaluating said

25. to said sample surface. .Iaddend. .Iadd.29. The microscope of claim 25, where said first means includes means for moving said sample in said z direction. .Iaddend. .Iadd.30. The microscope of claim 25, further including means for oscillating said cantilever in the z direction.

23. surface. .Iaddend. .Iadd.26. The microscope of claim 25, where said pointed tip and said sample surface are sufficiently close to one another

24. that said force is at least 10^-20 N. .Iaddend. .Iadd.27. The microscope of claim 25, including:

correction means for producing correction signals from the outputs of said detector means; and

means responsive to said correction means for selectively maintaining substantially constant during said scanning said force or the distance between said pointed tip and said sample surface. .Iaddend. .Iadd.28. The microscope of claim 25, further including means for generating position signals indicative of the lateral positions of said pointed tip relative

26. Iaddend. .Iadd.31. An atomic force instrument, comprising:

a deflectable member including a pointed tip;

means for bringing closely together said pointed tip and a region of a surface, the distance between said tip and said surface being sufficiently small that interatomic forces exist between atoms on said tip and at a first area on said surface of sufficient magnitude to cause a deflection of said deflectable member;

means responsive to deflection of said deflectable member to detect changes in a control parameter between said tip and surface;

means for producing relative lateral motion between said pointed tip and other areas on said surface; and

means responsive to said control parameter during said lateral motion to provide a series of signals indicative of a property of said surface, thereby evaluating said surface. .Iaddend.