Apparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systems
First Claim
1. Apparatus to project images from reticles onto the photosensitive surface of a single common substrate to produce a large scale integrated image upon said substrate, said apparatus includinga movable stage for holding said substrate, means for stepping said stage in the x- and y-directions, stage calibration means to calibrate the position of said stage in different stepped positions and to determine a stage transfer function incorporating said calibration data,a pair of parallel optical systems for concurrently projecting dual images upon said substrate, said systems having optical axes in the z-direction, each said optical system including a projection imaging system, an illumination system, a reticle carrier to carry said reticles, and a reticle chuck positioned to receive said reticles one at a time from said reticle carrier and to hold each said reticle within said illumination system during projection of an image carried by said reticle, each said reticle chuck being capable of individual adjustment movement in at least the x-, y-, z-, and φ
- -directions,reticle calibration means associated with each said reticle chuck to calibrate the position of a said reticle in said chuck relative to said stage and to determine a reticle transfer function incorporating said calibration data,a computer associated with said stepping means and said optical systems for controlling same, said computer storing said stage transfer function and said reticle transfer functions and utilizing same to adjust said stepping means and said reticle chuck prior to each said image projection,whereby said projected images will be properly aligned relative to one another to produce a unitary, integrated image on said photosensitive surface.
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0 Petitions
Accused Products
Abstract
Apparatus for projecting multiple images from a pair of reticles (117) to a photo-sensitive coated substrate (1) to produce large scale electronic devices (2). A pair of parallel and proximate optical systems (29) are used, the optical systems being positioned to project in the z-direction upon a movable stage (11) subject to controlled motion (159, 169) in the x- and y-directions. The apparatus includes means (225) for determining the coordinates of motion of the stage relative to images projected from the reticles, means for using the determined positions to establish a stage transfer function for the apparatus relative to various positions of stage, and means (130) for applying the transfer function to adjust the relative positions of the reticles (117) and substrate (1) for accurate image projection, and for thereafter projecting an image upon the substrate. The stage is then stepped to a position to permit projection of an abutting image, and the transfer function is used to adjust the relative positions of the reticles (117) and substrate (1) for accurate image projection for projecting the abutting image upon the substrate (1). The steps are repeated until sufficient images have been projected upon the substrate to make up one integrated layer of a flat panel display or other large scale electronic device. After treating the photosensitive layer, subsequent layers are produced in a similar manner.
167 Citations
67 Claims
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1. Apparatus to project images from reticles onto the photosensitive surface of a single common substrate to produce a large scale integrated image upon said substrate, said apparatus including
a movable stage for holding said substrate, means for stepping said stage in the x- and y-directions, stage calibration means to calibrate the position of said stage in different stepped positions and to determine a stage transfer function incorporating said calibration data, a pair of parallel optical systems for concurrently projecting dual images upon said substrate, said systems having optical axes in the z-direction, each said optical system including a projection imaging system, an illumination system, a reticle carrier to carry said reticles, and a reticle chuck positioned to receive said reticles one at a time from said reticle carrier and to hold each said reticle within said illumination system during projection of an image carried by said reticle, each said reticle chuck being capable of individual adjustment movement in at least the x-, y-, z-, and φ - -directions,
reticle calibration means associated with each said reticle chuck to calibrate the position of a said reticle in said chuck relative to said stage and to determine a reticle transfer function incorporating said calibration data, a computer associated with said stepping means and said optical systems for controlling same, said computer storing said stage transfer function and said reticle transfer functions and utilizing same to adjust said stepping means and said reticle chuck prior to each said image projection, whereby said projected images will be properly aligned relative to one another to produce a unitary, integrated image on said photosensitive surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. Apparatus to project images from reticles onto the photosensitive surface of a single common substrate to produce a large scale integrated image upon said substrate, said apparatus including
a movable stage for holding said substrate, means for stepping said stage in orthogonal directions in the plane of said substrate, a pair of parallel optical systems mounted proximate to said substrate for concurrently projecting dual images upon said glass substrate, said systems having optical axes perpendicular to said substrate, each said optical system including a reticle carrier to carry said reticles and a reticle chuck positioned to receive said reticles one at a time from said reticle carrier and to hold each said reticle during projection of an image carried by said reticle, each said reticle chuck being capable of individual adjustment movement in six degrees of freedom, a computer associated with said stepping means and said optical systems for controlling same, said computer storing data pertaining to the relative positions of said stage and each said reticle and utilizing same to adjust said stepping means and said reticle chuck prior to each said image projection, whereby said projected images will be properly aligned relative to one another to produce a unitary, integrated image on said photosensitive surface.
