Single channel scanning acoustic microscope with multiple focused ultrasonic transducers

• US 10,228,354 B2
• Filed: 10/28/2013
• Issued: 03/12/2019
• Est. Priority Date: 10/26/2012
• Status: Active Grant

• Current Assignee: Nordson Corporation
• Original Assignee: Nordson Corporation
• Inventors: Komsky, Igor N., Kessler, Lawrence W.
• Primary Examiner(s): Caputo, Lisa M
• Assistant Examiner(s): Miller, Rose M
• Application Number:
  US14/065,105
• Publication Number:
  US 20140116143A1
• Time in Patent Office: 1,961 Days
• Field of Search: 73606, 73607, 73602, 73625, 73626, 73628, 73618
• CPC Class Codes: G01N 29/0681 by acoustic microscopy, e.g. scanning acoustic microscopy
• CPC Class Codes: G01N 29/262 by electronic orientation or focusing, e.g. with phased arrays phased arrays per se G10K11/34
• CPC Class Codes: G01N 29/28 providing acoustic coupling , e.g. water impedance matching G10K11/02
• CPC Class Codes: G01N 29/34 Generating the ultrasonic, sonic or infrasonic waves , e.g. electronic circuits specially adapted therefor
• CPC Class Codes: G01N 29/341 with time characteristics
• CPC Class Codes: G01N 29/343 pulse waves, e.g. particular sequence of pulses, bursts

Abstract

A single channel scanning acoustic microscope that increases the throughput of the acoustic imaging system by connecting a multi-transducer assembly in parallel to a single channel electronic circuit. The single channel scanning acoustic microscope includes multiple transducers configured to generate a time delay for individual ultrasonic waves generated by each transducer, wherein a pulse generator simultaneously sends a pulse signal to the multi-transducer assembly.

Claims

1. A scanning acoustic microscope for scanning a part under inspection, the scanning acoustic microscope comprising:

a single channel electronic circuit configuration comprising a pulse generator, an amplifier, and a digital format converter; and

a plurality of transducers, wherein each transducer comprises an acoustic rod body, at least one piezoelectric crystal, and at least one lens, wherein each transducer is configured to generate an ultrasonic wave,

wherein said ultrasonic wave generated by each transducer has a different time delay relative to ultrasonic waves generated by other transducers prior to reaching the part under inspection,

wherein each transducer is connected to said single channel electronic circuit configuration, and

wherein each transducer is continuously electrically coupled to the digital format converter.

2. The scanning acoustic microscope of claim 1, wherein:

a fluid at least covers the distance between said plurality of transducers and said part under inspection,

the fluid located between each transducer and said part under inspection generates an individual fluid path for each transducer, and

said individual fluid path for each transducer results in an acoustic signal delay for each ultrasonic wave.

3. The scanning acoustic microscope of claim 2, wherein said acoustic signal delay is generated based on different lengths for each individual fluid path.

4. The scanning acoustic microscope of claim 3, wherein the ultrasonic wave generated by each transducer travels onto the part under inspection.

5. The scanning acoustic microscope of claim 1, wherein:

a fluid at least covers the distance between said plurality of transducers and said part under inspection,

the fluid located between said plurality of transducers and said part under inspection generates an individual fluid path, and

said acoustic rod body comprises a rod length, wherein the rod length for each transducer results in an acoustic signal delay for the ultrasonic wave.

6. The scanning acoustic microscope of claim 5, wherein the rod length for each transducer is different.

7. The scanning acoustic microscope of claim 5, wherein each ultrasonic wave travels onto the part under inspection.

8. The scanning acoustic microscope of claim 1, wherein said at least one piezoelectric crystal is directly attached to a first end of the acoustic rod body and said lens is connected to a second end of the acoustic rod body.

9. The scanning acoustic microscope of claim 1, wherein the time delay is introduced using an electronic signal delay applied to at least one of the transducers.

10. The scanning acoustic microscope of claim 1, wherein the single channel electronic circuit configuration further comprises a visual display.

11. The scanning acoustic microscope of claim 1, wherein transducers in a first group of transducers selected from the plurality of transducers are each positioned at different distances from a top side of the part under inspection resulting in the time delay for each transducer.

12. The scanning acoustic microscope of claim 1, wherein signal delays for the ultrasonic waves generated by the plurality of transducers are based on different acoustic rod lengths for each of the plurality of transducers.

