Method and apparatus using a closed loop controlled actuator for surface profilometry
First Claim
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1. An apparatus for profiling the surface of a workpiece, the apparatus comprising:
- a probe adapted to make contact with the surface of a workpiece;
at least one sensor that determines the current interaction force between the probe and the surface of the workpiece;
an actuator that adjusts the future position of the probe along an axis that is generally perpendicular to the surface of the workpiece in order to maintain the future interaction force between the probe and the surface of the workpiece generally constant; and
a closed feedback loop that controls the actuator to adjust the future position of the probe along the generally perpendicular axis at least partially on the basis of the current interaction force between the probe and the surface of the workpiece.
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Abstract
An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.
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Citations
40 Claims
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1. An apparatus for profiling the surface of a workpiece, the apparatus comprising:
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a probe adapted to make contact with the surface of a workpiece;
at least one sensor that determines the current interaction force between the probe and the surface of the workpiece;
an actuator that adjusts the future position of the probe along an axis that is generally perpendicular to the surface of the workpiece in order to maintain the future interaction force between the probe and the surface of the workpiece generally constant; and
a closed feedback loop that controls the actuator to adjust the future position of the probe along the generally perpendicular axis at least partially on the basis of the current interaction force between the probe and the surface of the workpiece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of gathering data related to the surface of a workpiece, comprising:
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placing a probe in contact with the surface of a workpiece;
determining, via at least one sensor, the current interaction force between the probe and the surface of the workpiece; and
at least partially on the basis of the current position of the probe, adjusting, via an actuator, the future position of the probe along an axis that is generally perpendicular to the surface of the workpiece in order to maintain the future interaction force between the probe and the surface of the workpiece generally constant. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. An apparatus for profiling the surface of a workpiece, the apparatus comprising:
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a probe adapted to interact with the surface of a workpiece;
at least one sensor that determines the current interaction between the probe and the surface of the workpiece;
an actuator that adjusts the future position of the probe along an axis that is generally perpendicular to the surface of the workpiece in order to maintain the future interaction between the probe and the surface of the workpiece generally constant; and
a closed feedback loop that controls the actuator to adjust the future position of the probe along the generally perpendicular axis at least partially on the basis of the current interaction between the probe and the surface of the workpiece. - View Dependent Claims (32, 33, 34, 35)
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36. A method of gathering data related to the surface of a workpiece, comprising:
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placing a probe such that it interacts with the surface of a workpiece;
determining, via at least one sensor, the current interaction between the probe and the surface of the workpiece; and
at least partially on the basis of the current position of the probe, adjusting, via an actuator, the future position of the probe along an axis that is generally perpendicular to the surface of the workpiece in order to maintain the future interaction between the probe and the surface of the workpiece generally constant. - View Dependent Claims (37, 38, 39, 40)
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Specification