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Positioning device having two object holders

  • US RE40,043 E1
  • Filed: 02/27/1998
  • Issued: 02/05/2008
  • Est. Priority Date: 03/10/1997
  • Status: Expired due to Term
First Claim
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1. A positioning device for a lithographic apparatus, comprising:

  • a guiding surface extending parallel to an X-direction and parallel to a Y-direction;

    a first object holder and a second object holder which are each adapted to be guided over the guiding surface and are each displaceable parallel to the X-direction and parallel to the Y-direction from a first position into a second position; and

    a displacement system constructed and arranged to displace the first object holder and the second object holder over the guiding surface, wherein the displacement system comprises a first displacement unit and a second displacement unit to which the first object holder, and the second object holder can be coupled alternately, the first displacement unit being suitable for displacing the object holders from the first position into an intermediate position between the first position and the second position, and the second displacement unit being suitable for displacing the object holders from the intermediate position into the second position.

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