Fabrication of low defectivity electrochromic devices

• US 10,054,833 B2
• Filed: 05/04/2017
• Issued: 08/21/2018
• Est. Priority Date: 03/31/2009
• Status: Active Grant

• Current Assignee: View Incorporated
• Original Assignee: View Incorporated
• Inventors: Kailasam, Sridhar Karthik, Friedman, Robin, Pradhan, Anshu A., Rozbicki, Robert T.
• Primary Examiner(s): PINKNEY, DAWAYNE
• Application Number:
  US15/587,114
• Publication Number:
  US 20170299933A1
• Time in Patent Office: 474 Days
• Field of Search: 359296, 359253-254, 359245-247, 359290-291, 359298, 359265-275, 359277, 359242, 349 33, 345 49, 345105, 345107, 430 31- 32
• CPC Class Codes: B05D 5/06 to obtain multicolour or other optical effects B05D5/02 takes precedence
• CPC Class Codes: B23K 20/10 making use of vibrations, e.g. ultrasonic welding
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 2217/94 Transparent conductive oxide layers [TCO] being part of a multilayer coating
• CPC Class Codes: C09K 2211/183 of the refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta or W
• CPC Class Codes: C09K 2211/187 of the iron group metals, i.e. Fe, Co or Ni
• CPC Class Codes: C09K 9/00 Tenebrescent materials, i.e. materials for which the range of wavelengths for energy absorption is changed as a result of excitation by some form of energy
• CPC Class Codes: C23C 10/28 using solids, e.g. powders, pastes
• CPC Class Codes: C23C 14/021 Cleaning or etching treatments
• CPC Class Codes: C23C 14/022 by means of bombardment with energetic particles or radiation
• CPC Class Codes: C23C 14/024 Deposition of sublayers, e.g. to promote adhesion of the coating C23C14/027 takes precedence
• CPC Class Codes: C23C 14/046 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 14/08 Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium
• CPC Class Codes: C23C 14/085 of iron group metals
• CPC Class Codes: C23C 14/086 of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: C23C 14/14 Metallic material, boron or silicon
• CPC Class Codes: C23C 14/185 by cathodic sputtering
• CPC Class Codes: C23C 14/3407 Cathode assembly for sputtering apparatus, e.g. Target
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: C23C 14/58 : After-treatment
• CPC Class Codes: C23C 14/5806 : Thermal treatment
• CPC Class Codes: C23C 14/5853 : Oxidation
• CPC Class Codes: G02F 1/1524 : Transition metal compounds
• CPC Class Codes: G02F 1/1525 : characterised by a particular ion transporting layer, e.g. electrolyte
• CPC Class Codes: G02F 1/153 : Constructional details
• CPC Class Codes: G02F 1/1533 : structural features not otherwise provided for
• CPC Class Codes: G02F 1/155 : Electrodes
• CPC Class Codes: G02F 2001/1536 : additional, e.g. protective, layer inside the cell

Abstract

Prior electrochromic devices frequently suffer from high levels of defectivity. The defects may be manifest as pin holes or spots where the electrochromic transition is impaired. This is unacceptable for many applications such as electrochromic architectural glass. Improved electrochromic devices with low defectivity can be fabricated by depositing certain layered components of the electrochromic device in a single integrated deposition system. While these layers are being deposited and/or treated on a substrate, for example a glass window, the substrate never leaves a controlled ambient environment, for example a low pressure controlled atmosphere having very low levels of particles. These layers may be deposited using physical vapor deposition.

Claims

1. An electrochromic device comprising:

a first transparent conductive layer;

an electrochromic layer comprising a tungsten oxide based electrochromic material;

an ion conducting layer;

a counter electrode layer comprising a nickel oxide based counter electrode material doped with tungsten and tantalum; and

a second transparent conductive layer.

2. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material is doped with molybdenum.

3. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material is doped with vanadium.

4. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material is doped with titanium.

5. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material is doped with lithium, sodium, and/or potassium.

6. The electrochromic device of claim 1, wherein the first and second transparent conductive layers each have a sheet resistance between about 5-30 Ohms per square.

7. The electrochromic device of claim 1, wherein the first and second transparent conductive layers each comprise a material selected from the group consisting of:

a conductive oxide material, a conductive metallic material, a conductive metal nitride, and a conductive composite material.

8. The electrochromic device of claim 7, wherein at least one of the first and second transparent conductive layers comprise the conductive oxide material, and wherein the conductive oxide material is selected from the group consisting of:

indium oxide, indium tin oxide, doped indium oxide, tin oxide, doped tin oxide, zinc oxide, aluminum zinc oxide, doped zinc oxide, ruthenium oxide, and doped ruthenium oxide.

9. The electrochromic device of claim 7, wherein at least one of the first and second transparent conductive layers comprise the conductive metallic material, and wherein the conductive metallic material is selected from the group consisting of:

gold, platinum, silver, aluminum, and a nickel alloy.

10. The electrochromic device of claim 7, wherein at least one of the first and second transparent conductive layers comprise the conductive metal nitride, and wherein the conductive metal nitride is selected from the group consisting of:

titanium nitrides, tantalum nitrides, titanium oxynitrides, and tantalum oxynitrides.

11. The electrochromic device of claim 7, wherein at least one of the first and second transparent conductive layers comprise the conductive composite material, wherein the conductive composite material comprises (i) conductive ceramic and metal wires, and (ii) a transparent conductive material that overlays the conductive ceramic and metal wires.

12. The electrochromic device of claim 1, wherein each of the first and second conductive layers has a thickness between about 5-10,000 nm.

13. The electrochromic device of claim 12, wherein each of the first and second conductive layers has a thickness between about 100-400 nm.

14. The electrochromic device of claim 1, wherein the ion conducting layer comprises a material selected from the group consisting of:

silicates, silicon oxides, tungsten oxides, tantalum oxides, niobium oxides, and borates.

15. The electrochromic device of claim 1, wherein the ion conducting layer comprises a material selected from the group consisting of:

silicon oxide, silicon aluminum oxide, lithium silicon oxide, lithium silicon aluminum oxide, lithium silicate, lithium aluminum silicate, lithium aluminum borate, lithium aluminum fluoride, lithium borate, lithium nitride, lithium zirconium silicate, lithium niobate, lithium borosilicate, and lithium phosphosilicate.

16. The electrochromic device of claim 1, wherein the ion conducting layer has a thickness between about 5-100 nm, and wherein the thickness of the ion conducting layer varies by no more than about ±

10%.

17. The electrochromic device of claim 1, wherein the electrochromic layer has a thickness between about 200-700 nm, and wherein the thickness of the electrochromic layer varies by no more than about ±

10%.

18. The electrochromic device of claim 1, wherein the counter electrode layer has a thickness between about 150-350 nm, and wherein the thickness of the counter electrode layer varies by no more than about ±

10%.

19. The electrochromic device of claim 1, wherein a ratio of thicknesses of the electrochromic layer to the counter electrode layer is between about 1.7:

1 and 2.3;

1.

20. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material comprises WO_x, wherein x is at least about 2.7 and less than 3.

21. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material has a substantially nanocrystalline morphology.

22. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material and the nickel oxide based counter electrode material each comprise lithium.

23. The electrochromic device of claim 1, wherein the first and second transparent conductive layers have substantially the same sheet resistance.

24. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material is doped with one or more dopants selected from lithium, sodium, potassium, molybdenum, vanadium, and titanium.

25. The electrochromic device of claim 24, wherein the tungsten oxide based electrochromic material is doped with molybdenum and titanium.

26. The electrochromic device of claim 1, wherein the tungsten oxide based electrochromic material is a tungsten molybdenum mixed oxide.