Coil actuated pressure sensor

• US 10,310,028 B2
• Filed: 05/26/2017
• Issued: 06/04/2019
• Est. Priority Date: 05/26/2017
• Status: Active Grant

• Current Assignee: Commissariat a L'Energie Atomique (AES Corporation), Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Original Assignee: Commissariat a L'Energie Atomique (AES Corporation), Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Inventors: Latham, Alexander, Doogue, Michael C., Fermon, Claude, Du Hamel De Milly, Xavier, Pannetier-Lecoeur, Myriam
• Primary Examiner(s): Nguyen, Tung X
• Assistant Examiner(s): Hawkins, Dominic E
• Application Number:
  US15/606,362
• Publication Number:
  US 20180340990A1
• Time in Patent Office: 739 Days
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 9/007 using variations in inductance
• CPC Class Codes: G01R 33/0005 Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types G01R33/0206 takes precedence
• CPC Class Codes: G01R 33/0017 Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields
• CPC Class Codes: G01R 33/0035 Calibration of single magnetic sensors, e.g. integrated calibration
• CPC Class Codes: G01R 33/072 Constructional adaptation of the sensor to specific applications
• CPC Class Codes: G01R 33/091 Constructional adaptation of the sensor to specific applications
• CPC Class Codes: G01R 33/096 anisotropic magnetoresistance sensors
• CPC Class Codes: G01R 33/098 comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
• CPC Class Codes: G01R 33/305 specially adapted for high-pressure applications

Abstract

A pressure sensor includes a chamber comprising a conductive portion and a deformable portion coupled to the conductive portion and susceptible to deformation in response to a pressure differential between an interior of the chamber and an exterior of the chamber; at least one coil responsive to an AC coil drive signal; at least one magnetic field sensing element disposed proximate to the at least one coil and to the conductive portion of the chamber and configured to generate a magnetic field signal in response to a reflected magnetic field generated by the at least one coil and reflected by the conductive portion; and a circuit coupled to the at least one magnetic field sensing element to generate an output signal of the pressure sensor indicative of the pressure differential between the interior of the chamber and the exterior of the chamber in response to the magnetic field signal.

Claims

1. A pressure sensor comprising:

a chamber comprising a conductive portion and a deformable portion coupled to the conductive portion and susceptible to deformation in response to a pressure differential between an interior of the chamber and an exterior of the chamber;

at least one coil responsive to an AC coil drive signal and configured to generate a magnetic field that induces eddy currents in the conductive portion of the chamber;

at least one magnetic field sensing element disposed proximate to the at least one coil and to the conductive portion of the chamber and configured to generate a magnetic field signal responsive to an amplitude of a reflected magnetic field generated by the eddy currents; and

a circuit coupled to the at least one magnetic field sensing element to receive the magnetic field signal and generate an output signal of the pressure sensor indicative of the pressure differential between the interior of the chamber and the exterior of the chamber in response to the magnetic field signal.

2. The pressure sensor of claim 1, wherein the chamber comprises an elongated tube.

3. The pressure sensor of claim 2, wherein the conductive portion and the deformable portion comprise a membrane disposed at a first end of the tube proximate to the at least one magnetic field sensing element.

4. The pressure sensor of claim 3, wherein the membrane is comprised of one or more of stainless steel, copper beryllium, titanium alloys and sapphire.

5. The magnetic field sensor of claim 1, wherein the at least one magnetic field sensing element comprises at least two spaced apart magnetic field sensing elements, wherein the circuit is configured to detect a difference between a first distance between the conductive portion and a first one of the magnetic field sensing elements and a second distance between the conductive portion and a second one of the magnetic field sensing elements in order to generate the output signal of the pressure sensor.

6. The pressure sensor of claim 5, wherein the first one of the magnetic field sensing elements is substantially aligned with an edge of the membrane and the second one of the magnetic field sensing elements is substantially aligned with a central region of the membrane.

7. The pressure sensor of claim 5 wherein the at least one magnetic field sensing element comprises a first magnetic field sensing element supported by a first substrate and a second magnetic field sensing element supported by a second substrate.

8. The pressure sensor of claim 2, wherein the deformable portion comprises a sidewall portion of the elongated tube configured to elongate in response to the pressure differential.

9. The pressure sensor of claim 7, wherein the conductive portion comprises an end of the elongated tube proximate to the at least one magnetic field sensing element.

10. The pressure sensor of claim 7, wherein the elongated tube comprises a first elongated tube and the pressure sensor further comprises a second elongated tube in which the first elongated tube is disposed.

11. The pressure sensor of claim 1 further comprising a substrate, wherein the substrate comprises a first substrate part, and the pressure sensor further comprises:

a second substrate having a first surface in which a recess is formed and a second, opposing surface; and

a conductive material disposed in the recess of the second substrate, wherein the first substrates part and the second substrate are attached, with the first surface of the second substrate adjacent to the first substrate part such that the chamber comprises the recess of the second substrate and the conductive portion comprises the conductive material.

12. The pressure sensor of claim 10 wherein the chamber is maintained at a predetermined reference pressure.

13. The pressure sensor of claim 10, wherein the recess is an etched recess.

14. The pressure sensor of claim 10, wherein the conductive material comprises copper or aluminum.

15. The pressure sensor of claim 1, wherein the at least one magnetic field sensing element comprises one or more of a Hall effect element, a giant magnetoresistance (MR) element, an anisotropic magnetoresistance element (AMR), a tunneling magnetoresistance (TMR) element, or a magnetic tunnel junction (MTJ).

16. The pressure sensor of claim 1, wherein the at least one magnetic field sensing element and/or the coil is supported by a substrate.

17. The pressure sensor of claim 14, wherein the substrate comprises a first substrate and the pressure sensor comprise a second substrate and wherein the at least one magnetic field sensing element is supported by the second substrate.

18. The pressure sensor of claim 1, where the chamber is divided into smaller parts, each of them experiencing a possible different pressure in order to do a mapping of the pressure.