Method for manufacturing oxide semiconductor device

• US 10,008,588 B2
• Filed: 12/26/2014
• Issued: 06/26/2018
• Est. Priority Date: 03/30/2011
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Imoto, Yuki, Sato, Yuhei
• Primary Examiner(s): Le, Thao X
• Assistant Examiner(s): SWAN, GARDNER W.S
• Application Number:
  US14/583,416
• Publication Number:
  US 20150162421A1
• Time in Patent Office: 1,278 Days
• Field of Search: None
• CPC Class Codes: H01L 21/0242 Crystalline insulating materials
• CPC Class Codes: H01L 21/02422 Non-crystalline insulating materials, e.g. glass, polymers
• CPC Class Codes: H01L 21/02488 Insulating materials
• CPC Class Codes: H01L 21/02502 consisting of two layers
• CPC Class Codes: H01L 21/02554 Oxides
• CPC Class Codes: H01L 21/02565 Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
• CPC Class Codes: H01L 21/02658 Pretreatments cleaning in general H01L21/02041
• CPC Class Codes: H01L 29/513 the variation being perpendicular to the channel plane
• CPC Class Codes: H01L 29/517 the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate H01L29/518 takes precedence
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

The amount of water and hydrogen contained in an oxide semiconductor film is reduced, and oxygen is supplied sufficiently from a base film to the oxide semiconductor film in order to reduce oxygen deficiencies. A stacked base film is formed, a first heat treatment is performed, an oxide semiconductor film is formed over and in contact with the stacked base film, and a second heat treatment is performed. In the stacked base film, a first base film and a second base film are stacked in this order. The first base film is an insulating oxide film from which oxygen is released by heating. The second base film is an insulating metal oxide film. An oxygen diffusion coefficient of the second base film is smaller than that of the first base film.

Claims

1. A method for manufacturing a semiconductor device comprising:

forming an insulating film over a substrate;

forming an insulating metal oxide film over the insulating film;

after forming the insulating metal oxide film, performing a first heat treatment;

after performing the first heat treatment, forming an oxide semiconductor film over the insulating metal oxide film; and

after forming the oxide semiconductor film, performing a second heat treatment,

wherein an oxygen diffusion coefficient of the insulating metal oxide film is smaller than that of the insulating film,

wherein the second heat treatment is performed lower than or equal to 450°

C.,

wherein the first heat treatment is performed at a temperature lower than the second heat treatment, and

wherein oxygen is supplied from the insulating film to the oxide semiconductor film through the insulating metal oxide film by performing the second heat treatment.

2. The method according to claim 1, wherein water and hydrogen in the insulating film and the insulating metal oxide film is removed while desorption of oxygen from the insulating film and the insulating metal oxide film is suppressed during the first heat treatment.

3. The method according to claim 1, wherein a thickness of the insulating metal oxide film is greater than or equal to 1 nm and less than or equal to 20 nm.

4. The method according to claim 1, wherein the insulating film is a silicon oxide film.

5. The method according to claim 1, wherein the insulating metal oxide film is any one of an yttrium oxide film, a zirconium oxide film, an aluminum oxide film, and a zirconium oxide film to which yttrium oxide is added.

6. The method according to claim 1, wherein the oxide semiconductor film comprises indium, gallium, and zinc.

7. The method according to claim 1, wherein the oxide semiconductor film is formed to have a crystalline structure.

8. A method for manufacturing a semiconductor device comprising:

forming an insulating film over a substrate;

forming an insulating metal oxide film over the insulating film;

after forming the insulating metal oxide film, performing a first heat treatment;

after performing the first heat treatment, forming an oxide semiconductor film over the insulating metal oxide film; and

after forming the oxide semiconductor film, performing a second heat treatment,

wherein an oxygen diffusion coefficient of the insulating metal oxide film is smaller than that of the insulating film,

wherein the first heat treatment is performed higher than or equal to 250°

C. and lower than or equal to 350°

C.,

wherein the second heat treatment is performed lower than or equal to 450°

C.,

wherein the first heat treatment is performed at a temperature lower than the second heat treatment, and

wherein oxygen is supplied from the insulating film to the oxide semiconductor film through the insulating metal oxide film by performing the second heat treatment.

9. The method according to claim 8, wherein water and hydrogen in the insulating film and the insulating metal oxide film is removed while desorption of oxygen from the insulating film and the insulating metal oxide film is suppressed during the first heat treatment.

10. The method according to claim 8, wherein a thickness of the insulating metal oxide film is greater than or equal to 1 nm and less than or equal to 20 nm.

11. The method according to claim 8, wherein the insulating film is a silicon oxide film.

12. The method according to claim 8, wherein the insulating metal oxide film is any one of an yttrium oxide film, a zirconium oxide film, an aluminum oxide film, and a zirconium oxide film to which yttrium oxide is added.

