Plating apparatus, substrate holder, plating apparatus controlling method, and storage medium configured to store program for instructing computer to implement plating apparatus controlling method
First Claim
1. A plating apparatus for plating a substrate by using a substrate holder including an elastic projection that seals a to-be-plated surface of the substrate, the plating apparatus comprising:
- a measurement device configured to measure a deformed state of the elastic projection by measuring at least either one of a compression amount of the elastic projection and load applied to the elastic projection at a time when the substrate physically contacts the elastic projection of the substrate holder; and
a controlling device configured to make a judgment on the basis of the measured deformed state as to whether sealing by the elastic projection is normal.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided is a plating apparatus for plating a substrate by using a substrate holder including an elastic projection that seals a to-be-plated surface of the substrate, the plating apparatus comprising a measurement device configured to measure a deformed state of the elastic projection by measuring at least either one of a compression amount of the elastic projection and load applied to the elastic projection at a time when the substrate physically contacts the elastic projection of the substrate holder; and a controlling device configured to make a judgment on the basis of the measured deformed state as to whether sealing by the elastic projection is normal.
4 Citations
21 Claims
-
1. A plating apparatus for plating a substrate by using a substrate holder including an elastic projection that seals a to-be-plated surface of the substrate, the plating apparatus comprising:
-
a measurement device configured to measure a deformed state of the elastic projection by measuring at least either one of a compression amount of the elastic projection and load applied to the elastic projection at a time when the substrate physically contacts the elastic projection of the substrate holder; and a controlling device configured to make a judgment on the basis of the measured deformed state as to whether sealing by the elastic projection is normal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
-
-
20. A method for controlling a plating apparatus configured to plate a substrate by using a substrate holder including an elastic projection that seals a to-be-plated surface of the substrate, wherein
a deformed state of the elastic projection is measured by measuring at least either one of a compression amount of the elastic projection and load applied to the elastic projection at a time when the substrate physically contacts the elastic projection of the substrate holder; -
a judgment is made on the basis of the measured deformed state as to whether sealing by the elastic projection is normal; and plating processing is performed with respect to the substrate that is held by the substrate holder in which the sealing by the elastic projection is judged as normal.
-
-
21. A storage device configured to store a program for instructing a computer to implement a method for controlling a plating apparatus that performs plating processing with respect to a substrate by using a substrate holder including an elastic projection that seals a to-be-plated surface of the substrate, wherein the storage device stores a program for instructing the computer to measure the deformed state of the elastic projection by measuring at least either one of a compression amount of the elastic projection and load applied to the elastic projection at the time when the substrate physically contacts the elastic projection of the substrate holder;
- make a judgment as to whether sealing by the elastic projection is normal or abnormal on the basis of the measured deformed state; and
perform the plating processing with respect to the substrate that is held by the substrate holder in which the sealing by the elastic projection is judged as normal.
- make a judgment as to whether sealing by the elastic projection is normal or abnormal on the basis of the measured deformed state; and
Specification