Semiconductor micro-analysis chip and method of manufacturing the same
First Claim
1. A semiconductor micro-analysis chip for detecting particles in a sample liquid, the chip comprising:
- a semiconductor substrate;
a first flow channel which has walls, a top surface, and a bottom surface, and which is provided on the semiconductor substrate, and through which the sample liquid or an electrolyte solution passes, a first outlet of the sample liquid or the electrolyte solution being provided at one end side of the first flow channel, and a first inlet of the sample liquid or the electrolyte solution being provided at the other end side of the first flow channel;
a second flow channel which has walls, a top surface, and a bottom surface, and which is provided at a different position from the first flow channel of the semiconductor substrate, and through which the sample liquid or the electrolyte solution passes, a second outlet of the sample liquid or the electrolyte solution being provided at one end side of the second flow channel, and a second inlet of the sample liquid or the electrolyte solution being provided at the other end side of the second flow channel, wherein a portion of the second flow channel intersecting with a portion of the first flow channel overlaps the portion of the first flow channel such that an entirety of the portion of the first flow channel passes underneath the portion of the second flow channel, the portion of the second flow channel being in contact with the portion of the first flow channel with a partition interposed therebetween, and at least a portion of the partition being the top surface of the first flow channel and the bottom surface of the second flow channel;
a fine hole which is provided in the partition and through which the particles pass;
a first electrode exposed at least in part in the first flow channel; and
a second electrode exposed at least in part in the second flow channel,wherein the first electrode and the second electrode face each other across the fine hole.
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Accused Products
Abstract
One of embodiments is a semiconductor micro-analysis chip for detecting particles in a sample liquid. The chip comprises a semiconductor substrate, a first flow channel provided on the semiconductor substrate to allow the sample liquid to flow therein, a second flow channel provided at a different position from the first flow channel of the semiconductor substrate to allow the sample liquid or an electrolyte solution to flow therein, a contact portion where a portion of the first flow channel and a portion of the second flow channel abut each other or intersect one another with a partition being arranged between the flow channels, and a fine hole provided on the partition of the contact portion to allow the particles to pass therethrough.
54 Citations
17 Claims
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1. A semiconductor micro-analysis chip for detecting particles in a sample liquid, the chip comprising:
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a semiconductor substrate; a first flow channel which has walls, a top surface, and a bottom surface, and which is provided on the semiconductor substrate, and through which the sample liquid or an electrolyte solution passes, a first outlet of the sample liquid or the electrolyte solution being provided at one end side of the first flow channel, and a first inlet of the sample liquid or the electrolyte solution being provided at the other end side of the first flow channel; a second flow channel which has walls, a top surface, and a bottom surface, and which is provided at a different position from the first flow channel of the semiconductor substrate, and through which the sample liquid or the electrolyte solution passes, a second outlet of the sample liquid or the electrolyte solution being provided at one end side of the second flow channel, and a second inlet of the sample liquid or the electrolyte solution being provided at the other end side of the second flow channel, wherein a portion of the second flow channel intersecting with a portion of the first flow channel overlaps the portion of the first flow channel such that an entirety of the portion of the first flow channel passes underneath the portion of the second flow channel, the portion of the second flow channel being in contact with the portion of the first flow channel with a partition interposed therebetween, and at least a portion of the partition being the top surface of the first flow channel and the bottom surface of the second flow channel; a fine hole which is provided in the partition and through which the particles pass; a first electrode exposed at least in part in the first flow channel; and a second electrode exposed at least in part in the second flow channel, wherein the first electrode and the second electrode face each other across the fine hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification