Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
First Claim
1. A method for forming a light-transmissive composite film comprising:
- (a) providing a flexible plastic substrate;
(b) depositing a multi-layered conductive metallic film having a visible-region light transmittance of at least 80% continuously on the flexible plastic substrate by a thin-film deposition technique; and
(c) collecting the composite film in continuous rolls, wherein the composite film is light-transmissive in the visible region .
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Abstract
Methods for roll-to-roll deposition of optically transparent and high conductivity metallic thin films are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film; and (3) collecting the composite film in continuous rolls. Typically, the thin conductive metallic film is an InCeO—Ag—InCeO film. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising InCeO—Ag—InCeO film formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 90% throughout the visible region; an electrical resistance of no greater than about 10 Ω/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the InCeO/Ag/InCeO metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
82 Citations
156 Claims
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1. A method for forming a light-transmissive composite film comprising:
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(a) providing a flexible plastic substrate;
(b) depositing a multi-layered conductive metallic film having a visible-region light transmittance of at least 80% continuously on the flexible plastic substrate by a thin-film deposition technique; and
(c) collecting the composite film in continuous rolls, wherein the composite film is light-transmissive in the visible region . - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 132, 133)
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134. A composite film, comprising:
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a flexible plastic substrate; and
an indium-cerium-oxide/silver/indium-cerium-oxide metallic film on the flexible plastic substrate;
wherein the composite film has a visible-region light transmittance of at least 80%. - View Dependent Claims (123, 124, 125, 126, 127, 128, 129, 130, 131, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 154, 155, 156)
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146. A display system, comprising:
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one or more composite films, at least one of the one or more composite films including a flexible plastic substrate and an indium-cerium-oxide/silver/indium-cerium-oxide metallic film on the flexible plastic substrate and having a visible-region light transmittance of at least 80%; and
a light emitting material on at least one of the one or more composite films. - View Dependent Claims (147, 148, 149, 150, 151, 152, 153)
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Specification