Hybrid infrared sensor array having heterogeneous infrared sensors
First Claim
1. An infrared sensor assembly comprising:
- an array of infrared sensors, the array comprising;
a plurality of microbolometers configured to image a scene, andat least one non-bolometric sensor configured to detect infrared radiation from at least a portion of the scene; and
a substrate coupled to the array, the substrate comprising;
a readout integrated circuit (ROIC) configured to provide first signals from the microbolometers corresponding to a captured infrared image of the scene,an output circuit configured to provide second signals from the at least one non-bolometric sensor corresponding to the infrared radiation, anda processor configured to radiometrically calibrate the microbolometers based on the second signals provided by the output circuit.
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Accused Products
Abstract
Various techniques are provided for an infrared sensor assembly having a hybrid infrared sensor array. In one example, such a hybrid infrared sensor array may include a plurality of microbolometers and a non-bolometric infrared sensor. The non-bolometric infrared sensor may be a thermopile or other type of infrared sensor different from a bolometer-based sensor. The non-bolometric infrared sensor may be utilized to provide a more accurate and stable temperature reading of an object or area of a scene captured by the array. In some embodiments, the non-bolometric infrared sensor may also be utilized to perform a shutter-less radiometric calibration of the microbolometers of the array. An infrared sensor assembly may include, for example, the hybrid infrared sensor array, as well as a substrate including bond pads and/or appropriate circuits to obtain and/or transmit output signals from the non-bolometric infrared sensor.
22 Citations
20 Claims
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1. An infrared sensor assembly comprising:
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an array of infrared sensors, the array comprising; a plurality of microbolometers configured to image a scene, and at least one non-bolometric sensor configured to detect infrared radiation from at least a portion of the scene; and a substrate coupled to the array, the substrate comprising; a readout integrated circuit (ROIC) configured to provide first signals from the microbolometers corresponding to a captured infrared image of the scene, an output circuit configured to provide second signals from the at least one non-bolometric sensor corresponding to the infrared radiation, and a processor configured to radiometrically calibrate the microbolometers based on the second signals provided by the output circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method comprising:
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receiving, at an array of infrared sensors, infrared radiation from a scene, wherein the array comprises a plurality of microbolometers and at least one non-bolometric sensor; providing, by a readout integrated circuit (ROIC) communicatively coupled to the plurality of microbolometers, infrared image data representing an infrared image of the scene; providing, by an output circuit communicatively coupled to the at least one non-bolometric sensor, temperature information associated with the scene, wherein the ROIC and the output circuit are provided on a substrate; and radiometrically calibrating the plurality of microbolometers based on the temperature information provided by the output circuit. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A method of providing a hybrid infrared sensor assembly, the method comprising:
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fabricating microbolometers to form a focal plane array (FPA); fabricating at least one non-bolometric sensor on the FPA; providing a readout integrated circuit (ROIC) electrically coupled to the microbolometers to generate output signals corresponding to an image of infrared radiation incident on the microbolometers; and providing bond pads electrically connected to the at least one non-bolometric sensor and configured to form an electrical connection with an external device to generate temperature information associated with the infrared radiation using the at least one non-bolometric sensor, wherein the external device radiometrically calibrates the microbolometers based on the temperature information. - View Dependent Claims (20)
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Specification