Method for patterning a multilayered conductor/substrate structure
First Claim
1. A method for patterning a multilayered conductor/substrate structure comprising the steps of:
- providing a multilayered conductor/substrate structure which includes a plastic substrate and at least one conductive layer overlying the plastic substrate; and
irradiating the multilayered conductor/substrate structure with ultraviolet radiation such that portions of the at least one conductive layer are ablated therefrom;
wherein the irradiating step comprises employing an excimer laser of a projection-type ablation system to ablate portions of the at least one conductive layer by illuminating a mask with a collimated laser beam andemploying projection optics positioned between the mask and the at least one conductive layer to project a pattern from the mask onto the at least one conductive layer.
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Accused Products
Abstract
A method for patterning a multilayered conductor/substrate structure includes the steps of: providing a multilayered conductor/substrate structure which includes a plastic substrate and at least one conductive layer overlying the plastic substrate; and irradiating the multilayered conductor/substrate structure with ultraviolet radiation such that portions of the at least one conductive layer are ablated therefrom. In a preferred embodiment, a projection-type excimer laser system is employed to rapidly and precisely ablate a pattern from a mask into the at least one conductive layer. Preferably, the excimer laser is controlled in consideration of how well the at least one conductive layer absorbs radiation at particular wavelengths. Preferably, a fluence of the excimer laser is controlled in consideration of an ablation threshold level of at least one conductive layer. According to a preferred method, the excimer laser is employed and controlled to ablate portions of the at least one conductive layer without completely decomposing the at least one functional layer therebeneath.
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Citations
63 Claims
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1. A method for patterning a multilayered conductor/substrate structure comprising the steps of:
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providing a multilayered conductor/substrate structure which includes a plastic substrate and at least one conductive layer overlying the plastic substrate; and irradiating the multilayered conductor/substrate structure with ultraviolet radiation such that portions of the at least one conductive layer are ablated therefrom; wherein the irradiating step comprises employing an excimer laser of a projection-type ablation system to ablate portions of the at least one conductive layer by illuminating a mask with a collimated laser beam and employing projection optics positioned between the mask and the at least one conductive layer to project a pattern from the mask onto the at least one conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A composite structure, comprising:
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a substrate having an upper surface and a lower surface opposite the upper surface; a barrier layer comprising an inorganic oxide disposed on the upper surface of the substrate; a protective layer comprising acrylic disposed on the barrier layer such that the barrier layer is disposed between the protective layer and the substrate, wherein the protective layer is configured to protect the substrate from an excimer laser; and a conductive layer disposed on the protective layer such that the protective layer is disposed between the conductive layer and the barrier layer. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
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55. A display system, comprising:
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a first composite structures including; a substrate having an upper surface and a lower surface opposite the upper surface; a barrier layer comprising an inorganic oxide disposed on the upper surface of the substrate; a protective layer comprising acrylic disposed on the barrier layer such that the barrier layer is disposed between the protective layer and the substrate, wherein the protective layer is configured to protect the substrate from an excimer laser; and a conductive layer disposed on the protective layer such that the protective layer is disposed between the conductive layer and the barrier layer; a second composite structure; and a liquid-crystal material disposed between the first composite structure and the second composite structure. - View Dependent Claims (56, 57, 58, 59, 60, 61, 62, 63)
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Specification