Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures

• US 10,297,421 B1
• Filed: 07/11/2016
• Issued: 05/21/2019
• Est. Priority Date: 05/07/2003
• Status: Active Grant

• Current Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Larsen, III, Rulon J., Cohen, Adam L.
• Primary Examiner(s): Rufo, Louis J
• Application Number:
  US15/206,782
• Time in Patent Office: 1,044 Days
• CPC Class Codes: C25D 1/003 3D structures, e.g. superposed patterned layers
• CPC Class Codes: C25D 1/20 Separation of the formed objects from the electrodes with no destruction of said electrodes
• CPC Class Codes: C25D 5/10 Electroplating with more than one layer of the same or of different metals for bearings C25D7/10
• CPC Class Codes: C25D 5/48 After-treatment of electroplated surfaces
• CPC Class Codes: C25D 7/123 Semiconductors first coated with a seed layer or a conductive layer
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/3244 Gas supply means

Abstract

Embodiments are directed to forming reentrant multi-layer micro-scale or millimeter scale three dimensional structures, parts, components, or devices where each layer is formed from a plurality of deposited materials and more specifically where each layer is formed from at least one metal structural material and at least one organic sacrificial material (e.g. polymer) that are co-planarized and a portion of the sacrificial material located on a plurality of layers is removed after formation of the plurality of layers via one or more plasma etching operations.

Claims

1. A batch method for forming a plurality of three-dimensional structures simultaneously, comprising:

(A) forming a plurality of successively formed multi-material layers, wherein each successive multi-material layer comprises at least two materials and is formed on and adhered to a previously formed multi-material layer, wherein one of the at least two materials is a structural material and the other of the at least two materials is a sacrificial material, and wherein each successive multi-material layer defines a successive cross-section of the plurality of three-dimensional structures, and wherein the forming of each of the plurality of successive multi-material layers comprises;

(i) depositing a first of the at least two materials;

(ii) depositing a second of the at least two materials;

(iii) planarizing the first and second materials to set a boundary level for the multi-material layer; and

wherein the forming of a given one of the plurality of successively formed multi-material layers comprises;

(i) applying a first patternable mold material (PMM), a portion of which forms a sacrificial material portion of the given multi-material layer;

(ii) patterning the first PMM to form a first pattern of sacrificial material of the given multi-material layer;

(iii) depositing a structural material in openings in the first pattern of sacrificial material to form another portion of the given multi-material layer;

(iv) planarizing the sacrificial material and the structural material to set a boundary level for the given multi-material layer; and

(B) after the forming of the plurality of successive multi-material layers, separating at least a portion of the sacrificial material from the structural material of multiple multi-material layers via plasma etching,

wherein after formation of a selected multi-material layer but prior to the completion of the formation of all multi-material layers, at least one intermediate release operation is performed to release at least selected regions of the sacrificial material from multiple multi-material layers including at least one reentrant region existing under the selected layer and formed by at least one region of structural material overlaying sacrificial material and thereafter depositing a second sacrificial material and thereafter forming at least one additional multi-material layer above the selected layer and the second sacrificial material.

2. The method of claim 1 wherein the PMM is a material selected from the group consisting of:

(1) a polymer, (2) a photoresist, (3) a dielectric, and (4) a conductive epoxy.

3. The method of claim 1 wherein the PMM is coated, at least in part, with a conductive material prior to depositing the structural material for the given one of the plurality of multi-material layers.

4. The method of claim 3 wherein the conductive material provided in preparation for depositing the structural material comprises a material selected from the group consisting of:

a seed layer, an adhesion layer, and both an adhesion layer and a seed layer.

5. The method of claim 3 wherein the conductive material provided in preparation for depositing the structural material comprises an adhesion layer.

6. The method of claim 1 wherein the second sacrificial material does not fill all reentrant features where the first sacrificial material was removed.

7. The method of claim 6 wherein the second sacrificial material is easier to remove than the first sacrificial material by the plasma etching.

