Deposition mask assembly and method of manufacturing display device using the same

• US 10,128,440 B2
• Filed: 06/07/2016
• Issued: 11/13/2018
• Est. Priority Date: 11/02/2015
• Status: Expired due to Fees

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Lee, Su Hwan, Kim, Eun Ho
• Primary Examiner(s): Graybill, David E
• Application Number:
  US15/175,282
• Publication Number:
  US 20170125680A1
• Time in Patent Office: 889 Days
• Field of Search: None
• CPC Class Codes: C23C 14/00 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 50/84 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/191 characterised by provisions for the orientation or alignment of the layer to be deposited

Abstract

A deposition mask assembly includes a frame including a first opening portion and a second opening portion spaced apart from each other in a first direction, a first split mask group including a plurality of first split masks arranged on the first opening portion in a second direction crossing the first direction, and a second split mask group including a plurality of second split masks arranged on the second opening portion in the second direction, wherein a boundary between adjacent first split masks in the second direction and a boundary between adjacent second split masks in the second direction are at different positions.

Claims

1. A deposition mask assembly, comprising:

a frame including a first opening portion and a second opening portion spaced apart from each other in a first direction;

a first split mask group including a plurality of first split masks arranged on the first opening portion in a second direction crossing the first direction, the plurality of first split masks being a plurality of physically separated masks; and

a second split mask group including a plurality of second split masks arranged on the second opening portion in the second direction, the plurality of second split masks being a plurality of physically separated masks,

wherein a boundary between adjacent first split masks in the second direction and a boundary between adjacent second split masks in the second direction are at different positions,

wherein each of the first split masks includes welded portions at opposite edges thereof in the first direction, and

wherein each of the second split masks includes welded portions at opposite edges thereof in the first direction.

2. The deposition mask assembly as claimed in claim 1, wherein outermost edges of the first split masks disposed at outermost sides of the first split mask group and outermost edges of the second split masks disposed at outermost sides of the second split mask group are at same positions in the second direction.

3. The deposition mask assembly as claimed in claim 1, wherein a first split mask of the plurality of first split masks at an outermost side of the first split mask group, and a second split mask of the plurality of second split masks at an outermost side of the second split mask group have different widths from each other in the second direction, and face each other in the first direction.

4. The deposition mask assembly as claimed in claim 3, wherein:

the first split mask of the plurality of first split masks at the outermost side of the first split mask group is an edge mask and has a first width in the second direction,

each of the first split masks of the plurality of first split masks, other than the edge mask, has a second width larger than the first width in the second direction, and

each of the second split masks of the second split mask group has a third width equal to the second width.

5. The deposition mask assembly as claimed in claim 3, wherein:

the first split mask at the outermost side of the first split mask group and a second split mask at an opposite outermost side of the second split mask group have a first width in the second direction,

each of the plurality of first split masks, other than the first split mask at the outermost side of the first split mask group, has a second width larger than the first width in the second direction, and

each of the plurality of the second split masks, other than the second split mask at the opposite outermost side of the second split mask group, has the second width in the second direction.

6. The deposition mask assembly as claimed in claim 1, wherein:

the frame includes a reinforcing support defining the first opening portion and the second opening portion, the reinforcing support extending in the second direction, and

the welded portions of the first split masks and the welded portions of the second split masks face each other on the reinforcing support.

7. The deposition mask assembly as claimed in claim 1, wherein the adjacent first split masks at the boundary cover the entire first opening portion, and the adjacent second split masks at the boundary cover the entire second opening portion.

8. The deposition mask assembly as claimed in claim 7, wherein a combined width of the plurality of first split masks in the second direction is equal to a combined width of the plurality of second split masks in the second direction.

9. The deposition mask assembly as claimed in claim 1, wherein:

the welded portion of an outermost first split mask of the first split mask group is partially aligned with the welded portion of an outermost second split mask of the second split mask group in the first direction, the outermost first split mask and the outermost second split mask being outermost in the respective first split mask group and second split mask group in the second direction.