Micro-vacancy center device

• US 10,168,393 B2
• Filed: 09/25/2015
• Issued: 01/01/2019
• Est. Priority Date: 09/25/2014
• Status: Active Grant

• Current Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Original Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Inventors: Stetson, Jr., John B., Hiltabidle, Michael J., Kaup, Peter G., Manickam, Arul, Simon, Sarah
• Primary Examiner(s): Hollington, Jermele M
• Assistant Examiner(s): Nasir, Taqi
• Application Number:
  US14/866,730
• Publication Number:
  US 20160146904A1
• Time in Patent Office: 1,194 Days
• Field of Search: 324 66- 67, 324160-180, 324 711-157, 324425-470, 324200-263, 32475001-76401, 702 1-199, 73 37- 6509
• CPC Class Codes: G01R 33/0052 Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips devices based on galvano-magnetic effect or the like H10N50/85
• CPC Class Codes: G01R 33/032 using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
• CPC Class Codes: G01R 33/323 Detection of MR without the use of RF or microwaves, e.g. force-detected MR, thermally detected MR, MR detection via electrical conductivity, optically detected MR
• CPC Class Codes: G01R 33/64 using cyclotron resonance G01R33/24 takes precedence
• CPC Class Codes: G01R 35/005 Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references G01R33/0035, G01R35/002 take precedence

Abstract

A method for providing a miniature vector magnetometer includes embedding a micron-sized diamond nitrogen-vacancy (DNV) crystal into a bonding material. The bonding material including the embedded micron-sized DNV crystal is cured to form a micro-DNV sensor. A micro-DNV assembly is formed by integrating the micro-DNV sensor with a micro-radio-frequency (RF) source, a micron-sized light source, a reference bias magnet, and one or more micro-photo detectors. The micro-DNV assembly is operable to perform vector magnetometry when positioned in an external magnetic field.

Claims

1. A vector magnetometer apparatus, the apparatus comprising:

a micron-sized vacancy center diamond nitrogen-vacancy (micro-DNV) sensor positioned in a first layer of a multi-layer structure;

a micro-radio-frequency (RF) source configured to generate RF pulses to stimulate nitrogen-vacancy centers in the micro-vacancy center sensor;

a micron-sized light source positioned at a second layer of the multi-layer structure;

a fixed bias magnet; and

one or more micro-photo detectors configured to detect fluorescence radiation emitted by stimulated nitrogen-vacancy centers and positioned in the first layer of the multi-layer structure,

wherein the micro-vacancy center sensor comprises a micron-sized vacancy center crystal embedded in a cured bonding material, and wherein the micro-vacancy center assembly is operable to perform vector magnetometry when positioned in an external magnetic field.

2. The apparatus of claim 1, wherein the micro-vacancy center sensor is affixed to a silicon chip.

3. The apparatus of claim 1, wherein the micro-RF source is configured to generate RF pulses to stimulate nitrogen-vacancy centers in the micro-vacancy center sensor, wherein the micro-RF source comprises one of a strip-line resonator, a split ring, or a straight rod dipole, wherein the micro-RF source is formed on a chip to surround the micro-vacancy center sensor.

4. The apparatus of claim 1, wherein the micro-RF source is configured to generate RF pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and to enable measuring AC varying magnetic fields.

5. The apparatus of claim 1, wherein micron-sized light source comprises a green micron-sized light-emitting diode (LED), wherein the green micron-sized LED is formed on a chip, wherein each of the one or more micro-photo detectors comprises a red micro-photo detector, and wherein the one or more red micro-photo detectors are formed on the chip.

6. The apparatus of claim 5, wherein at least one of the one or more micro-photo detectors is configured to measure green excitation light generated by the green micron-sized LED.

7. The apparatus of claim 5, wherein the green micron-sized LED is configured to generate green light pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and enable measuring AC varying magnetic fields.

8. The apparatus of claim 1, wherein at least one of the one or more micro-photo detectors further comprises a red filter configured to filter out green light.

9. The apparatus of claim 1, wherein at least one of the one or more micro-photo detectors further comprises a micro-lens.

10. The apparatus of claim 1, wherein the micro-vacancy center assembly is operable to measure the external magnetic field with a sensitivity of better than one micro-Tesla.

11. The apparatus of claim 1, wherein the micro-vacancy center assembly comprises a multilayer structure formed by integrating a plurality of layers, wherein each layer includes at least one of the micro-RE source, the micron-sized light source, a fixed bias magnet, or the one or more micro-photo detectors.

12. The apparatus of claim 1, wherein micron-sized vacancy center sensor is a micron-sized diamond nitrogen-vacancy (micro-DNV) sensor.

13. A vector magnetometer apparatus, the apparatus comprising:

a micro-sized vacancy center sensor;

a micro-radio-frequency (RF) source configured to generate RF pulses to stimulate vacancy centers in the micro-sized vacancy center sensor;

a micro-sized light source;

a fixed bias magnet; and

one or more micro-photo detectors configured to detect fluorescence radiation emitted by stimulated vacancy centers,

wherein the micro-sized vacancy center sensor comprises a micro-sized vacancy center material embedded in a cured bonding material, and wherein the micro-sized vacancy center assembly is operable to perform vector magnetometry when positioned in an external magnetic field;

wherein micro-sized light source comprises a green micro-sized light-emitting diode (LED), wherein the green micro-sized LED is formed on a chip, wherein each of the one or more micro-photo detectors comprises a red micro-photo detector, and wherein the one or more red micro-photo detectors are formed on the chip.

14. The apparatus of claim 13, wherein at least one of the one or more micro-photo detectors is configured to measure green excitation light generated by the green micro-sized LED.

15. The apparatus of claim 13, wherein the green micro-sized LED is configured to generate green light pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and enable measuring AC varying magnetic fields.

16. A vector magnetometer apparatus, the apparatus comprising:

a micro-sized vacancy center sensor;

a micro-radio-frequency (RF) source configured to generate RF pulses to stimulate vacancy centers in the micro-sized vacancy center sensor;

a micro-sized light source;

a fixed bias magnet; and

one or more micro-photo detectors configured to detect fluorescence radiation emitted by stimulated vacancy centers,

wherein the micro-sized vacancy center sensor comprises a micro-sized vacancy center material embedded in a cured bonding material, and wherein the micro-sized vacancy center assembly is operable to perform vector magnetometry when positioned in an external magnetic field;

wherein micro-sized light source comprises a micro-sized light-emitting diode (LED), wherein the micro-sized LED is formed on a chip, wherein each of the one or more micro-photo detectors comprises a micro-photo detector, and wherein the one or more micro-photo detectors are formed on the chip;

wherein the micro-sized LED is configured to generate light pulse sequences by using Ramsey, Hahn echo or Barry timing sequences to attain higher sensitivity and enable measuring AC varying magnetic fields.