Single bar type vibrating element angular rate sensor system

• US RE42,916 E1
• Filed: 01/06/2005
• Issued: 11/15/2011
• Est. Priority Date: 04/27/1993
• Status: Expired due to Term

• Current Assignee: Watson Industries, Inc.
• Original Assignee: Watson Industries, Inc.
• Inventors: Watson, William S.
• Primary Examiner(s): Dougherty; Thomas M
• Application Number:
  US11/030,713
• Time in Patent Office: 2,504 Days
• Field of Search: 310/316.01, 310/318, 310/329, 310/332, 310/351, 310/352, 310/353, 310/366, 735/041.4
• US Class Current: 310/316.01
• CPC Class Codes: G01C 19/5642 using vibrating bars or beams
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/01039 Yttrium [Y]

Abstract

An angular rate sensor system [10] comprising a vibratory sensing element [12] and signal processing circuit [14]. The element [12] is preferably a polymorphic rectangular bar fabricated from two layers of piezoceramic material [26, 28] divided by a thin center electrode [E_c], and a plurality of electrodes [E₁-E₄] scored onto the planar conductive surfaces [30, 32]. The element [12] is suspended at its acoustic nodes [N, N′] to vibrate in one direction [V] normal to the physical plane of the electrodes [E_c, E₁-E₄] using any suitable mounting structure such as parallel crossed filaments [34] or inwardly angled support arms [64] that provide predetermined degrees of lateral [S′] and longitudinal [S] stiffness. The circuit [14] may optionally constitute totally shared [FIG. 7], partially shared [FIG. 8], or totally isolated [FIG. 9] driving and sensing functions, the corresponding element [12] being configured with dual-pair, single-pair, or single-triple outer electrodes [E₁-E₄], respectively. The circuit [14] typically utilizes an automatic gain control and two operational amplifiers, and may include various signal conditioning components and a separate tuning module.

Claims

1. An angular rate sensor system which may be used with a signal processing circuit to discriminate an angular rate, the angular rate sensor system comprising:

a mounting structure; and

a vibratory sensing element including a substantially planar base electrode presenting a pair of opposing sides, at least two layers of piezoelectric material each disposed on and substantially covering the opposing sides of the base electrode, a first outer electrode disposed on a first side of the vibratory sensing element, and a second outer electrode disposed on a second side of the vibratory sensing element opposing the first side, the first outer electrode and the second outer electrode being oriented generally parallel with a plane, the vibratory sensing element defining a pair of natural acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended from the mounting structure proximate to each of the pair of natural acoustic nodes so as to vibrate in the direction of vibration, said angular rate sensor system further comprising a third outer electrode, the third outer electrode being disposed on the first side of the vibratory sensing element and oriented generally parallel with the plane, and a fourth outer electrode, the fourth outer electrode being disposed on the second side of the vibratory sensing element and oriented generally parallel with the plane,

wherebywherein the vibratory sensing element vibrates in the direction of vibration oriented generally perpendicular to the plane when either the first electrode or the second electrode are excited by a drive signal, and further wherebywherein the first electrode or the second electrode produce sensing signals responsive and proportional to the angular rate of the vibratory sensing element, the signal processing circuit discriminating the angular rate from the sensing signals.

2. The angular rate sensor system of claim 1 wherein the vibratory sensing element is generally rectangular and has a length, a width, and a thickness, the length being generally greater than the width, and the width being generally greater than the thickness.

3. The angular rate sensor system of claim 2 wherein the length is approximately six times the width, and wherein the width is approximately three times the thickness.

4. The angular rate sensor system of claim 1 wherein the vibratory sensing element further defines a plurality of edgewise faces disposed around a perimeter surface of the vibratory sensing element and generally parallel with the direction of vibration, each of the plurality of edgewise faces of the perimeter surface having no further electrodes disposed thereon oriented perpendicular to the plane.

5. The angular rate sensor system of claim 1 wherein the vibratory sensing element further defines a plurality of edgewise faces disposed around a perimeter surface of the vibratory sensing element and generally parallel with the direction of vibration, and wherein the base electrode extends outwardly toward and adjacent to each of the plurality of edgewise faces of the perimeter surface.