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18. Apparatus to produce large scale integrated images on the photosensitive surface of a substrate, said apparatus including
a movable stage, means for stepping said stage in the x-and y-directions, a pair of parallel and proximate optical systems having axes in the z-direction and positioned above said stage for projection of images thereupon, said optical systems including a reticle chuck operatively associated with each said optical system, for carrying reticles bearing alignment marks to be projected upon said stage, sensing means for comparing the position of said projected alignment marks on said stage as said stage is stepped throughout its movement range beneath said optical systems and for determining and recording the extent of variation of said stage from its theoretically true x-, y-, and φ - -positions throughout said range,
and means for varying the stepping of said stage from theoretical stepping distances to compensate for said variation in each position of said stage within said range, whereby images formed upon said photosensitive surface will accurately abut with one another. - View Dependent Claims (19, 20, 21, 22, 23)
- -positions throughout said range,
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24. Apparatus for making large area electronic devices utilizing horizontal alignment of images from two optical systems, said apparatus including
a movable stage adapted for motion in x- and y-directions, a pair of parallel and proximate optical systems having axes in the z-direction and positioned to receive reticles in their object planes and to project images from said reticles upon said stage, a reticle carrier associated with each said optical system and a reticle alignment chuck associated with each said reticle carrier and adapted to receive a reticle from its respective said carrier and to hold said reticle in the object plane of its respective said optical system, and alignment means associated with said optical systems including (i) control means associated with each said reticle chuck for adjusting same in any of six degrees of freedom, (ii) means for varying the distance between said optical axes, and (iii) means for varying the magnification of said optical systems, whereby images projected by each said optical systems may be butted with one another and with images from the other of said system to produce large scale images suitable for said displays.
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28. Apparatus for forming abutting images upon the photosensitive surface of a substrate, said images serving to form a display, said apparatus including
a movable stage for holding said substrate, said stage including preliminary alignment means for said substrate, a pair of reticle chucks adapted to receive and hold reticles for projection upon said substrate, a light source and an optical system associated with each said chuck positioned to simultaneously project an image from each of said reticles held by said chucks upon different portions of said substrate, said optical systems having parallel optical axes, and means for adjusting the relative positions of said chucks and said optical systems so that multiples of said images are abutting and in alignment upon said substrate, whereby said images form a continuum with one another upon said substrate.
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37. Apparatus for producing large area electronic devices and having rapid throughput, said apparatus including
a frame, a stage carried by said frame for motion in x- and y-directions, said stage being adapted to hold a substrate, a pair of parallel and proximate optical systems having lenses with their axe in the z-direction and positioned to project images upon said substrate held by said stage, sensors associated with said stage for determining the x-, y-, and φ - -positions of said stage relative to said optical systems,
a pair of reticle alignment chucks mounted on said frame, each said chuck being operatively associated with one of said optical systems, said reticle chucks being capable of adjustment in six degrees of freedom, a stage alignment function providing coordinates of motion of said stage relative to each said reticle chuck, stepping means for said stage, and control means to adjust the position of said reticle chucks in accordance with said stage alignment function, whereby multiple abutting images can be projected through said optical systems to create a uniform, integral image upon said substrate. - View Dependent Claims (38, 39)
- -positions of said stage relative to said optical systems,
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40. In an apparatus adapted to project simultaneous images, from reticles carried by a pair of parallel optical columns, upon a common substrate, to produce a single unified image, said columns being mounted with axes perpendicular to a stage carrying a substrate, said stage being adapted for stepping motion in x- and y- directions orthogonal to the axes of said columns, that improvement including
an asymmetric projecting lens in each said optical column for projecting said images, each said lens having magnification adjustment capability on its reticle side and focus adjustment capability on its substrate side, and separate means for each said lens for adjusting the axial spacing between said lenses and said substrate and separate means for each said lens for adjusting the spacing between said lenses and said reticles, whereby the focus and magnification of each said lens can be independently adjusted for better alignment of said projected images.
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44. In an apparatus adapted to project simultaneous images upon a common substrate, from reticles carried by a pair of optical columns having illuminators and lenses therein, to produce a unified image, said lenses being mounted with their axes parallel and perpendicular to a stage carrying said substrate, said stage being orthogonal to the axes of said lenses, that improvement including a folding mirror within said optical columns between said lenses and said condensers to redirect the light from said illuminator to said lenses, whereby said lenses may be positioned proximate to one another.
