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Microelectromechanical gyroscope with self-test function and control method

  • US RE45,439 E1
  • Filed: 07/19/2013
  • Issued: 03/31/2015
  • Est. Priority Date: 02/13/2007
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope, comprising:

  • a microstructure, including a first mass and a second mass, wherein the first mass is oscillatable configured to oscillate along a first axis at a driving frequency and the second mass is coupled to the first mass so as to be drawn along the first axis by the first mass and configured to oscillate along a second axis perpendicular to the first axis in response to a rotation of the microstructure gyroscope;

    a driving device coupled to the microstructure to maintain the first mass in oscillation at a driving frequency;

    a reading device structured to detect displacements of the second mass along the second axis; and

    a self-test actuation system coupled to the second mass via self-test terminals and structured to apply an electrostatic force at the driving frequency so as to move the second mass along the second axis, the self-test actuation system structured to alternatingly connect the self-test terminals to a supply line and to a ground line to alternatingly receive a supply voltage and a ground voltage.

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