Resonant beam scanner with raster pinch compensation
First Claim
1. A resonant beam scanning system, comprising:
- A beam generator operable to produce an electromagnetic beam, a first mechanically resonant beam director operable to scan the electromagnetic beam sinusoidally across a first axis at a first resonant frequency, a second beam director operable to simultaneously scan the electromagnetic beam in a second axis at a second frequency, a third mechanically resonant beam director operable to simultaneously scan the electromagnetic beam in the second axis, and control electronics circuit coupled to the three beam directors, the control electronics circuit operable to provide a signal to the third beam director comprised of a primary frequency and at least one higher order harmonic frequency.
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Abstract
A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.
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Citations
18 Claims
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1. A resonant beam scanning system, comprising:
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A beam generator operable to produce an electromagnetic beam, a first mechanically resonant beam director operable to scan the electromagnetic beam sinusoidally across a first axis at a first resonant frequency, a second beam director operable to simultaneously scan the electromagnetic beam in a second axis at a second frequency, a third mechanically resonant beam director operable to simultaneously scan the electromagnetic beam in the second axis, and control electronics circuit coupled to the three beam directors, the control electronics circuit operable to provide a signal to the third beam director comprised of a primary frequency and at least one higher order harmonic frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of driving a MEMS scanning system, comprising the steps of:
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generating first and second respective periodic signals for driving first and second scanners;
generating a third periodic signal comprising a primary frequency and at least one odd harmonic for driving a scanner; and
transmitting the first, second and third respective signals to a MEMS scanning system. - View Dependent Claims (15, 16, 17, 18)
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Specification