6. The angular rate sensor system of claim 1 wherein the signal processing circuit includes a first operational amplifier and a second operational amplifier, each of the first operational amplifier and the second operational amplifier having an inverting input, a non-inverting input, and an output, and wherein each of the first outer electrode, the second outer electrode, the third outer electrode, and the fourth outer electrode are electrically connected to the inverting input of the first operational amplifier, and wherein the first outer electrode and the fourth outer electrode are electrically connected to the inverting input of the second operational amplifier, and the second outer electrode and the third outer electrode are electrically connected to the non-inverting input of the second operational amplifier.

7. The angular rate sensor system of claim 6 wherein the first outer electrode is generally parallel with and confronts the second outer electrode across the vibrating sensing element, and wherein the fourth outer electrode is generally parallel with and confronts the third outer electrode across the vibrating sensing element.

8. The angular rate sensor system of claim 6 wherein the output of the first operational amplifier is electrically connected to the base electrode.

9. The angular rate sensor system of claim 6 wherein the signal processing circuit further includes an automatic gain control having an input and an output, and wherein the output of the first operational amplifier is electrically connected to the input of the automatic gain control and the output from the automatic gain control is electrically connected to the base electrode.

10. The angular rate sensor system of claim 9 wherein the output of the automatic gain control is electrically connected to the non-inverting input of the first operational amplifier.

11. The angular rate sensor system of claim 9 wherein each of the first outer electrode, the second outer electrode, the third outer electrode, and the fourth outer electrode are electrically connected to a ground connection.

12. The angular rate sensor system of claim 9 wherein the non-inverting input of the first operational amplifier and the non-inverting input of the second operational amplifier are each electrically connected to a ground connection.

13. The angular rate sensor of claim 6 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the first operational amplifier and the inverting input of the first operational amplifier.

14. The angular rate sensor of claim 6 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the second operational amplifier and the inverting input of the second operational amplifier.

15. The angular rate sensor system of claim 14 wherein the negative feedback loop is of the capacitance type.

16. The angular rate sensor of claim 6 wherein the signal processing circuit includes a first contact disposed between and electrically connected to the inverting input of the second operational amplifier and the fourth outer electrode, a second contact disposed between and electrically connected to the non-inverting input of the second operational amplifier and the third outer electrode, a third contact electrically connected to the output of the first operational amplifier, and fourth contact electrically connected to the base electrode, the signal processing circuit further comprising:

a tuning module including a first potentiometer having a wiper contact and a pair of fixed contacts, a second potentiometer having a wiper contact and a pair of fixed contacts, and a third potentiometer having a wiper contact and a pair of fixed contacts, the wiper contact of the first potentiometer being electrically connected to the third contact and to the wiper contact of the second potentiometer, each one of the pair of fixed contacts of the first potentiometer being electrically connected to a one of the pair of fixed contacts of the second potentiometer to a one of the pair of fixed contacts of the third potentiometer, the wiper contact of the third potentiometer being electrically connected to the fourth contact, a first one of each of the pair of fixed contacts of the first potentiometer and the second potentiometer and the third potentiometer being electrically connected to the first contact, and a second one of each of the pair of fixed contacts of the first potentiometer and the second potentiometer and the third potentiometer being electrically connected to the second contact.

17. The angular rate sensor system of claim 1 wherein the signal processing circuit includes a first operational amplifier and a second operational amplifier, each of the first operational amplifier and the second operational amplifier having an inverting input, a non-inverting input, and an output, and wherein each of the first outer electrode, the second outer electrode, the third outer electrode, and the fourth outer electrode are electrically connected to the inverting input of the first operational amplifier, and wherein the first outer electrode and the fourth outer electrode are electrically connected to the non-inverting input of the second operational amplifier, and the second outer electrode and the third outer electrode are electrically connected to the inverting input of the second operational amplifier.

18. The angular rate sensor system of claim 17 wherein the first outer electrode is generally parallel with and confronts the second outer electrode across the vibrating sensing element, and wherein the second outer electrode is generally parallel with and confronts the third outer electrode across the vibrating sensing element.

