Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

• US RE45,511 E1
• Filed: 04/21/2010
• Issued: 05/12/2015
• Est. Priority Date: 07/30/2003
• Status: Expired due to Fees

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Govil, Pradeep K., Guzman, Andrew
• Primary Examiner(s): Phan, James
• Application Number:
  US12/764,557
• Time in Patent Office: 1,847 Days
• Field of Search: 359290-291, 359/846, 359/849, 359/900, 359/191.4, 359/200.8, 359/224.1, 359/224.2
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.

Claims

1. A method comprising:

detecting wavefront aberrations;

generating a control signal based on the detected aberration;

moving extensions of a piezoelectric actuator based on the control signal;

deforming a reflector based on the moving of the extensions to correct the aberrations in the wavefront;

measuring a change in capacitance of the extensions; and

verifying the deformation of the reflector based on the measured change in capacitance.

2. The method of claim 1, wherein the moving and deforming steps compensate for higher order values of the aberrations.

3. The method of claim 1, further comprising generating a Zernike polynomial from the detecting step, wherein the moving and deforming steps correct for aberrations corresponding to all orders of the Zernike polynomial.

4. The method of claim 1, further comprising:

providing a deformable mirror for the reflector to correct the aberrations in the wavefront.

5. The method of claim 1, further comprising:

forming the piezoelectric actuator in an integrated circuit.

6. The method of claim 1, wherein the extensions are coupled approximately at an edge of the reflector.

7. The method of claim 1, wherein the moving controls actuation of edge-positioned ones of the extensions to control movement of the reflector.

8. A method comprising:

providing an actuator in an integrated circuit;

detecting wavefront aberrations;

generating a control signal based on the detecting;

moving extensions of the actuator based on the control signal;

deforming a reflector based on the moving;

measuring a movement of the extensions of the actuator; and

verifying the deformation of the reflector based on the measured movement.

9. The method of claim 8, wherein the measuring a movement further comprises:

measuring a change in capacitance of the extensions.

10. The method of claim 8, wherein the moving and the deforming compensate for higher order values of the wavefront aberrations.

11. The method of claim 8, further comprising:

generating a Zernike polynomial from the detecting,

wherein the moving and the deforming correct for wavefront aberrations corresponding to all orders of the Zernike polynomial.

12. The method of claim 8, further comprising:

correcting the wavefront aberration using a deformable mirror of the reflector.

13. The method of claim 8, wherein the extensions are coupled approximately at an edge of the reflector.

14. The method of claim 8, wherein the moving controls actuation of edge-positioned ones of the extensions to control movement of the reflector.

15. The method of claim 8, wherein moving the extensions comprises moving extensions that have various heights based on a desired amount of decoupling between the extensions.

16. The method of claim 8, wherein the actuator is a piezoelectric actuator.