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Tunable power amplifier with wide frequency range

  • US 10,116,270 B2
  • Filed: 09/14/2016
  • Issued: 10/30/2018
  • Est. Priority Date: 08/05/2014
  • Status: Active Grant
First Claim
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1. A circuit comprising:

  • an amplifier to amplify an input signal and generate an output signal; and

    a tuning network to tune a frequency response of the amplifier, the tuning network comprising at least one tunable microelectromechanical system (MEMS) capacitor, the at least one tunable MEMS capacitor comprising a MEMS superstructure disposed over a control structure, the control structure being arranged to control the MEMS superstructure and tune a capacitance of the at least one tunable MEMS capacitor, the control structure comprising an electrode, and the MEMS superstructure comprising at least one substantially planar membrane positioned parallel to the electrode.

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