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Method of fabricating an imaging device for collecting photons

  • US RE44,637 E1
  • Filed: 04/15/2010
  • Issued: 12/10/2013
  • Est. Priority Date: 06/10/2004
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating an imaging device, said method comprising:

  • forming a plurality of photosensors on a wafer;

    forming an insulating layer on the wafer over the plurality of photosensors;

    forming a respective opening in the insulating layer, above the plurality of photosensors; and

    depositing a reflecting material on sidewalls of each opening.

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