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Support for microelectronic, microoptoelectronic or micromechanical devices

DC
  • US RE44,255 E1
  • Filed: 04/24/2008
  • Issued: 06/04/2013
  • Est. Priority Date: 07/20/2001
  • Status: Expired due to Term
First Claim
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1. A device for use in manufacturing, comprising a base, wherein said base functions as mechanical support for said device, wherein said device is configured such that on said base a contaminant removing material is deposed in the form of discrete deposits, wherein said discrete deposits are configured to be at least partially exposed to the atmospheric environment of said device and wherein said discrete deposits of contaminant removing material have a thickness within a range from 0.1 to 5 μ

  • m.

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