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Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes

  • US RE45,855 E1
  • Filed: 10/24/2013
  • Issued: 01/19/2016
  • Est. Priority Date: 09/11/2007
  • Status: Active Grant
First Claim
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1. An integrated microelectromechanical structure, comprising:

  • a substrate;

    a driving mass designed to be moved with a rotary motion about an axis of rotation and having a central aperture relative to a central axis;

    a first anchorage arrangement positioned in the central aperture and structured to anchor the driving mass to the substrate;

    arranged at the central axis and coupled to the substrate;

    a first opening provided within said driving mass;

    elastic anchorage elements coupling the driving mass to the first anchorage;

    a first sensing mass of a first type arranged inside said first opening;

    first elastic supporting elements connecting coupling said first sensing mass to said driving mass and configured to enable the first sensing mass to move in a first direction in response to a first acceleration to perform a first detection movementin the presence of a first external stress;

    a second sensing mass that is of a type that is different from the first sensing mass;

    second elastic supporting elements coupled between the driving mass and the second sensing mass and configured to enable the second sensing mass to perform a second detection movement in response to a second acceleration, said first detection movement being a rotational movement about a first axis lying in a plane of said driving mass, and said second detection movement being a linear movement along a second axis lying in said plane;

    a second anchorage arrangement positioned externally of said driving mass and coupled to a first side of the driving mass;

    a third anchorage arrangement positioned externally of said driving mass and coupled to a second side of the driving mass, the second side being opposite to the first side;

    wherein said first elastic supporting elements and said first, second and third anchorage arrangements anchorages are so configured so that said driving first sensing mass is fixed to said first sensing driving mass of the first type in said rotary motion and driven relative to the central axis, and the first sensing mass is decoupled therefrom in said detection movement from the driving mass when moving in said first direction.

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