Tunable power amplifier with wide frequency range
First Claim
1. A circuit comprising:
- an amplifier to amplify an input signal and generate an output signal; and
a tuning network to tune a frequency response of the amplifier, the tuning network comprising at least one tunable microelectromechanical system (MEMS) capacitor, the at least one tunable MEMS capacitor comprising a MEMS superstructure disposed over a control structure, the control structure being arranged to control the MEMS superstructure and tune a capacitance of the at least one tunable MEMS capacitor, the control structure comprising an electrode, and the MEMS superstructure comprising at least one substantially planar membrane positioned parallel to the electrode.
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Abstract
A circuit includes an amplifier configured to amplify an input signal and generate an output signal. The circuit also includes a tuning network configured to tune frequency response of the amplifier. The tuning network includes at least one tunable capacitor, where the at least one tunable capacitor includes at least one micro-electro mechanical system (MEMS) capacitor. The amplifier could include a first die, the at least one MEMS capacitor could include a second die, and the first die and the second die could be integrated in a single package. The at least one MEMS capacitor could include a MEMS superstructure disposed over a control structure, where the control structure is configured to control the MEMS superstructure and tune the capacitance of the at least one MEMS capacitor.
11 Citations
10 Claims
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1. A circuit comprising:
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an amplifier to amplify an input signal and generate an output signal; and a tuning network to tune a frequency response of the amplifier, the tuning network comprising at least one tunable microelectromechanical system (MEMS) capacitor, the at least one tunable MEMS capacitor comprising a MEMS superstructure disposed over a control structure, the control structure being arranged to control the MEMS superstructure and tune a capacitance of the at least one tunable MEMS capacitor, the control structure comprising an electrode, and the MEMS superstructure comprising at least one substantially planar membrane positioned parallel to the electrode. - View Dependent Claims (2, 3, 4)
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5. A method comprising:
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amplifying an input signal and generating an output signal using an amplifier; and tuning a frequency response of the amplifier using a tuning network coupled to the amplifier, the tuning network comprising at least one tunable microelectromechanical system (MEMS) capacitor, the at least one tunable MEMS capacitor comprising a MEMS superstructure disposed over a control structure that controls the MEMS superstructure and tunes a capacitance of the at least one tunable MEMS capacitor, the control structure comprising an electrode, and the MEMS superstructure comprising at least one substantially planar membrane positioned parallel to the electrode. - View Dependent Claims (6, 7, 8)
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9. A system comprising:
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an amplifier comprising first, second, third and fourth power amplifiers; and a tuning network comprising;
first, second, third and fourth inductors coupled to the first, second, third and fourth power amplifiers, respectively; and
first, second and third tunable capacitors each comprising a respective micro-electro mechanical system (MEMS) capacitor in a package with the amplifier, the first tunable capacitor being coupled to the first and second inductors, the second tunable capacitor being coupled to the third and fourth inductors, and the third tunable capacitor being coupled between the first and second tunable capacitors. - View Dependent Claims (10)
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Specification