Microelectromechanical gyroscope with self-test function and control method

• US RE45,439 E1
• Filed: 07/19/2013
• Issued: 03/31/2015
• Est. Priority Date: 02/13/2007
• Status: Active Grant

• Current Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: Prandi, Luciano, Caminada, Carlo, Lasalandra, Ernesto
• Primary Examiner(s): Martin, Laura
• Assistant Examiner(s): Shah, Samir M
• Application Number:
  US13/946,882
• Time in Patent Office: 620 Days
• Field of Search: 73/11.6, 73/12.7, 73/13.4, 73/13.7, 735/040.4, 735/041.2, 735/140.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5726 Signal processing
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 23/005 Flight directors indicating arrangements specially adapted for rotary gyroscopes G01C19/32

Abstract

A microelectromechanical gyroscope having a microstructure that includes a first mass and a second mass, wherein the first mass is oscillatable according to a first axis and the second mass is constrained to the first mass so as to be drawn along by the first mass according to the first axis and to oscillate according to a second axis, in response to a rotation of the microstructure, a driving device coupled to the microstructure to maintain the first mass in oscillation at the driving frequency, and a reading device that detects displacements of the second mass according to the second axis. The gyroscope is provided with a self-test actuation system coupled to the second mass for applying an electrostatic force at the driving frequency so as to move the second mass according to the second axis.

Claims

1. A microelectromechanical gyroscope, comprising:

a microstructure, including a first mass and a second mass, wherein the first mass is oscillatable configured to oscillate along a first axis at a driving frequency and the second mass is coupled to the first mass so as to be drawn along the first axis by the first mass and configured to oscillate along a second axis perpendicular to the first axis in response to a rotation of the microstructure gyroscope;

a driving device coupled to the microstructure to maintain the first mass in oscillation at a driving frequency;

a reading device structured to detect displacements of the second mass along the second axis; and

a self-test actuation system coupled to the second mass via self-test terminals and structured to apply an electrostatic force at the driving frequency so as to move the second mass along the second axis, the self-test actuation system structured to alternatingly connect the self-test terminals to a supply line and to a ground line to alternatingly receive a supply voltage and a ground voltage.

2. The gyroscope according to claim 1 wherein the self-test actuation system comprises a self-test device capacitively coupled to the second mass and structured to supply to the second mass self-test signals at the driving frequency.

3. The gyroscope according to claim 2 wherein the self-test actuation system comprises the self-test terminals structured to receive the self-test signals, and self-test actuation electrodes coupled to the self-test terminals and shaped so as to apply the electrostatic force to the second mass in the presence of the self-test signals on the self-test terminals.

4. The gyroscope according to claim 3 wherein the, further comprising a driving device is configured to supply a clock signal synchronous with the oscillations driving frequency of the first mass along the first axis and the self-test device is coupled to the driving device for receiving and is configured to receive the clock signal.

5. The gyroscope according to claim 4 wherein the self-test signals are correlated to the clock signal.

6. The gyroscope according to claim 5 wherein the self-test signals are square-wave signals having the driving frequency.

7. The gyroscope according to claim 5 wherein the self-test signals comprise a first self-test signal, synchronous with the clock signal, and a second self-test signal, 180°

out of phase with respect to the first self-test signal.

8. The gyroscope according to claim 3 wherein the self-test device comprises the supply line issuing the supply voltage, and the ground line set at the ground voltage, and switching circuits structured to connect the self-test terminals alternatingly to the supply line and to the ground line.

9. The gyroscope according to claim 3 wherein the self-test device is selectively enabled in a first operating mode and disabled in a second operating mode and wherein, in the second operating mode, the self-test terminals are connected to a reference line issuing a constant reference voltage.

10. The gyroscope according to claim 2 wherein the reading device comprises a charge amplifier, having inputs connected to respective detection outputs of the microstructure gyroscope, and a decoupling circuit structured to decouple the charge amplifier from the detection outputs in the presence of edges of the self-test signals.

11. The gyroscope according to claim 1 wherein the driving frequency is a resonance oscillation frequency of the first mass according to the first axis.

12. A method for controlling a microelectromechanical gyroscope, comprising:

providing a microstructure including a first mass oscillatable along a first axis at a driving frequency and a second mass;

coupling the second mass to the first mass so that, the first mass configured to move the second mass is drawn along the first axis by the first mass and oscillates along a second axis in response to a rotation of the microstructure at the driving frequency;

feedback controlling a velocity of the first mass to maintain the first mass in oscillation at a driving frequency;

and

performing a self-test by applying an electrostatic force to the second mass via self-test terminals at the driving frequency by, the self-test including alternatingly coupling the self-test terminals to a supply line and to a ground line toand moving the second mass along the second axis by alternatingly receivereceiving a supply voltage and a ground voltage so as to move the second mass along the second axisat the self-test terminals.

13. The method according to claim 12 wherein the step of applying an electrostatic force comprises supplying to the second mass self-test signals at the driving frequency.

14. The method according to claim 13, comprising the steps of:

generating a clock signal synchronous with the oscillations of the first mass along the first axis; and

generating the self-test signals using the clock signal.

15. The method according to claim 13 wherein the self-test signals are square-wave signals having the driving frequency.

16. The method according to claim 12 wherein the driving frequency is a resonance oscillation frequency of the first mass according to the first axis.