19. The angular rate sensor system of claim 17 wherein the output of the first operational amplifier is electrically connected to the base electrode.

20. The angular rate sensor system of claim 17 wherein the signal processing circuit further includes an automatic gain control having an input and an output, and wherein the output of the first operational amplifier is electrically connected to the input of the automatic gain control and the output from the automatic gain control is electrically connected to the base electrode.

21. The angular rate sensor system of claim 20 wherein the output of the second operational amplifier is electrically connected to both the output of the automatic gain control and the inverting input of the first operational amplifier.

22. The angular rate sensor system of claim 20 wherein each of the first outer electrode, the second outer electrode, the third outer electrode, and the fourth outer electrode are each electrically connected to a ground connection through first, second, third, and fourth resistors, respectively.

23. The angular rate sensor system of claim 20 wherein the non-inverting input of the first operational amplifier and the non-inverting input of the second operational amplifier are each electrically connected to a ground connection.

24. The angular rate sensor system of claim 17 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the first operational amplifier and the inverting input of the first operational amplifier.

25. The angular rate sensor system of claim 17 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the second operational amplifier and the inverting input of the second operational amplifier.

26. The angular rate sensor system of claim 25 wherein the negative feedback loop is of the capacitance type.

27. The angular rate sensor system of claim 17 wherein the signal processing circuit includes an automatic gain control having an input and an output, a phase shifting means having an input and an output, a demodulator having an input, a first output, and a second output, and a low pass filter having an input and an output, and further wherein the output of the second operational amplifier is electrically connected to the input of the phase shifting means, the output of the phase shifting means is electrically connected to the input of the demodulator, the first output of the demodulator is electrically connected to both the output of the automatic gain control and the non-inverting input of the first operational amplifier, and the second output of the demodulator is electrically connected to the low pass filter.

28. The angular rate sensor system of claim 1 wherein said signal processing circuit includes means for driving the vibratory sensing element at a drive frequency and wherein the vibratory sensing element has a sensing frequency, the sensing frequency being greater than the drive frequency.

29. The angular rate sensor system of claim 28 in which the sensing frequency is at least two times greater than the drive frequency.

30. The angular rate sensor system of claim 28 wherein the sensing frequency is on an order of approximately 10 kHz or greater and the drive frequency is on an order of approximately 4 kHz or less.

31. The angular rate sensor system of claim 28 wherein the sensing frequency is greater than the drive frequency by approximately twenty percent or more.

32. The angular rate sensor system of claim 28 wherein the angular ram sensor system has a characteristic Q-value associated therewith, and wherein the sensing frequency is generally related to and optimized for said characteristic Q-valve.

33. The angular rate sensor system of claim 1 wherein the vibratory sensing dement element has a length, a width, and a thickness, the length being substantially greater than the width.

34. The angular rate sensor system of claim 33 wherein the length of the vibratory sensing element is on the order of approximately 1.18″

.

35. The angular rate sensor system of claim 33 wherein the width of the vibratory sensing element is on the order of approximately 0.12″

.

36. The angular rate sensor system of claim 33 wherein the thickness of the vibratory sensing element is on the order of approximately 0.04″

.

37. The angular rate sensor system of claim 1 wherein the at least two layers of piezoelectric material include a first layer and a second layer opposing the first layer, the vibratory sensing element further comprises:

a first inner conductive layer disposed between the base electrode and the first layer; and

a second inner conductive layer disposed between the base electrode and the second layer.

38. The angular rate sensor system of claim 37 wherein the first inner conductive layer and the second inner conductive layer are each fabricated from a thin layer of silver.

39. The angular rate sensor system of claim 1 wherein the first outer electrode and the second outer electrode are each fabricated from a thin layer of silver.

40. The angular rate sensor system of claim 1 wherein the base electrode is fabricated from a material selected from a group including brass and Kovar ®

.

41. The angular rate sensor system of claim 1 wherein the base electrode is fabricated from brass and each of the pair of acoustic nodes of the vibratory sensing element is a natural acoustic node.

42. The angular rate sensor system of claim 1 wherein the vibration of the vibratory sensing element in the direction of vibration is a non-resonant oscillation.