13. The scanning acoustic microscope of claim 1, wherein signal delays for the ultrasonic waves generated by the plurality of transducers are based on different lengths of individual fluid paths between said plurality of transducers and said part under inspection.

14. The scanning acoustic microscope of claim 1, wherein each of the plurality of transducers generates the ultrasonic wave and receives a reflection of the ultrasonic wave off the part under inspection.

18. The scanning acoustic microscope of claim 14, wherein the acoustic rods have different lengths.

15. A scanning acoustic microscope, comprising:

a plurality of transducers, wherein two or more of the transducers each emits a focused ultrasonic beam towards a part under inspection,

wherein each of the plurality of transducers comprises an acoustic rod, at least one lens at a second end of each transducer, and a piezoelectric crystal directly attached to the acoustic rod,

wherein a first end of each transducer is connected to a single channel electronic circuit, and

wherein a reflection of said ultrasonic beam that travels into the part under inspection from each transducer is received by the same transducer with a time delay, and a signal based on the received reflection of said ultrasonic beam is transmitted to the single channel electronic circuit.

16. The scanning acoustic microscope of claim 15, wherein the time delay is an acoustic time delay.

17. The scanning acoustic microscope of claim 16, wherein the plurality of transducers are each positioned at different distances from a top side of the part under inspection resulting in the acoustic time delay.

19. The scanning acoustic microscope of claim 15, wherein the time delay is introduced using an electronic signal delay.

20. The scanning acoustic microscope of claim 15, wherein said two or more transducers are positioned around the part under inspection to concurrently image said part under inspection.

21. The scanning acoustic microscope of claim 20, wherein the time delays result from spacing each transducer at different axial distances from the part to be inspected.

22. The scanning acoustic microscope of claim 20, wherein the time delays result from different lengths of the acoustic rods.

23. The scanning acoustic microscope of claim 15, wherein the time delays for the focused ultrasonic beam generated by the plurality of transducers are based on different lengths of individual fluid paths between said plurality of transducers and said part under inspection.

24. A scanning acoustic microscope, comprising:

a plurality of transducers including at least one transmitting transducer and at least one receiving transducer, the at least one transmitting transducer emitting a focused ultrasonic beam towards a part under inspection,

wherein each of the plurality of transducers comprises an acoustic rod, at least one lens at a second end of each transducer, and a piezoelectric crystal directly attached to the acoustic rod,

wherein a first end of each transducer is connected to a single channel electronic circuit,

wherein the focused ultrasonic beam is emitted from the transmitting transducer, travels into the part under inspection, and is received by the receiving transducer with a time delay, and

wherein a signal based on the received transmission of said ultrasonic beam through the part under inspection is transmitted to the single channel electronic circuit.

25. The scanning acoustic microscope of claim 24, wherein:

a fluid at least covers the distance between said plurality of transducers and said part under inspection,

the fluid located between each transducer and said part under inspection generates an individual fluid path for each transducer, and

said individual fluid path for each transducer results in an acoustic signal delay for each ultrasonic wave.

26. The scanning acoustic microscope of claim 25, wherein said acoustic signal delay is generated based on different lengths for each individual fluid path.

27. The scanning acoustic microscope of claim 24, wherein:

a fluid at least covers the distance between said plurality of transducers and said part under inspection,

the fluid located between said plurality of transducers and said part under inspection generates an individual fluid path, and

said acoustic rod comprises a rod length, wherein the rod length for each transducer results in an acoustic signal delay for the focused ultrasonic beam.

28. The scanning acoustic microscope of claim 27, wherein the rod length for each transducer is different.

29. The scanning acoustic microscope of claim 24, wherein the at least one transmitting transducer is positioned on a top side of the part under inspection, and the at least one receiving transducer is positioned on a bottom side of the part under inspection.

30. The scanning acoustic microscope of claim 24, wherein time delays for the focused ultrasonic beam generated by the plurality of transducers are based on different acoustic rod lengths for each of the plurality of transducers.

31. The scanning acoustic microscope of claim 24, wherein time delays for the focused ultrasonic beam generated by the plurality of transducers are based on different electronic signal delays applied to the plurality of transducers.

32. The scanning acoustic microscope of claim 24, wherein time delays for the focused ultrasonic beam generated by the plurality of transducers are based on different lengths of individual fluid paths between said plurality of transducers and said part under inspection.