8. The method of claim 6 wherein the structural material of the selected layer provides a feature selected from the group consisting of:

(1) a reentrant feature with an R-factor greater than 5, (2) a reentrant feature with an R-factor greater than 10, (3) a reentrant feature with an R-factor greater than 20, and (4) a reentrant feature with an R-factor greater than 50.

9. The method of claim 6 wherein a multi-material layer above the selected layer contains structural material that provides a feature selected from the group consisting of:

(1) a reentrant feature with an R-factor greater than 5, (2) a reentrant feature with an R-factor greater than 10, (3) a reentrant feature with an R-factor greater than 20, and (4) a reentrant feature with an R-factor greater than 50.

10. The method of claim 1 wherein the structure includes at least one reentrant feature having an R-factor selected from the group consisting of:

(1) greater than 5, (2) greater than 10, (3) greater than 20, and (4) greater than 50.

11. The method of claim 1 wherein the plasma etching occurs in a sub-atmospheric pressure chamber.

12. The method of claim 1 wherein at least one additional cleaning step is performed after the plasma etching.

13. The method of claim 1 wherein the structural material comprises at least one metal.

14. The method of claim 13 wherein the structural material is selected from the group consisting of:

(1) at least two different metals, (2) at least two different metals deposited on two different multi-material layers, and (3) at least two different metals deposited as part of the same multi-material layer.

15. The method of claim 1 wherein the sacrificial material on at least a portion of the plurality of multi-material layers comprises SU-8.

16. The method of claim 1 wherein the formation of a particular multi-material layer includes formation of a seed layer selected from the group consisting of:

(1) formation of a non-planar seed layer when structural material forming part of the particular multi-material layer overlays material other than metal structural material on an immediately preceding multi-material layer and (2) formation of a planar seed layer when structural material forming part of the particular multi-material layer overlays material other than metal structural material on an immediately preceding multi-material layer.

17. The method of claim 1 wherein plasma etching comprises at least two etching operations which are separated by at least one non-plasma etching operation.

18. The method of claim 1 wherein the removing comprises a non-plasma etching operation as well as the plasma etching.

19. The method of claim 1 wherein at least one of the depositing steps comprises electroplating.

20. The method of claim 1 wherein the given multi-material layer comprises a plurality of multi-material layers selected from the group consisting of:

(1) at least two multi-material layers;

(2) at least three multi-material layers;

(3) a plurality of multi-material layers but less than all multi-material layers, (4) at least one half of the multi-material layers, (5) at least two thirds of the multi-material layers; and

(6) all of the multi-material layers.

21. The method of claim 1 wherein the structures are selected from the group consisting of:

(1) horizontally or vertically complex multilayer three-dimensional structures, (2) horizontally or vertically moderately complex multilayer three-dimensional structures, and (3) horizontally or vertically highly complex multilayer three-dimensional structures.

23. The method of claim 1 wherein at least one multi-material layer comprises at least two different structural materials.

22. A method for the batch formation of a plurality of multi-layer structures, comprising:

successively forming a plurality of multi-material layers, wherein each successive multi-material layer is formed on and adhered to a preceding multi-material layer, and wherein each of the plurality of multi-material layers comprises both a structural material and a sacrificial material; and

after forming the plurality of adhered multi-material layers, removing the sacrificial material from the plurality of multi-material layers to leave a plurality of multi-layer structures comprising the structural material, wherein the plurality of multi-layer structures each comprise at least one reentrant feature formed from structural material overlaying sacrificial material,

wherein the sacrificial material comprises an organic material that is removed at least in part by plasma etching, and

wherein after formation of a selected multi-material layer but prior to the completion of the formation of all multi-material layers, at least one intermediate release operation is performed to release at least selected regions of the sacrificial material from multiple multi-material layers including at least one reentrant region existing under the selected layer and formed by at least one region of structural material overlaying sacrificial material and thereafter depositing a second sacrificial material and thereafter forming at least one additional multi-material layer above the selected layer and the second sacrificial material.

24. The method of claim 22 wherein at least one multi-material layer comprises at least two different structural materials.