43. An angular rate sensor system which may be used with a signal processing circuit to discriminate an angular rate, the angular rate sensor system comprising:

a mounting structure; and

a vibratory sensing element including a substantially planar base electrode presenting a pair of opposing sides, at least two layers of piezoelectric material each disposed on and substantially covering the opposing sides of the base electrode, a first outer electrode disposed on a first side of the vibratory sensing element, and a second outer electrode digitised on a second side of the vibratory sensing element opposing the first side, the first outer electrode and the second outer electrode being oriented generally parallel with a plane, the vibratory sensing element defining a pair of natural acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended from the mounting structure proximate to each of the pair of natural acoustic nodes so as to vibrate in the direction of vibration, said system further comprising;

a third outer electrode, the third outer electrode being disposed on the second side of the vibratory sensing element,

wherebywherein the vibratory sensing element vibrates in the direction of vibration oriented generally perpendicular to the plane when either the first electrode or the second electrode are excited by a drive signal, and further wherebywherein the first electrode or the second electrode produce sensing signals responsive and proportional to the angular rate of the vibratory sensing element, the signal processing circuit discriminating the angular rate from the sensing signals.

44. The angular rate sensor system of claim 43 wherein the signal processing circuit includes a first operational amplifier and a second operational amplifier, each of the first operational amplifier and the second operational amplifier having an inverting input, a non-inverting input, and an output, and wherein the second outer electrode and the third outer electrode are electrically connected to the inverting input of the first operational amplifier, and wherein the second outer electrode is electrically connected to the inverting input of the second operational amplifier, and the third outer electrode is electrically connected to the non-inverting input of the second operational amplifier.

45. The angular rate sensor system of claim 43 wherein the second outer electrode is generally parallel with and confronts a first portion of the first outer electrode across the vibrating sensing element, and wherein the third outer electrode is generally parallel with and confronts a second portion of the rust outer electrode across the vibrating sensing element.

46. The angular rate sensor system of claim 45 wherein the first outer electrode has an area and wherein the first portion and the second portion of the first outer electrode are distinct from one another and each extends over approximately one half of the area of the first electrode.

47. The angular rate sensor system of claim 44 wherein the output of the first operational amplifier is electrically connected to the first electrode.

48. The angular rate sensor system of claim 44 wherein the signal processing circuit further includes an automatic gain control having an input and an output, and wherein the output of the first operational amplifier is electrically connected to the input of the automatic gain control and the output from the automatic gain control is electrically connected to the first electrode.

49. The angular rate sensor system of claim 44 wherein each of the first outer electrode, the second outer electrode, and the base electrode are each connected to a ground connection.

50. The angular rate sensor system of claim 49 44 wherein the non-inverting input of the first operational amplifier and the non-inverting input of the second operational amplifier are each electrically connected to a ground connection.

51. The angular rate sensor system of claim 44 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the first operational amplifier and the inverting input of the first operational amplifier.

52. The angular rate sensor system of claim 44 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the second operational amplifier and the inverting input of the second operational amplifier.

53. The angular rate sensor system of claim 44 wherein the signal processing circuit includes an automatic gain control having an input and an output, a phase shifting means having an input and an output, a demodulator having an input, a first output, and a second output, and a low pass filter having an input and an output, and further wherein the output of the second operational amplifier is electrically connected to the input of the phase shifting means, the output of the phase shifting means is electrically connected to the input of the demodulator, the first output of the demodulator is electrically connected to both the input of the automatic gain control and the output of the first operational amplifier, and the second output of the demodulator is electrically connected to the low pass filter.

58. The angular rate sensor system of claim 43 wherein the first outer electrode has an area and wherein the first portion and the third portion of the first outer electrode are distinct from one another and each extend over approximately one third or more of the area of the first electrode, and wherein the second portion of the first outer electrode is distinct from the first portion and the third portion of the first outer electrode and extends over approximately one third or less of the area of the first electrode.

54. An angular rate sensor system which may be used with a signal processing circuit to discriminate an angular rate, the angular rate sensor system comprising:

a mounting structure; and

a vibratory sensing element including a substantially planar base electrode presenting a pair of opposing sides, at least two layers of piezoelectric material each disposed on and substantially covering the opposing sides of the base electrode, a first outer electrode disposed on a first side of the vibratory sensing element, and a second outer electrode disposed on a second side of the vibratory sensing element opposing the first side, the first outer electrode and the second outer electrode being oriented generally parallel with a plane, the vibratory sensing element defining a pair of natural acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended from the mounting structure proximate to each of the pair of natural acoustic nodes so as to vibrate in the direction of vibration, said system further comprising;

a third outer electrode and a fourth outer electrode, the third outer electrode and fourth outer electrode each being disposed on the second side of the vibratory sensing element,

wherebywherein the vibratory sensing element vibrates in the direction of vibration oriented generally perpendicular to the plane when either the first electrode or the second electrode are excited by a drive signal, and further wherebywherein the first electrode or the second electrode produce sensing signals responsive and proportional to the angular rate of the vibratory sensing element, the signal processing circuit discriminating the angular rate from the sensing signals.

55. The angular rate sensor system of claim 54 wherein the fourth outer electrode is disposed between the second outer electrode and the third outer electrode.

56. The angular rate sensor system of claim 54 wherein the signal processing circuit includes a first operational amplifier and a second operational amplifier, each of the first operational amplifier and the second operational amplifier having an inverting input, a non-inverting input, and an output, and wherein the second outer electrode is electrically connected to the inverting input of the second operational amplifier, the third outer electrode is electrically connected to the non-inverting input of the second operational amplifier, and the fourth outer electrode is electrically connected to the inverting input of the first operational amplifier.

57. The angular rate sensor system of claim 54 wherein the second outer electrode is generally parallel with and confronts a first portion of the first outer electrode across the vibrating sensing element, the third outer electrode is generally parallel with and confronts a second portion of the first outer electrode across the vibrating sensing element, and the fourth outer electrode is generally parallel with and confronts a third portion of the first outer electrode across the vibrating sensing element.

59. The angular rate sensor system of claim 56 wherein the output of the first operational amplifier is electrically connected to the first electrode.

60. The angular rate sensor system of claim 56 wherein the signal processing circuit further includes an automatic gain control having an input and an output, and wherein the output of the first operational amplifier is electrically connected to the input of the automatic gain control and the output from the automatic gain control is electrically connected to the first electrode.

61. The angular rate sensor system of claim 54 wherein the third outer electrode and the base electrode are each connected to a ground connection.

62. The angular rate sensor system of claim 61 wherein:

the first outer electrode has an area and wherein the first portion and the third portion of the first outer electrode each extend over approximately one third or more of the area of the first electrode, and wherein the second portion of the first outer electrode extends over approximately one third or less of the area of the first electrode;

the signal processing circuit includes a first operational amplifier and a second operational amplifier, each of the first operational amplifier and the second operational amplifier having an inverting input, a non-inverting input, and an output, and wherein the second outer electrode is electrically connected to the inverting input of the second operational amplifier, the third outer electrode is electrically connected to the non-inverting input of the second operational amplifier, and the fourth outer electrode is electrically connected to the inverting input of the first operational amplifier; and

wherein the non-inverting input of the first operational amplifier and the non-inverting input of the second operational amplifier are each electrically connected to a ground connection.

63. The angular rate sensor system of claim 56 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the first operational amplifier and the inverting input of the first operational amplifier.

64. The angular rate sensor system of claim 59 wherein the signal processing circuit includes a negative feedback loop electrically connected between the output of the second operational amplifier and the inverting input of the second operational amplifier.

65. The angular rate sensor system of claim 64 wherein the negative feedback loop is of the capacitance type.

66. The angular rate sensor system of claim 54 wherein the signal processing circuit includes an automatic gain control having an input and an output, a demodulator having an input, a first output, and a second output, and a low pass filter having an input and an output, and further wherein the output of the second operational amplifier is electrically connected to the input of the demodulator, the first output of the demodulator is electrically connected to both the input of the automatic gain control and the output of the first operational amplifier, and the second output of the demodulator is electrically connected to the low pass filter.

67. An angular rate sensor system which may be used with a signal processing circuit to discriminate an angular rate, the angular rate sensor system comprising:

a vibratory sensing element including a base electrode, at least two layers of piezoelectric material each disposed on opposing sides of the base electrode, a first outer electrode disposed on a first side of the vibratory sensing element, and a second outer electrode disposed on a second side of the vibratory sensing element opposing the first side, the first outer electrode and the second outer electrode being oriented generally parallel with a plane, the vibratory sensing element defining a pair of acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended proximate to the pair of natural acoustic nodes,

whereby the vibratory sensing element vibrates in the direction of vibration oriented generally perpendicular to the plane when either the first electrode or the second electrode are excited by a drive signal, and further whereby the first electrode or the second electrode produce sensing signals responsive and proportional to the angular rate of the vibratory sensing element, the signal processing circuit discriminating the angular rate from the sensing signals;

said angular rate sensor system further comprising a third outer electrode, the third outer electrode being disposed on the first side of the vibratory sensing element and oriented generally parallel with the plane, and a fourth outer electrode, the fourth outer electrode being disposed on the second side of the vibratory sensing element and oriented generally parallel with the plane,

wherein the vibratory sensing dement element has a first acoustic node and a second acoustic node spaced apart from the first acoustic node, the angular rate sensor system further comprising;

a mounting structure;

the mounting structure being attached to the vibratory sensing element proximate to each of the first acoustic node and the second acoustic node, the vibratory sensing element being suspended on the mounting structure so as to vibrate in the direction of vibration, wherein the mounting structure comprises;

a frame member defining an opening within which the vibratory sensing element is received, the opening having a first edge and a second edge;

a first pair of filaments; and

a second pair of filaments, each of the first pair of filaments and the second pair of filaments being connected to and extending from the first edge to the second edge and receiving the vibratory sensing element therebetween, the first pair of filaments being generally aligned along and parallel with the first acoustic node, the second pair of filaments being generally aligned along and parallel with the second acoustic node.

68. The angular rate sensor system of claim 67 wherein each of the first pair of filaments and the second pair of filaments have two opposing ends, at least one of the two opposing ends of the first pair of filaments being crossed over one another to form a first flexure point, and at least one of the two opposing ends of the second pair of filaments being crossed over one another to form a second flexure point.

69. An angular rate sensor system which may be used with a signal processing circuit to discriminate an angular rate, the angular rate sensor system comprising:

a vibratory sensing element including a base electrode, at least two layers of piezoelectric material each disposed on opposing sides of the base electrode, a first outer electrode disposed on a first side of the vibratory sensing element, and a second outer electrode disposed on a second side of the vibratory sensing element opposing the first side, the first outer electrode and the second outer electrode being oriented generally parallel with a plane, the vibratory sensing element defining a pair of acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended proximate to the pair of natural acoustic nodes, said angular rate sensor system further comprising a third outer electrode, the third outer electrode being disposed on the first side of the vibratory sensing element and oriented generally parallel with the plane, and a fourth outer electrode, the fourth outer electrode being disposed on the second side of the vibratory sensing element and oriented generally parallel with the plane,

whereby the vibratory sensing element vibrates in the direction of vibration oriented generally perpendicular to the plane when either the first electrode or the second electrode are excited by a drive signal, and further whereby the first electrode or the second electrode produce sensing signals responsive and proportional to the angular rate of the vibratory sensing element, the signal processing circuit discriminating the angular rate from the sensing signals;

wherein the vibratory sensing element has a first acoustic node and a second acoustic node spaced apart from the first acoustic node, the angular rate sensor system further comprising;

a mounting structure, the mounting structure being attached to the vibratory sensing element proximate to each of the first acoustic node and the second acoustic node, the vibratory sensing element being suspended on the mounting structure so as to vibrate in the direction of vibration, wherein the mounting structure further comprises;

a first plate member spaced apart from and disposed on a first side of the vibratory sensing element and defining a first pair of support arms extending inwardly toward the vibratory sensing element; and

a second plate member spaced apart from and disposed on a second side of the vibratory sensing element opposing the first side and defining a second pair of support arms extending inwardly toward the vibratory sensing element, the first pair of support arms being connected to the vibratory sensing element proximate to the first acoustic node, and the second pair of support arms being connected to the vibratory sensing element proximate to the second acoustic node.

70. The angular rate sensor system of claim 69 wherein the vibratory sensing element has a first edgewise face and a second edgewise face oriented generally perpendicular to both the first acoustic node and the second acoustic node and to the plane, the first pair of support arms each oriented at a generally acute angle relative to the first edgewise face of the vibratory sensing element, the second pair of support arms each oriented at a generally acute angle relative to the second edgewise face of the vibratory sensing element.

71. The angular rate sensor system of claim 69 wherein the first pair of support arms are each oriented at a generally acute angle relative to the first acoustic node, and the second pair of support arms are each oriented at a generally acute angle relative to the second acoustic node.

72. An angular rate sensor system which may be used with a signal processing circuit to discriminate an angular rate, the angular rate sensor system comprising:

a vibratory sensing element including a base electrode, at least two layers of piezoelectric material each disposed on opposing sides of the base electrode, a first outer electrode disposed on a first side of the vibratory sensing element, and a second outer electrode disposed on a second side of the vibratory sensing element opposing the first side, the first outer electrode and the second outer electrode begins oriented generally parallel with a plate, the vibratory sensing element defining a pair of acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended proximate to the pair of natural acoustic nodes, said angular rate sensor system further comprising a third outer electrode, the third outer electrode being disposed on the first side of the vibratory sensing element and oriented generally parallel with the plane, and a fourth outer electrode, the fourth outer electrode being disposed on the second side of the vibratory sensing element and oriented generally parallel with the plane,

whereby the vibratory sensing element vibrates in the direction of vibration oriented generally perpendicular to the plane when either the first electrode or the second electrode are excited by a drive signal, and further whereby the first electrode or the second electrode produce sensing signals responsive and proportional to the angular rate of the vibratory sensing element, the signal processing circuit discriminating the angular rate from the sensing signals;

wherein the vibratory sensing element has a first acoustic node and a second acoustic node spaced apart from the first acoustic node, the angular rate sensor system further comprising;

a mounting structure, the mounting structure being attached to the vibratory sensing element proximate to each of the first acoustic node and the second acoustic node, the vibratory sensing element being suspended on the mounting structure so as to vibrate in the direction of vibration,

wherein the vibratory sensing element has a length, a width, and a thickness, the length being generally greater than the width, and further wherein the mounting structure has a first stiffness in a longitudinal direction parallel with the length of the vibratory sensing element, and the mounting structure has a second stiffness in a lateral direction parallel with the width of the vibratory sensing element.

73. The angular rate sensor system of claim 72 wherein the first stiffness of the mounting structure in the longitudinal direction differs from the second stiffness of the mounting structure in the lateral direction.

74. The angular rate sensor system of claim 72 wherein the first stiffness of the mounting structure in the longitudinal direction and the second stiffness of the mounting structure in the lateral direction are predetermined.

75. An angular rate sensor system which may be used with a signal processing circuit to discriminate an angular rate, the angular rate sensor system comprising:

a mounting structure; and

a vibratory sensing element having opposing first and second sides and including at least two layers of piezoelectric material with at least one layer of conductive material disposed therebetween, the vibratory sensing element further including a first outer conductive layer on the first side and substantially coextensive therewith and a second outer conductive layer on the second side and substantially coextensive therewith, the first and second outer conductive layers being oriented generally parallel with a plane, wherein the first outer conductive layer comprises a first electrode, wherein the second outer conductive layer comprises second and third electrodes, and wherein the vibratory sensing element defines at least a pair of acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended from the mounting structure proximate each of the pair of acoustic nodes so as to vibrate in the direction of vibration,

wherein the vibratory sensing element vibrates in the direction oriented generally perpendicular to the plane if at least one of the first, second or third electrodes is excited by a drive signal, and further wherein at least one of the first, second or third electrodes produces sensing signals responsive and proportional to the angular rate of the vibratory sensing element, the signal processing circuit discriminating the angular rate from the sensing signals.

76. The angular rate sensor system of claim 75, wherein the second electrode is generally parallel with and confronts a first portion of the first electrode across the vibrating sensing element, and wherein the third electrode is generally parallel with and confronts a second portion of the first electrode across the vibrating sensing element.

77. The angular rate sensor system of claim 76, wherein the first electrode has an area and wherein the first portion and the second portion of the first electrode are distinct from one another and each extends over approximately one half of the area of the first electrode.

78. The angular rate sensing system of claim 75, wherein the signal processing circuit includes a first operational amplifier and a second operational amplifier, each of the first operational amplifier and the second operational amplifier having an inverting input, a non-inverting input, and an output, and wherein the second electrode and the third electrode are electrically connected to the inverting input of the first operational amplifier, and wherein the second electrode is electrically connected to the inverting input of the second operational amplifier, and the third electrode is electrically connected to the non-inverting input of the second operational amplifier.

79. The angular rate sensor system of claim 78, wherein the output of the first operational amplifier is electrically connected to the first electrode.

80. The angular rate sensor system of claim 78, wherein the signal processing circuit further includes an automatic gain control having an input and an output, and wherein the output of the first operational amplifier is electrically connected to the input of the automatic gain control and the output from the automatic gain control is electrically connected to the first electrode.

81. The angular rate sensing system of claim 78, wherein the at least one layer of conductive material disposed between the at least two layers of piezoelectric material comprises a center electrode electrically connected to ground.

82. The angular rate sensor system of claim 81 wherein the first electrode and the second electrode are each electrically connected to ground.

83. The angular rate sensor system of claim 81, wherein the vibratory sensing element further defines a plurality of edgewise faces disposed around a perimeter surface of the vibratory sensing element and generally parallel with the direction of vibration, and wherein the center electrode extends outwardly toward and adjacent to each of the plurality of edgewise faces of the perimeter surface.

84. An angular rate sensor system for discriminating an angular rate comprising:

a mounting structure; and

a vibratory sensing element comprising a plurality of piezoelectric layers, each piezoelectric layer having a pair of opposing generally planar surfaces, each surface having a layer of conductive material over at least a portion thereof, the piezoelectric layers opposingly stacked so that the conductive layer on at least one of the surfaces of each piezoelectric layer opposes and is electrically connected with the conductive layer on at least one of the surfaces of an adjacent piezoelectric layer, the electrically connected conductive layers of adjacent piezoelectric layers comprising a center electrode, at least one of the surfaces of each at least two of the piezoelectric layers facing outwardly defining first and second opposing sides of the vibratory sensing element, the first and second opposing sides being oriented generally parallel with a plane, the conductive layer on the first side comprising at least a first outer electrode and the conductive layer on the second side comprising second and third outer electrodes, wherein the vibratory sensing element defines at least a pair of natural acoustic nodes when vibrated in a direction of vibration oriented generally perpendicular to the plane, the vibratory sensing element being suspended from the mounting structure proximate each of the pair of acoustic nodes so as to vibrate in the direction of vibration, the system further comprising a signal processing circuit including a first operational amplifier and a second operational amplifier, each of the first operational amplifier and the second operational amplifier having an inverting input, a non-inverting input, and an output, and wherein the outer second electrode and the third outer electrode are electrically connected to the inverting input of the first operational amplifier, and wherein the second outer electrode is electrically connected to the inverting input of the second operational amplifier, and the third outer electrode is electrically connected to the non-inverting input of the second operational amplifier.

85. The angular rate sensor system of claim 84, wherein the output of the first operational amplifier is electrically connected to the first outer electrode.

86. The angular rate sensor system of claim 84, wherein the signal processing circuit further includes an automatic gain control having an input and an output, and wherein the output of the first operational amplifier is electrically connected to the input of the automatic gain control and the output from the automatic gain control is electrically connected to the first outer electrode.

87. The angular rate sensor system of claim 84, wherein the vibratory sensing element further defines a plurality of edgewise faces disposed around a perimeter surface of the vibratory sensing element and generally parallel with the direction of vibration, and wherein the center electrode extends outwardly toward and adjacent to each of the plurality of edgewise faces of the perimeter surface.