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Hybrid multilayer device

  • US 10,366,883 B2
  • Filed: 07/30/2014
  • Issued: 07/30/2019
  • Est. Priority Date: 07/30/2014
  • Status: Active Grant
First Claim
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1. A multilayer device, comprising:

  • a substrate;

    a first layer disposed on the substrate;

    a trench extending longitudinally through at least one of the substrate and the first layer, the trench having a first sidewall spaced apart from a second sidewall, each sidewall extending from a given surface of the substrate to another surface of the first layer that is spaced apart from the given surface by the first and second sidewalls; and

    an active region disposed on the first layer, both the active region and the first layer overlying the trench, and the first layer bonded to the substrate at locations laterally outward of the first and second sidewalls of the trench.

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