Method and apparatus for identifying defects in a chemical sensor array

• US 10,365,321 B2
• Filed: 08/19/2015
• Issued: 07/30/2019
• Est. Priority Date: 12/01/2011
• Status: Active Grant

• Current Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Original Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Inventors: Beauchemin, Mark
• Primary Examiner(s): Eom, Robert J
• Application Number:
  US14/830,391
• Publication Number:
  US 20150355265A1
• Time in Patent Office: 1,441 Days
• CPC Class Codes: G01N 27/414 Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
• CPC Class Codes: G01N 27/416 Systems G01N27/27 takes precedence
• CPC Class Codes: G01R 31/2621 for testing field effect transistors, i.e. FET's
• CPC Class Codes: G01R 31/2851 Testing of integrated circuits [IC] G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801

Abstract

An apparatus including an array of sensors including a plurality of chemical sensors and a plurality of reference sensors, each chemical sensor coupled to a corresponding reaction region for receiving at least one reactant, and each reference sensor comprising a field effect transistor having a gate coupled to a corresponding reference line and an access circuit for accessing the chemical sensors and the reference sensors and a controller to apply bias voltages to the reference lines to select corresponding reference sensors, acquire output signals from the selected reference sensors, and identify one or more defects in the access circuit based on differences between the acquired output signals and expected output signals.

Claims

1. An apparatus, comprising:

an array of field effect transistors including;

a plurality of chemical sensors, each chemical sensor coupled to a corresponding reaction region for receiving at least one reactant, and

a plurality of reference sensors, each reference sensor including a reference transistor with a first terminal directly coupled to a first reference select switch to bias the reference transistor and directly coupled to a second reference select switch to couple the first terminal of the reference transistor to a column line;

an access circuit for accessing the chemical sensors and the reference sensors, wherein the access circuit includes a plurality of reference lines coupled to a gate terminal of each reference transistor in a corresponding set of reference sensors;

a controller to;

apply bias voltages to the reference lines to select a corresponding set of reference sensors;

acquire output signals from the selected reference sensors; and

identify one or more defects in the access circuit based on differences between the acquired output signals and expected output signals.

2. The apparatus of claim 1, wherein:

the applied bias voltages include first bias voltages to place the reference transistors of the selected reference sensors in a first known state, and include second bias voltages to place the reference transistors of the selected reference sensors in a second known state;

the acquired output signals include first output signals from the selected reference sensors in response to applying the first bias voltages, and second output signals from the selected reference sensors in response to applying the second bias voltages; and

the one or more defects are identified based on differences between the acquired first output signals and expected first output signals, and based on differences between the acquired second output signals and expected second output signals.

3. The apparatus of claim 1, wherein the array of field effect transistors are arranged in a plurality of rows and a plurality of columns, a given column in the plurality of columns including at least one chemical sensor and at least one reference sensor.

4. The apparatus of claim 1, wherein the plurality of reference sensors includes a first set of reference sensors commonly coupled to a first reference line, and a second set of reference sensors commonly coupled to a second reference line.

5. The apparatus of claim 4, wherein the first set of reference sensors and the second set of reference sensors are arranged in rows and columns of the array in an alternating fashion, so that adjacent reference sensors in the first set are separated by a single reference sensor in the second set, and adjacent reference sensors in the second set are separated by a single reference sensor in the first set.

6. The apparatus of claim 1, wherein a given chemical sensor is a chemically-sensitive transistor.

7. The apparatus of claim 1, wherein a given chemical sensor generates a sensor signal in response to a chemical reaction occurring within the corresponding reaction region.

8. The apparatus of claim 7, wherein the chemical reaction is a sequencing reaction.