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Methods of fabricating contacts for cylindrical devices

  • US 10,192,787 B1
  • Filed: 01/08/2018
  • Issued: 01/29/2019
  • Est. Priority Date: 01/08/2018
  • Status: Active Grant
First Claim
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1. A method of forming a contact, comprising:

  • at an annular device composed of a core and a plurality of layers that surround the core in succession, the plurality of layers including a first layer and a second layer, wherein the core and the second layer are separated by the first layer;

    depositing a coating on a surface of the annular device, the surface including the core and the plurality of layers;

    determining relative heights of the core, the first layer, and the second layer;

    in accordance with a determination that the second layer has the largest relative height;

    performing a first removal of the coating to expose the second layer;

    depositing a first metal on the second layer;

    performing a second removal of the coating to expose the core; and

    depositing a second metal on the core;

    in accordance with a determination that the core has the largest relative height;

    etching a portion of the coating to expose the core; and

    forming a first terminal by depositing a conductive material, wherein the conductive material contacts the exposed core and the first input terminal extends radially outward from the annular device.

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