Tunable-wavelength optical filter and method of manufacturing the same
First Claim
1. A method of manufacturing a tunable wavelength optical filter, comprising the steps of:
- (a) forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate;
(b) sequentially laminating conductive silicon films and oxide films for defining a mirror region on said first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror;
(c) forming a second sacrificial film on the resultant;
(d) sequentially laminating conductive silicon films and oxide films for defining the mirror region on said second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror;
(e) etching the rear side of said semiconductor substrate to form an opening for inserting an optical fiber thereinto;
(f) forming electrode pads for controlling the gap between said lower mirror and said upper mirror by an electrostatic force;
(g) etching the silicon film around said upper mirror in a dry etching method to expose said second sacrificial oxide film, such that said upper mirror is suspended by a connecting means; and
(h) forming an optical tuning space between said lower mirror and said upper mirror and etching said first sacrificial oxide film and said second sacrificial oxide film such that said lower mirror is floated on said semiconductor substrate.
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Abstract
A method of manufacturing a tunable wavelength optical filter. The method includes steps of forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; sequentially laminating conductive silicon films and oxide films for defining a mirror region on the first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; sequentially laminating conductive silicon films and oxide films for defining the mirror region on a second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror and forming an optical tuning space between the lower mirror and the upper mirror and etching the first sacrificial oxide film and the second sacrificial oxide film such that the lower mirror is floated on the semiconductor substrate.
27 Citations
14 Claims
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1. A method of manufacturing a tunable wavelength optical filter, comprising the steps of:
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(a) forming a first sacrificial oxide film for floating a lower mirror on a semiconductor substrate; (b) sequentially laminating conductive silicon films and oxide films for defining a mirror region on said first sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form a lower mirror; (c) forming a second sacrificial film on the resultant; (d) sequentially laminating conductive silicon films and oxide films for defining the mirror region on said second sacrificial oxide film in a multi-layer and laminating another conductive silicon film to form an upper mirror; (e) etching the rear side of said semiconductor substrate to form an opening for inserting an optical fiber thereinto; (f) forming electrode pads for controlling the gap between said lower mirror and said upper mirror by an electrostatic force; (g) etching the silicon film around said upper mirror in a dry etching method to expose said second sacrificial oxide film, such that said upper mirror is suspended by a connecting means; and (h) forming an optical tuning space between said lower mirror and said upper mirror and etching said first sacrificial oxide film and said second sacrificial oxide film such that said lower mirror is floated on said semiconductor substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of manufacturing a tunable wavelength optical filter, comprising:
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forming a first sacrificial oxide film; sequentially laminating silicon films and oxide films on the first sacrificial oxide film to form a lower mirror; forming a second sacrificial film on the lower mirror; sequentially laminating silicon films and oxide films on the second sacrificial oxide film to form an upper mirror; etching the second sacrificial oxide film to form a gap between the lower minor and the upper minor; and forming electrode pads for controlling the gap. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification