Hybrid multilayer device
First Claim
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1. A multilayer device, comprising:
- a substrate;
a first layer disposed on the substrate;
a trench extending longitudinally through at least one of the substrate and the first layer, the trench having a first sidewall spaced apart from a second sidewall, each sidewall extending from a given surface of the substrate to another surface of the first layer that is spaced apart from the given surface by the first and second sidewalls; and
an active region disposed on the first layer, both the active region and the first layer overlying the trench, and the first layer bonded to the substrate at locations laterally outward of the first and second sidewalls of the trench.
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Abstract
A multilayer device includes a substrate and a first layer disposed on the substrate. A trench extends through one or both of the substrate and the first layer. The trench has a first sidewall spaced apart from a second sidewall, each sidewall extending from an upper surface of the substrate to a lower surface of the first layer. An optically active region is disposed on the first layer overlying the trench, such that at least a portion of the optically active region is located within a set of lines corresponding to the sidewalls of the trench.
132 Citations
20 Claims
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1. A multilayer device, comprising:
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a substrate; a first layer disposed on the substrate; a trench extending longitudinally through at least one of the substrate and the first layer, the trench having a first sidewall spaced apart from a second sidewall, each sidewall extending from a given surface of the substrate to another surface of the first layer that is spaced apart from the given surface by the first and second sidewalls; and an active region disposed on the first layer, both the active region and the first layer overlying the trench, and the first layer bonded to the substrate at locations laterally outward of the first and second sidewalls of the trench. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of fabricating a multilayer device, comprising:
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providing a substrate; bonding a structure comprising at least a first layer to the substrate; forming a trench in at least one of the substrate and the first layer prior to bonding the structure to the substrate, the trench including sidewalls spaced apart from each other to define a width thereof, the sidewalls extending between opposing surfaces of the substrate and the first layer to define a height, wherein the width is greater than the height, the first layer overlying the trench and bonded to the substrate at locations laterally outward of the sidewalls of the trench; and forming one or more layered materials on the first layer to provide an optically active region that is located overlying the trench, wherein at least a portion of the active region resides substantially within boundaries defined by the sidewalls of the trench. - View Dependent Claims (11, 12, 13)
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14. A method of fabricating a multilayer device, comprising:
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etching a substrate to form at least a portion of a trench having sidewalls that are spaced apart from each other to define a width thereof that is greater than a height of the trench; bonding a structure to the substrate, wherein the structure includes one or more layers, the height of the trench being defined by a distance between a surface of an adjacent layer of the structure that is bonded to the substrate and a surface of the substrate that extends between the sidewalls of the trench, the adjacent layer of the structure overlying the trench and bonded to the substrate at locations laterally outward of the sidewalls of the trench; and forming an optically active region on the structure located in an overlying relationship with the trench such that at least a portion of the active region resides substantially within boundaries defined by the sidewalls of the trench. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification