High purity fluid delivery system
First Claim
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1. A fluid delivery system, comprising:
- a reservoir having an inlet for receiving a gas to pressurize the reservoir and an outlet for dispensing fluid contained in the reservoir, with the reservoir including a flexible liner that holds the fluid and prevents the gas from passing into the fluid delivery system;
a first flow control device connected to the reservoir inlet;
a first pressure transmitter connected to the reservoir inlet, the first pressure transmitter providing an output a reservoir inlet pressure signal;
a second flow control device in fluid communication with the reservoir outlet to control fluid flow out of the reservoir;
a second pressure transmitter connected to the reservoir outlet, the second pressure transmitter providing an output a reservoir outlet pressure signal;
a Coriolis mass flowmeter in fluid communication with the second flow control device, the Coriolis flowmeter having a flow-tube made of a high-purity plastic material, the Coriolis flowmeter providing an output signal a mass flow rate output signal of a reservoir output flow from the reservoir and providing a density measurement for the fluid;
a controller receiving a setpoint signal, the controller receiving the output signals reservoir inlet pressure signal from the first and second pressure transmitters and pressure transmitter, the reservoir outlet pressure signal from the second pressure transmitter, and the mass flow rate output signal and the density measurement from the Coriolis flowmeter and providing control output signals to the first and second flow control devices to vary the pressure of the reservoir and the flow rate of fluid from the reservoir.
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Abstract
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.
46 Citations
24 Claims
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1. A fluid delivery system, comprising:
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a reservoir having an inlet for receiving a gas to pressurize the reservoir and an outlet for dispensing fluid contained in the reservoir, with the reservoir including a flexible liner that holds the fluid and prevents the gas from passing into the fluid delivery system; a first flow control device connected to the reservoir inlet; a first pressure transmitter connected to the reservoir inlet, the first pressure transmitter providing an output a reservoir inlet pressure signal; a second flow control device in fluid communication with the reservoir outlet to control fluid flow out of the reservoir; a second pressure transmitter connected to the reservoir outlet, the second pressure transmitter providing an output a reservoir outlet pressure signal; a Coriolis mass flowmeter in fluid communication with the second flow control device, the Coriolis flowmeter having a flow-tube made of a high-purity plastic material, the Coriolis flowmeter providing an output signal a mass flow rate output signal of a reservoir output flow from the reservoir and providing a density measurement for the fluid; a controller receiving a setpoint signal, the controller receiving the output signals reservoir inlet pressure signal from the first and second pressure transmitters and pressure transmitter, the reservoir outlet pressure signal from the second pressure transmitter, and the mass flow rate output signal and the density measurement from the Coriolis flowmeter and providing control output signals to the first and second flow control devices to vary the pressure of the reservoir and the flow rate of fluid from the reservoir. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 24)
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15. A fluid delivery system, comprising:
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a reservoir having an inlet for receiving a gas to pressurize the reservoir and an outlet for dispensing fluid contained in the reservoir, with the reservoir including a flexible liner that holds the fluid and prevents the gas from passing into the fluid delivery system; a first flow control device connected to the reservoir inlet; a second flow control device in fluid communication with the reservoir outlet to control fluid flow out of the reservoir; a second pressure transmitter connected to the reservoir outlet, the second pressure transmitter providing a reservoir outlet pressure signal; a Coriolis mass flowmeter in fluid communication with the second flow control device, the Coriolis flowmeter having a flow-tube made of a high-purity plastic material, the Coriolis flowmeter providing mass flow rate output signal of a reservoir output flow from the reservoir and providing a density measurement for the fluid; a third pressure transmitter connected to a Coriolis mass flowmeter output and generating a Coriolis flowmeter output pressure; and a controller receiving a setpoint signal and receiving the reservoir outlet pressure signal from the second pressure transmitter, the Coriolis flowmeter output pressure from the third pressure transmitter, and the mass flow rate output signal and the density measurement from the Coriolis mass flowmeter, the controller providing control output signals to the first and second flow control devices to vary the pressure of the reservoir and the flow rate of fluid from the reservoir, and the controller determining a fluid viscosity from the mass flow rate, the reservoir outlet pressure, and the Coriolis flowmeter output pressure. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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Specification