Capacitive sensor

• US 10,337,849 B2
• Filed: 10/15/2015
• Issued: 07/02/2019
• Est. Priority Date: 10/22/2014
• Status: Active Grant

• Current Assignee: Bando Chemical Industries Limited
• Original Assignee: Bando Chemical Industries Limited
• Inventors: Otaka, Hideo, Yonezawa, Masaya, Bessho, Yusuke
• Primary Examiner(s): Gray, David M.
• Assistant Examiner(s): Do, Andrew V
• Application Number:
  US15/519,956
• Publication Number:
  US 20170350686A1
• Time in Patent Office: 1,356 Days
• CPC Class Codes: G01B 7/16 for measuring the deformation in a solid, e.g. by resistance strain gauge
• CPC Class Codes: G01D 5/2405 by varying dielectric
• CPC Class Codes: G01L 1/14 by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
• CPC Class Codes: G01L 1/146 for measuring force distributions, e.g. using force arrays G01L1/148 takes precedence
• CPC Class Codes: G01N 27/227 Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors G01N27/225 takes precedence
• CPC Class Codes: G01R 27/2617 Measuring dielectric properties, e.g. constants testing dielectric strength G01R31/12; detecting insulation faults G01R31/52; G01R27/2688 takes precedence
• CPC Class Codes: G06F 3/0445 using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
• CPC Class Codes: G06F 3/0446 using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
• CPC Class Codes: G06F 3/0447 Position sensing using the local deformation of sensor cells

Abstract

A capacitive sensor includes a sensor sheet having a central electrode layer and a measuring instrument. A first dielectric layer is laminated on the upper surface of the central electrode layer. A second dielectric layer is laminated on the lower surface of the central electrode layer. A first outer electrode layer is formed on the surface of the first dielectric layer. A second outer electrode layer is formed on the surface of the second dielectric layer. The central electrode layer and the first outer electrode layer face each other at a first detection portion. The central electrode layer and the second outer electrode layer face each other at a second detection portion. Capacitances of the detection portions change with deformation. The state of deformation of the sensor sheet is measured on the basis of the total capacitance by adding the capacitances of the first detection portion and the second detection portion.

Claims

1. A capacitive sensor comprising a sensor sheet and a measuring instrument,

the sensor sheet including:

a central electrode layer;

a first dielectric layer laminated on the upper surface of the central electrode layer;

a second dielectric layer laminated on the lower surface of the central electrode layer;

a first outer electrode layer formed on the surface of the first dielectric layer on the opposite side of the central electrode layer side; and

a second outer electrode layer formed on the surface of the second dielectric layer on the opposite side of the central electrode layer side,

in which the first dielectric layer and the second dielectric layer are formed from elastomers,

the part where the central electrode layer and the first outer electrode layer face each other is designated as a first detection portion, while the part where the central electrode layer and the second outer electrode layer face each other is designated as a second detection portion,

the sensor sheet is reversibly deformable, and the capacitances of the first detection portion and the second detection portion change with deformation, and

the measuring instrument being connected to the central electrode layer, the first outer electrode layer and the second outer electrode layer and measuring the capacitances of the first detection portion and the second detection portion,

wherein the first dielectric layer and the second dielectric layer are deformed in a surface direction; and

the state of deformation of the sensor sheet is measured on the basis of the total capacitance by adding the capacitance of the first detection portion and the capacitance of the second detection portion.

2. The capacitive sensor according to claim 1, wherein the central electrode layer, the first outer electrode layer and the second outer electrode layer are all formed from electroconductive compositions containing carbon nanotubes.

3. The capacitive sensor according to claim 1, wherein the sensor sheet further includes at least one of a first protective layer laminated on the first outer electrode layer on the opposite side of the first dielectric layer side, and a second protective layer laminated on the second outer electrode layer on the opposite side of the second dielectric layer side.

4. The capacitive sensor according to claim 1, wherein the measuring instrument includes a circuit capable of measuring capacitance using alternating current impedance.

5. The capacitive sensor according to claim 4, wherein the measuring instrument includes a CV conversion circuit, the central electrode layer is electrically connected to the CV conversion circuit side, and the first outer electrode layer and the second outer electrode layer are electrically connected to the alternating current signal generation side of the measuring instrument.

6. The capacitive sensor according to claim 4, wherein the measuring instrument includes a CF conversion circuit, the central electrode layer is electrically connected to the CF conversion circuit side, and the first outer electrode layer and the second outer electrode layer are grounded.