System and method for laser beveling and/or polishing
First Claim
1. A method for processing edges of a part, the method comprising:
- generating a laser beam from a laser system with parameters capable of providing sufficient absorption in the material to modify the material such that edge defects are reduced;
directing the laser beam at an edge of the part such that the laser beam is angled with an angle of incidence greater than 0° and
less than a critical angle; and
controlling a motion stage supporting the cut part to move the cut part with coordinated motion in multiple axes relative to the angled laser beam such that the angled laser beam bevels and/or polishes the edge of the part to reduce the edge defects, wherein the coordinate motion of the cut part changes the orientation of the angled laser beam relative to the cut part to change the cut angle at the edge of the part while the laser angle remains the same, wherein the cut angle of the laser beam is changed within a range of cut angles to form a rounded bevel on at least a portion of the edge of the part.
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Accused Products
Abstract
Laser processing of hard dielectric materials may include cutting a part from a hard dielectric material using a continuous wave laser operating in a quasi-continuous wave (QCW) mode to emit consecutive laser light pulses in a wavelength range of about 1060 nm to 1070 nm. Cutting using a QCW laser may be performed with a lower duty cycle (e.g., between about 1% and 15%) and in an inert gas atmosphere such as nitrogen, argon or helium. Laser processing of hard dielectric materials may further include post-cut processing the cut edges of the part cut from the dielectric material, for example, by beveling and/or polishing the edges to reduce edge defects. The post-cut processing may be performed using a laser beam with different laser parameters than the beam used for cutting, for example, by using a shorter wavelength (e.g., 193 nm excimer laser) and/or a shorter pulse width (e.g., picosecond laser).
41 Citations
14 Claims
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1. A method for processing edges of a part, the method comprising:
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generating a laser beam from a laser system with parameters capable of providing sufficient absorption in the material to modify the material such that edge defects are reduced; directing the laser beam at an edge of the part such that the laser beam is angled with an angle of incidence greater than 0° and
less than a critical angle; andcontrolling a motion stage supporting the cut part to move the cut part with coordinated motion in multiple axes relative to the angled laser beam such that the angled laser beam bevels and/or polishes the edge of the part to reduce the edge defects, wherein the coordinate motion of the cut part changes the orientation of the angled laser beam relative to the cut part to change the cut angle at the edge of the part while the laser angle remains the same, wherein the cut angle of the laser beam is changed within a range of cut angles to form a rounded bevel on at least a portion of the edge of the part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A laser processing system for processing edges of a part, the laser processing system comprising:
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a laser system for generating a laser beam and directing the laser beam such that the laser beam is angled with an angle of incidence greater than 0° and
less than a critical angle;at least one motion stage for supporting the part and moving the part in multiple axes relative to the angled laser beam; and a control system configured to control the motion stage with coordinated motion in the multiple axes relative to the angled laser beam such that the angled laser beam bevels and/or polishes edges of the part to reduce edge defects, wherein the control system is configured to move the motion stage such that the orientation of the angled laser beam changes relative to an edge of the part to change a cut angle at the edge of the part while the laser angle remains the same, wherein the cut angle of the laser beam is changed within a range of cut angles to form a rounded bevel on at least a portion of the edge of the part. - View Dependent Claims (12, 13, 14)
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Specification