Wafer scrubbing device

• US RE36,767 E
• Filed: 02/23/1999
• Issued: 07/11/2000
• Est. Priority Date: 06/14/1996
• Status: Expired due to Term

• Current Assignee: Solid State Equipment, LLC (Veeco Instruments Incorporated)
• Original Assignee: Solid State Equipment Corporation
• Inventors: Itzkowitz, Herman
• Primary Examiner(s): Spisich, Mark
• Application Number:
  US09/257,556
• Time in Patent Office: 504 Days
• Field of Search: 15/21.1, 15/77, 15/88.2, 15/88.3, 15/88.4, 15/97.1, 15/102
• US Class Current: 15/77
• CPC Class Codes: B08B 1/04 using rotary operative members B08B1/02 takes precedence
• CPC Class Codes: G11B 23/505 of disk carriers
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like

Abstract

A wafer scrubbing device for cleaning the surfaces of a thin disk disposed on a stationary spin chuck employs a double brush arrangement whereby brush rotation induces rotation of the disk to be cleaned and whereby the speed differential between the constant rotational speed of the brushes and the .[.variable.]. rotational speed of the disk due to the relative position of the brushes on the disk causes the scrubbing of both surfaces and the edge of the disk.

Claims

1. A scrubbing device for cleaning a thin disk, comprising:

a disk holder;

a brush mechanism including a pair of brushes, means for rotating each of the brushes at a constant speed in opposite directions, means for clamping together and unclamping the brushes with the disk positioned therebetween, and means for extending the brushes back and forth radially across surfaces of the disk, rotation of the brushes inducing variable rotation of the disk, the radial movement of the brushes creating a speed differential between the constant rotational speed of the brushes and the variable rotational speed of the disk due to the relative position of the brushes on the disk, the differential causing frictional scrubbing of the surfaces and edge of the disk.

2. A scrubbing device as in claim 1, wherein the brushes are replaceable.

3. A scrubbing device as in claim 1, wherein the disk holder is a spin chuck.

4. A scrubbing device as in claim 3, wherein the spin chuck includes an interchangeable spin plate.

5. A scrubbing device as in claim 3, wherein the spin chuck includes vacuum/pressure pads adapted to both emit a flow of compressed air to create a cushion of air on which the disk can float and to hold the disk down in stationary position by vacuum suction.

6. A scrubbing device as in claim 1, wherein the rotating means comprises a stepper motor for driving rotatable shafts upon which the brushes are mounted.

7. A scrubbing device as in claim 1, wherein the rotating means comprises a servo motor for driving rotatable shafts upon which the brushes are mounted.

8. A scrubbing device as in claim 1, wherein the clamping means comprises a clamp cylinder.

9. A scrubbing device as in claim 1, wherein the extending means comprises a motor.

10. A scrubbing device as in claim 1, further comprising spray nozzles for directing a stream of fluid at the surfaces of the disk.

11. A scrubbing device as in claim 1, further comprising a controller for controlling the operation of the disk holder, the rotating means, the clamping means, and the extending means.

12. A scrubbing device for cleaning a thin disk, comprising:

a disk holder;

plural brush mechanisms, each of the brush mechanisms including a pair of brushes, means for rotating each of the brushes at a constant speed in opposite directions, means for clamping together and unclamping the brushes with the disk positioned therebetween, and means for extending the brushes back and forth radially across surfaces of the disk, rotation of the brushes inducing variable rotation of the disk, the radial movement of the brushes creating a speed differential between the constant rotational speed of the brushes and the variable rotational speed of the disk due to the relative position of the brushes on the disk, the differential causing frictional scrubbing of the surfaces and edge of the disk.

13. A scrubbing device as in claim 12, wherein the brushes are replaceable.

14. A scrubbing device as in claim 12, wherein the disk holder is a spin chuck.

15. A scrubbing device as in claim 14, wherein the spin chuck includes an interchangeable spin plate.

16. A scrubbing device as in claim 14, wherein the spin chuck includes vacuum/pressure pads adapted to both emit a flow of compressed air to create a cushion of air on which the disk can float and to hold the disk down in stationary position by vacuum suction.

17. A scrubbing device as in claim 12, wherein the rotating means comprises a motor for driving rotatable shafts upon which the brushes are mounted.

18. A scrubbing device as in claim 12, wherein the clamping means comprises a clamp cylinder.

19. A scrubbing device as in claim 12, wherein the extending means comprises a motor.

20. A scrubbing device as in claim 12, further comprising a controller for controlling the operation of the disk holder, the rotating means, the clamping means, and the extending means. .Iadd.21. A scrubbing device for cleaning a thin disk, comprising:

a spin chuck, wherein the spin chuck includes a vacuum/pressure pads adapted to both emit a flow of compressed air to create a cushion of air on which the disk can float and to hold the disk down in stationary position by vacuum suction; and

a brush mechanism including a pair of brushes positioned to contact surfaces of a disk and means for rotating each of the brushes in opposite directions, rotation of the brushes inducing rotation of the disk, the position of the brushes creating a speed differential between the rotational speed of the brushes and the rotational speed of the disk due to the relative position of the brushes on the disk, the differential causing frictional scrubbing of the surfaces and edge of the disk. .Iaddend..Iadd.22. A scrubbing device as in claim 21, wherein the brushes

21. are replaceable. .Iaddend..Iadd.23. A scrubbing device as in claim 21, wherein the spin chuck includes an interchangeable spin plate. .Iaddend..Iadd.24. A scrubbing device as in claim 21, wherein the rotating means comprises a stepper motor for driving rotatable shafts upon which

22. the brushes are mounted. .Iaddend..Iadd.25. A scrubbing device as in claim 21, wherein the rotating means comprises a servo motor for driving rotatable shafts upon which the brushes are mounted. .Iaddend..Iadd.26. A scrubbing device as in claim 21, further comprising spray nozzles for directing a stream of fluid at the surfaces of the disk. .Iaddend..Iadd.27. A scrubbing device as in claim 21, wherein the brushing mechanism further comprises means for positioning the brushes on the disk, the scrubbing device further comprises a controller for controlling the operation of the spin chuck, the rotating means, and the positioning

23. means. .Iaddend..Iadd.28. A scrubbing device for cleaning a thin disk, comprising:

a spin chuck, wherein the spin chuck includes vacuum/pressure pads adapted to both emit a flow of compressed air to create a cushion of air on which the disk can float and to hold the disk down in stationary position by vacuum suction; and

plural brush mechanisms, each of the brush mechanisms including a pair of brushes positioned to contact surfaces of the disk, and means for rotating each of the brushes in opposite directions, rotation of the brushes inducing rotation of the disk, the position of the brushes creating a speed differential between the rotational speed of the brushes and the rotational speed of the disk due to the relative position of the brushes on the disk, the differential causing frictional scrubbing of the surfaces and edge of the disk. .Iaddend..Iadd.29. A scrubbing device as in claim

24. 28, wherein the brushes are replaceable. .Iaddend..Iadd.30. A scrubbing device as in claim 28, wherein the spin chuck includes an interchangeable

25. spin plate. .Iaddend..Iadd.31. A scrubbing device as in claim 28, wherein the rotating means comprises a motor for driving rotatable shafts upon

26. which the brushes are mounted. .Iaddend..Iadd.32. A scrubbing device as in claim 28, wherein each brushing mechanism further comprises means for positioning the brushes on the disk, the scrubbing device further comprising a controller for controlling the operation of the spin chuck, the rotating means, and the positioning means. .Iaddend.