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45. In an apparatus adapted to project simultaneous images, from reticles carried by a pair of parallel optical columns, upon a common substrate, to produce a single unified image, said columns being mounted with axes perpendicular to a stage carrying a substrate, said stage being adapted for stepping motion in orthogonal directions perpendicular to the axes of said columns, that improvement including
an asymmetric projecting lens in each said optical column for projecting said images, each said lens having magnification adjustment capability on its reticle side and focus adjustment capability on its substrate side, a reticle chuck in each said optical column positioned to hold a reticle during projection of a said image, each said reticle chuck being independently adjustable in six degrees of freedom to permit positioning of said reticle for control of magnification, rotation, size and shape, and control means to control the adjustment of each said reticle, whereby images from each said optical column can be adjusted independently to permit proper alignment for the creation of a single integral image on said substrate formed from multiple simultaneous images projected from said two columns.
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49. The method of making displays on a photo-sensitive coated substrate carried by a movable stage, and using a pair of parallel optical columns with axes perpendicular to said stage, including the steps of
positioning said substrate on said stage, simultaneously projecting a pair of aligned images, one from each of said optical systems upon said stage, stepping said stage a predetermined distance in a given direction and thereafter again projecting said images upon said substrate, each of said new images being in abutting and aligned relationship with one of said previously projected images, and repeating said stepping and projecting steps until said substrate carries an integral image layer formed of a plurality of said abutting images, whereby one layer of an integral display has been projected upon said photosensitive substrate.
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56. The method of correcting for variations in translatory movement of a movable stage used in apparatus for making displays, said apparatus including a pair of parallel and proximate optical columns to project images upon a substrate carried by said stage, said method including
determining the actual positions of said stage as it is moved throughout its range of movement, determining the apparent position of said stage as determined by projecting images from said optical columns to sensors on said stage, comparing the differences between said actual and apparent positions and recording them as a transfer function, and varying the position of said stage relative to said optical columns in accordance with said transfer function, whereby images projected by said optical columns upon said substrate will accurately abut.
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57. The method of aligning multiple images being projected from a reticle to a photo-sensitive coated substrate using a pair of parallel and proximate optical systems, said systems being positioned to project in the z-direction upon a movable stage subject to controlled motion in the x-, y-, and φ
- directions, said method including the steps of
determining the coordinates of motion of said stage relative to images projected from said reticles, determining the reticle coordinates of each said reticle by projection of images upon sensors positioned in known locations in said stage, using said determined coordinates of said stage and said determined reticle coordinates to determine a first transfer function for said system relative to positions of said stage, positioning a said substrate in said stage and applying said first transfer function to adjust the relative positions of said reticles and said substrate for accurate image projection, and thereafter projecting an image upon said substrate, stepping said stage to a position to permit projection of an abutting image, and again applying said first transfer function to adjust the relative positions of said reticles and said substrate for accurate image projection, and thereafter projecting an image upon said substrate, and repeating the steps of stepping said stage, applying said first transfer function, and projecting said image until sufficient images have been projected upon said substrate to make up an integrated level of a display. - View Dependent Claims (58)
- directions, said method including the steps of
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59. A flat panel display containing a multiplicity of repetitive stitched images and a plurality of layers, said display including
a substrate, a plurality of aligned, etched layers formed using photoresist material upon said substrate, each of said layers having been formed by simultaneous projection of images upon said photoresist material from a reticle carried in each of at least a pair of optical columns, said images each covering a small portion of said substrate but having been repeatedly stepped and reprojected from each said optical column over said substrate so as to form a continuum of interfitting images to form a total, unitary image on said photoresist of said layer, said images from each of said optical columns having been separately adjusted before each stepping and projection to match and abut one another in respect to size, shape, rotation, and magnification, whereby said flat panel display is formed of a plurality of unitary, integral layer of circuitry.
