Method for manufacturing an OLED backplate and method for manufacturing an OLED panel

  • US 10,153,333 B1
  • Filed: 08/18/2017
  • Issued: 12/11/2018
  • Est. Priority Date: 07/24/2017
  • Status: Active Grant
First Claim
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1. A method for manufacturing an OLED backplate, comprising the following steps of:

  • step S1;

    providing a TFT substrate, forming an electrode layer onto the TFT substrate by a depositing process and a patterning process, coating a layer of organic photoresist material onto the electrode layer and the TFT substrate, and exposing, developing and baking the layer of organic photoresist material to form a pixel defined layer, wherein the pixel defined layer has a pixel opening above the electrode layer, the pixel defined layer has side surfaces and a top surface, at this point, the side surfaces of the pixel defined layer have a hydrophilic property, the top surface of the pixel defined layer has a hydrophobic property, and a top surface of the electrode layer has photoresist residues thereon;

    step S2;

    coating a layer of general photoresist material onto the pixel defined layer, patterning the layer of general photoresist material by a photolithography process, and forming a protective photoresist layer onto the pixel defined layer to protect the top surface of the pixel defined layer, wherein the protective photoresist layer has a through opening above the pixel opening of the pixel defined layer, and the through opening fully exposes the corresponding pixel opening;

    step S3;

    applying an oxygen plasma onto an entire surface of the TFT substrate, and treating the electrode layer by the oxygen plasma to remove the photoresist residues thereon, wherein the top surface of the pixel defined layer covered by the protective photoresist layer is not affected by the oxygen plasma in the treating process, and the top surface of the pixel defined layer still has the hydrophobic property; and

    step S4;

    removing the protective photoresist layer on the pixel defined layer to obtain the OLED backplate.

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