Method for obtaining a nano capsule structure

• US 10,351,945 B2
• Filed: 06/13/2013
• Issued: 07/16/2019
• Est. Priority Date: 06/14/2012
• Status: Expired due to Fees

• Current Assignee: Centre National De La Recherche Scientifique, Universite De Lorraine (Government of France)
• Original Assignee: Universite De Lorraine (Government of France)
• Inventors: McMurtry, Stefan, Elmazria, Omar
• Primary Examiner(s): Berman, Jason
• Application Number:
  US14/405,670
• Publication Number:
  US 20150167146A1
• Time in Patent Office: 2,224 Days
• CPC Class Codes: A61K 9/5192 Processes
• CPC Class Codes: B01J 13/043 Drying and spraying
• CPC Class Codes: B65D 65/42 Applications of coated or impregnated materials
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 28/00 Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D

Abstract

The method for obtaining a nano-capsule structure includes at least one layer of resin deposited on a layer of substrate. The capsule nanometric in size is capable of enabling the encapsulation of a compound. The layer of resin is structured, by low voltage electron lithography, or by optical lithography or by nanoimprinting in such a way as to obtain at least one cavity in the thickness of the layer of resin. The cavity has a depth smaller than the thickness of the layer of resin. At least one layer of an encapsulating material is isotropically deposited by sputtering the material under vacuum. The cavity is sealed with a sealing material. The layer of resin is dissolved by soaking in a suitable solvent.

Claims

1. A method for obtaining at least one nano-capsule structure, wherein at least one capsule encapsulates a compound, said method comprising the following steps:

depositing at least one layer of resin having a thickness between 300 nm and 2 microns on a layer of substrate;

structuring said layer of resin by one of a group consisting of;

low-voltage electron lithography, optical lithography and nanoimprinting;

forming at least one cavity in said thickness of said layer of resin, the cavity having a depth of 20-450 nm;

sputtering an encapsulating material under vacuum so as to form an isotropic deposition of at least one layer of said encapsulating material;

sealing the cavity with a sealing material so as to form at least one capsule; and

dissolving said layer of resin by soaking into a suitable solvent.

2. The method, according to claim 1, further comprising the step of:

filling the cavity with a compound, after the step of sputtering the encapsulating material, said compound being one of a group consisting of;

liquid, solid, and vacuum.

3. The method, according to claim 1, wherein the structuring of the layer of resin is by low-voltage electron lithography between 1 and 15 kV.

4. The method, according to claim 3, further comprising the step of:

performing an iterative approach test, before the step of structuring of the layer of resin, so as to determine an electron dose to be sent to the layer of resin and avoid a piercing of the layer of resin down to the layer of substrate.

5. The method, according to claim 1, wherein the layer of resin is deposited by spin coating on the layer of substrate.

6. The method, according to claim 1, wherein the step of sputtering an encapsulating material is carried out at a power between 80 and 120 Watts.

7. The method, according to claim 1, wherein temperature is controlled between 15°

C. and 30°

C.

8. The method, according to claim 1, wherein at least one layer of encapsulating material is sprayed, the least one layer having a thickness between 10 and 200 nm.

9. The method, according to claim 1, wherein said resin is one of a group consisting of polymethyl methacrylate, polymethyl methacrylate methacrylic acid, and a mixture of polymethyl methacrylate and polym ethyl methacrylate methacrylic acid.

10. The method, according to claim 1, wherein the substrate is a material selected from a group consisting of silicon, zinc oxide, aluminum nitride, oxide silicon, aluminum oxide, polymers, and plastic materials.

11. The method, according to claim 1, wherein said encapsulating material is selected from a group consisting of metallic materials, semiconductor materials, piezoelectric materials and insulating materials.

12. The method, according to claim 1, wherein said sealing material is selected from a group consisting of:

polymers, metals, epoxy resins and biocompatible resins, said sealing material withstanding the solvent in the step of dissolving the layer of resin.

13. The method, according to claim 1, further comprising the steps of:

applying an adhesive resin onto a surface of said sealing material, prior to the step of dissolving the layer of resin; and

depositing a second substrate on said adhesive resin,

wherein said at least one capsule is attached to said second substrate, after the step of dissolving the layer of resin, said at least capsule being transferred from said layer of substrate to said second substrate.

14. The method, according to claim 1, further comprising the step of:

depositing a second substrate on a surface of sealing material, prior to the step of dissolving the layer of resin,

wherein said at least one capsule is attached to said second substrate, after the step of dissolving the layer of resin, said at least capsule being transferred from said layer of substrate to said second substrate.

15. The method, according to claim 13, further comprising the step of:

sputtering at least a second layer selected from a group consisting of a metallic, semiconductor, piezoelectric, and insulating material, on the layer of encapsulating material when said at least one capsule is attached to said second substrate, after the step of dissolving the layer of resin.

16. The method, according to claim 1, following the step of sealing the cavity, the method further comprising the steps of:

structuring the layer of sealing material, through alignment with first structuring of the layer of resin, by one of a group consisting of;

electron lithography, optical lithography, and nanoimprinting, so as to remove the sealing material, except at a level of the nano-capsule to remain sealed;

removing the layer of encapsulating material by one of a group consisting of;

chemical etching, soaking, reactive ion etching, and ion beam etching;

after the step of dissolving the layer of resin, releasing said nano-capsule in solution.