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61. Apparatus to project images from reticles onto the photosensitive surface of a substrate to produce a large scale integrated image upon said substrate, said apparatus including
a movable stage for holding said substrate, means for stepping said stage in the x- and y-directions, stage calibration means to calibrate the position of said stage in different stepped positions and to determine a stage transfer function incorporating said calibration data, an optical system for projecting an image upon said substrate, said system having its optical axis in the z-direction, said optical system including a projection imaging system, an illumination system, a reticle carrier to carry said reticles, and a reticle chuck positioned to receive said reticles one at a time from said reticle carrier and to hold each said reticle within said illumination system during projection of an image carried by said reticle, said reticle chuck being capable of individual adjustment movement in at least the x-, y-, z-, and Φ - -directions,
reticle calibration means associated with said reticle chuck to calibrate the position of a said reticle in said chuck relative to said stage and to determine a reticle transfer function incorporating said calibration data, a computer associated with said stepping means and said optical system for controlling same, said computer storing said stage transfer function and said reticle transfer function and utilizing same to adjust said stepping means and said reticle chuck prior to each said image projection, whereby said projected images will be properly aligned to produce a unitary, integrated image on said photosensitive surface. .Iaddend. .Iadd.62. Apparatus to project images from reticles as set forth in claim 61 in which said stage transfer function is an algorithm incorporating the variations of motion of said stage from theoretically true positions. - View Dependent Claims (62)
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64. light. .Iaddend. .Iadd.68. Apparatus to produce a large scale integrated image on the photosensitive surface of a substrate, said apparatus including
a movable stage, means for stepping said stage in the x- and y-directions, an optical system having its axis in the z-direction and positioned above said stage for projection of images thereupon, said optical system including a reticle chuck operatively associated with said optical system for carrying reticles bearing alignment marks to be projected upon said stage, sensing means for comparing the position of said projected alignment marks on said stage as said stage is stepped throughout its movement range beneath said optical system and for determining and recording the extent of variation of said stage from its theoretically true x-, y-, and Φ - -positions throughout said range,
and means for varying the stepping of said stage from theoretical stepping distances to compensate for said variation in each position of said stage within said range, whereby images formed upon said photosensitive surface will accurately abut with one another. .Iaddend. .Iadd.69. Apparatus to produce a large scale integrated image as set forth in claim 68 in which said sensing means includes a plurality of sensors mounted in said stage. .Iaddend. .Iadd.70. Apparatus to produce large scale integrated images as set forth in claim 68 in which at least one of said sensing means is adapted to move between a position corresponding to the upper surface of said substrate and a
- -positions throughout said range,
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65. retracted position. .Iaddend. .Iadd.71. Apparatus to produce a large scale integrated image as set forth in claim 68 including
control means for said reticle chuck, said control means being adapted to vary the position of said chuck to adjust the position of said image to compensate for said variation in the said positions of said stage. .Iaddend. .Iadd.72. Apparatus for producing large area electronic devices and having rapid throughput, said apparatus including a frame, a stage carried by said frame for motion in x- and y-directions, said stage being adapted to hold a substrate, an optical system having a lens with its axis in the z-direction and positioned to project images upon said substrate held by said stage, sensors associated with said stage for determining the x-, y-, and Φ - -positions of said stage relative to said optical systems,
a reticle alignment chuck mounted on said frame, said chuck being operatively associated with said optical system, said reticle chuck being capable of adjustment in at least four degrees of freedom, a stage alignment function providing coordinates of motion of said stage relative to said reticle chuck, stepping means for said stage, and control means to adjust the position of said reticle chuck in accordanace with said stage alignment function, whereby abutting images can be projected through said optical system to - View Dependent Claims (63)
- -positions of said stage relative to said optical systems,
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66. create a uniform, integral image upon said substrate. .Iaddend. .Iadd.73. The method of correcting for variations in translatory movement of a movable stage used in apparatus for making displays, said apparatus including an optical column to project images upon a substrate carried by said stage, said method including
determining the actual positions of said stage as it is moved throughout its range of movement, determining the apparent position of said stage as determined by projecting an image from said optical column to sensors on said stage, comparing the differences between said actual and apparent positions and recording them as a transfer function, and varying the position of said stage relative to said optical column in accordance with said transfer function, whereby images projected by said optical column upon said substrate will accurately abut. .Iaddend. .Iadd.74. The method of making displays as set forth in claim 73 including the step of panel scaling, aligning said stage to receive a second image, and thereafter simultaneously projecting said second image on said substrate, stepping and repeating it as before, to create a second integral image
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67. layer on said substrate. .Iaddend. .Iadd.75. The method of aligning multiple images being projected from reticles to a photo-sensitive coated substrate using an optical system, said system being positioned to project in the z-direction upon a movable stage subject to controlled motion in the x-, y-, and Φ
- directions, said method including the steps of
determining the coordinates of motion of said stage relative to images projected from said reticles, positioning a said substrate in said stage and thereafter projecting multiple abutting images upon said substrate, determining reticle coordinates for a second said reticle for said optical system, developing said photo-sensitive coated substrate and recoating said substrate, positioning said recoated substrate in said stage and determining the difference in alignment of said substrate on said stage relative to the initial alignment of said substrate to said stage to provide an alignment transfer function, using said determined stage coordinates, said determined second reticle coordinates, and said alignment transfer function to create a transfer function for said system relative to positions of said stage, applying said last-named transfer function to adjust the relative positions of said second reticle and said substrate for accurate image projection, and thereafter projecting an image upon said substrate, stepping said stage to a position to permit projection of an abutting image on said substrate, and again applying said transfer function to adjust the relative positions of said reticles and said substrate for accurate image projection, and thereafter projecting an image upon said substrate, and repeating the steps of stepping said stage, applying said second transfer function, and projecting said image until sufficient images have been projected upon said substrate to make up a second level of a display. .Iaddend.
- directions, said method including the steps of
Specification