13. The method according to claim 8, wherein the oxide semiconductor film comprises indium, gallium, and zinc.

14. The method according to claim 8, wherein the oxide semiconductor film is formed to have a crystalline structure.

15. A method for manufacturing a semiconductor device comprising:

forming an insulating film over a substrate;

forming an insulating metal oxide film over the insulating film;

after forming the insulating metal oxide film, performing a first heat treatment;

after performing the first heat treatment;

forming an oxide semiconductor film over the insulating metal oxide film;

after forming the oxide semiconductor film, performing a second heat treatment;

forming a gate insulating film over the oxide semiconductor film; and

forming a gate electrode over the gate insulating film,

wherein an oxygen diffusion coefficient of the insulating metal oxide film is smaller than that of the insulating film,

wherein the first heat treatment is performed higher than or equal to 250°

C. and lower than or equal to 350°

C.,

wherein the second heat treatment is performed lower than or equal to 450°

C.,

wherein the first heat treatment is performed at a temperature lower than the second heat treatment, and

wherein oxygen is supplied from the insulating film to the oxide semiconductor film through the insulating metal oxide film by performing the second heat treatment.

16. The method according to claim 15, wherein water and hydrogen in the insulating film and the insulating metal oxide film is removed while desorption of oxygen from the insulating film and the insulating metal oxide film is suppressed during the first heat treatment.

17. The method according to claim 15, wherein a thickness of the insulating metal oxide film is greater than or equal to 1 nm and less than or equal to 20 nm.

18. The method according to claim 15, wherein the insulating film is a silicon oxide film.

19. The method according to claim 15, wherein the insulating metal oxide film is any one of an yttrium oxide film, a zirconium oxide film, an aluminum oxide film, and a zirconium oxide film to which yttrium oxide is added.

20. The method according to claim 15, wherein the oxide semiconductor film comprises indium, gallium, and zinc.

21. The method according to claim 15, wherein the oxide semiconductor film is formed to have a crystalline structure.

22. A method for manufacturing a semiconductor device comprising:

forming an insulating film over a substrate;

forming an insulating metal oxide film over the insulating film;

after forming the insulating metal oxide film, performing a first heat treatment;

after performing the first heat treatment, forming an oxide semiconductor film over the insulating metal oxide film; and

after forming the oxide semiconductor film, performing a second heat treatment,

wherein an oxygen diffusion coefficient of the insulating metal oxide film is smaller than that of the insulating film,

wherein the second heat treatment is performed lower than or equal to 450°

C., and

wherein the first heat treatment is performed at a temperature lower than the second heat treatment.

23. The method according to claim 22, wherein the first heat treatment is performed higher than or equal to 250°

C. and lower than or equal to 350°

C.

24. The method according to claim 22, comprising:

forming a gate insulating film over the oxide semiconductor film; and

forming a gate electrode over the gate insulating film.

25. The method according to claim 22, wherein water and hydrogen in the insulating film and the insulating metal oxide film is removed while desorption of oxygen from the insulating film and the insulating metal oxide film is suppressed during the first heat treatment.

26. The method according to claim 22, wherein a thickness of the insulating metal oxide film is greater than or equal to 1 nm and less than or equal to 20 nm.

27. The method according to claim 22, wherein the insulating film is a silicon oxide film.

28. The method according to claim 22, wherein the insulating metal oxide film is any one of an yttrium oxide film, a zirconium oxide film, an aluminum oxide film, and a zirconium oxide film to which yttrium oxide is added.

29. The method according to claim 22, wherein the oxide semiconductor film comprises indium, gallium, and zinc.

30. The method according to claim 22, wherein the oxide semiconductor film is formed to have a crystalline structure.

31. A method for manufacturing a semiconductor device comprising:

forming an insulating film over a substrate;

forming an oxide insulating film over the insulating film;

after forming the oxide insulating film, performing a first heat treatment;

after performing the first heat treatment, forming an oxide semiconductor film over the oxide insulating film; and

after forming the oxide semiconductor film, performing a second heat treatment,

wherein an oxygen diffusion coefficient of the oxide insulating film is smaller than that of the insulating film,

wherein the second heat treatment is performed lower than or equal to 450°

C., and

wherein the first heat treatment is performed at a temperature lower than the second heat treatment.

32. The method according to claim 31, wherein the first heat treatment is performed higher than or equal to 250°

C. and lower than or equal to 350°

C.

33. The method according to claim 31, comprising:

forming a gate insulating film over the oxide semiconductor film; and

forming a gate electrode over the gate insulating film.

34. The method according to claim 31, wherein water and hydrogen in the insulating film and the oxide insulating film is removed while desorption of oxygen from the insulating film and the oxide insulating film is suppressed during the first heat treatment.

35. The method according to claim 31, wherein a thickness of the oxide insulating film is greater than or equal to 1 nm and less than or equal to 20 nm.

36. The method according to claim 31, wherein the insulating film is a silicon oxide film.

37. The method according to claim 31, wherein the oxide semiconductor film comprises indium, gallium, and zinc.

38. The method according to claim 31, wherein the oxide semiconductor film is formed to have a crystalline structure.