17. A circuit adapted configured for use with a microelectromechanical gyroscope having a first mass and a second mass oscillatable in response to oscillations of the first mass, the circuit comprising:

a driving circuit coupled to the first mass to drive the first mass in oscillation at a driving frequency;

a reading device coupled to the second mass and adapted configured to detect displacements of the second mass; and

a self-test actuation system coupled to the second mass via self-test electrodes and structured to drive the second mass through application of an electrostatic force at a driving frequency by coupling the self-test electrodes alternatingly to a supply voltage and a ground voltage in order to move the second mass.

18. The circuit of claim 17 wherein the self-test actuation system includes the electrodes coupled to a source of self-test signals and shaped to apply the electrostatic force to the second mass in response to the self-test signals.

19. The circuit of claim 18 wherein the self-test signals comprise a first self-test signal synchronous with a clock signal and a second self-test signal 180 degrees out of phase with respect to the first self-test signal selectively applied to the electrodes.

20. A system, comprising:

a control circuit;

a microelectromechanical gyroscope that comprises coupled to the control circuit, the gyroscope including;

a microstructure having a first mass configured to oscillate at a driving frequency;

and

a second mass coupled to the first mass, the second mass configured to oscillate in response to oscillations of the first mass;

a driving device comprising;

a driving circuit coupled to the first mass to drive the first mass in oscillation at a driving frequency;

a reading device coupled to the second mass and adapted configured to detect displacements of the second mass; and

a self-test actuation system coupled to the second mass and structured to drive the second mass through application of an electrostatic force at a driving frequency by coupling, the self-test actuation system configured to couple the second mass alternatingly to a supply voltage line and a ground voltage line in order to move drive the second mass during a self-test.

21. The system of claim 20 wherein the self-test actuation system comprises electrodes coupled to a source of self-test signals and structured to apply the electrostatic force to the second mass in response to the self-test signals.

22. The circuit of claim 20 wherein the self-test actuation system is structured to generate self-test signals to include a first self-test signal synchronous with a clock signal and a second self-test signal 180 degrees out of phase with respect to the first self-test signal to be selectively applied to the electrodes.

23. A microelectromechanical gyroscope, comprising:

a microstructure, including a first mass and a second mass, wherein the first mass is oscillatable along a first axis and the second mass is coupled to the first mass so as to be drawn along the first axis by the first mass and to oscillate along a second axis perpendicular to the first axis in response to a rotation of the microstructure;

a driving device coupled to the microstructure to maintain the first mass in oscillation at a driving frequency;

a reading device structured to detect displacements of the second mass along the second axis; and

a self-test actuation system coupled to the second mass via self-test terminals and structured to apply an electrostatic force at the driving frequency so as to move the second mass along the second axis, the self-test actuation system structured to be selectively enabled in a first operating mode and disabled in a second operating mode, and wherein in the second operating mode the self-test terminals are connected to a reference line issuing a constant reference voltage.

24. The gyroscope according to claim 23 wherein the self-test actuation system comprises a self-test device capacitively coupled to the second mass and structured to supply to the second mass self-test signals at the driving frequency.

25. The gyroscope according to claim 24 wherein the self-test actuation system comprises the self-test terminals structured to receive the self-test signals, and self-test actuation electrodes coupled to the self-test terminals and shaped so as to apply the electrostatic force to the second mass in the presence of the self-test signals on the self-test terminals.

26. The gyroscope according to claim 25 wherein the driving device is configured to supply a clock signal synchronous with the oscillations of the first mass along the first axis and the self-test device is coupled to the driving device for receiving the clock signal.

27. The gyroscope according to claim 26 wherein the self-test signals are correlated to the clock signal.

28. The gyroscope according to claim 27 wherein the self-test signals are square-wave signals having the driving frequency.

29. The gyroscope according to claim 27 wherein the self-test signals comprise a first self-test signal synchronous with the clock signal, and a second self-test signal that is 180°

out of phase with respect to the first self-test signal.

30. The gyroscope according to claim 25 wherein the self-test device comprises a supply line issuing a supply voltage, and a ground line set at a ground voltage, and switching circuits structured to connect the self-test terminals alternatingly to the supply line and to the ground line.

31. The gyroscope according to claim 24 wherein the reading device comprises a charge amplifier having inputs connected to respective detection outputs of the microstructure, and a decoupling circuit structured to decouple the charge amplifier from the detection outputs in the presence of edges of the self-test signals.

32. The gyroscope according to claim 23 wherein the driving frequency is a resonance oscillation frequency of the first mass according to the first axis.

33. A device, comprising:

a substrate;

a driving mass suspended above the substrate and configured to oscillate at a driving frequency;

a sensing mass suspended above the substrate, elastically coupled to the driving mass, and configured to move in response to the driving mass, the sensing mass including;

detection electrodes; and

actuation electrodes; and

a self-test module coupled to the sensing mass and configured to move the sensing mass at the driving frequency during a self-test mode, the self-test module configured to alternatingly connect self-test terminals to a supply line and a ground line to alternatingly receive a supply voltage and a ground voltage.

34. The device of claim 33 wherein the self-test module is configured to provide a voltage to the actuation electrodes to move the sensing mass at the driving frequency.

35. The device of claim 33 wherein the detection electrodes and the actuation electrodes are each configured to interact with fixed detection electrodes and fixed actuation electrodes, respectively.

36. The device of claim 35 wherein a first detection output is coupled to a first plurality of the fixed detection electrodes, a second detection output is coupled to a second plurality of the fixed detection electrodes, a first actuation input is coupled to a first plurality of the fixed actuation electrodes, and a second actuation input is coupled to a second plurality of the fixed actuation electrodes.