Scanning probe system

• US 10,401,381 B2
• Filed: 06/10/2016
• Issued: 09/03/2019
• Est. Priority Date: 06/12/2015
• Status: Active Grant

• Current Assignee: Infinitesima Limited
• Original Assignee: Infinitesima Limited
• Inventors: Humphris, Andrew
• Primary Examiner(s): Ippolito, Nicole M
• Assistant Examiner(s): Luck, Sean M
• Application Number:
  US15/735,499
• Publication Number:
  US 20180164342A1
• Time in Patent Office: 1,180 Days
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 20/02 by optical means

Abstract

A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.

Claims

1. A scanning probe system comprising:

a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;

a first driver with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input;

a second driver with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input;

a control system arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles; and

a surface detector arranged to generate a surface signal for each cycle when the surface detector detects an interaction of the probe tip with the surface of the sample, wherein the control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip, and the control system is arranged to control the first drive signal so that for each cycle there is an approach phase before generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip towards the surface of the sample, and a retract phase after generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip away from the surface of the sample, wherein modification of the second drive signal causes the cantilever to deform so that an angle of the probe tip changes relative to the base of the cantilever; and

wherein the control system is arranged to control the second drive signal so that for each cycle the second drive signal remains substantially constant as the probe tip moves towards the surface of the sample until the second drive signal is modified in response to receipt of the surface signal, thereby ensuring that when the surface signal is generated the probe tip is at a predetermined angle relative to the base of the cantilever.

2. The system of claim 1 wherein the second driver is arranged to illuminate the cantilever in accordance with the second drive signal at the second driver input.

3. The system of claim 1 wherein the control system is arranged to control the first and second drive signals so that for each cycle there is an approach phase before generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip towards the surface of the sample;

a first retract phase after generation of the surface signal in which the modification of the second drive signal causes the probe tip to move away from the surface of the sample while the first driver continues to move the base of the cantilever towards the surface of the sample; and

a second retract phase after the first retract phase in which the first driver moves the base of the cantilever and the probe tip away from the surface of the sample.

4. The system of claim 3 wherein the control system is arranged to control the first drive signal for each cycle so that for each cycle there is an overshoot phase between the first retract phase and the second retract phase in which the first driver moves the base of the cantilever and the probe tip towards the surface of the sample.

5. The system of claim 1 wherein the control system is also arranged to reset the second drive signal after the drive signal has been modified and before the next cycle, the reset of the second drive signal causing the second driver to move the probe tip towards the surface of the sample.

6. The system of claim 1 wherein the surface detector is arranged to direct a sensing beam onto the cantilever thereby generating a reflected sensing beam which is analyzed to detect the interaction of the probe tip with the surface of the sample, wherein the surface detector comprises an interferometer which combines the reflected sensing beam with a reference beam to generate an interferogram, and generates a detection signal from the interferogram, and wherein the detection signal is analyzed analysed to detect the interaction of the probe tip with the surface of the sample.

7. The system of claim 1, wherein the surface detector is arranged to direct a sensing beam onto the cantilever thereby generating a reflected sensing beam which is analyzed to detect the interaction of the probe tip with the surface of the sample, wherein the surface detector comprises an optical lever, and the system further comprises a measurement system which takes a measurement from the surface of the sample for each cycle in response to receipt of the surface signal from the surface detector, wherein the measurement system comprises an interferometer arranged to combine the reflected sensing beam with a reference beam to generate an interferogram, and generate a detection signal from the interferogram.

8. A method of scanning a sample with a scanning probe system, the scanning probe system comprising:

a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever;

a first driver with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input; and

a second driver with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input, the method comprising;

controlling the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of the sample in a series of cycles;

generating a surface signal for each cycle on detection of an interaction of the probe tip with the surface of the sample; and

modifying the second drive signal in response to receipt of the surface signal, the modification of the second drive signal causing the second driver to control the probe tip, wherein for each cycle there is an approach phase before generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip towards the surface of the sample, and a retract phase after generation of the surface signal in which the first driver moves the base of the cantilever and the probe tip away from the surface of the sample, wherein modification of the second drive signal causes the cantilever to deform so that an angle of the probe tip changes relative to the base of the cantilever; and

for each cycle the second drive signal remains substantially constant as the probe tip moves towards the surface of the sample until the second drive signal is modified in response to receipt of the surface signal, thereby ensuring that when the surface signal is generated the probe tip is at a predetermined angle relative to the base of the cantilever.

9. The method of claim 8 wherein modification of the second drive signal causes the second driver to decelerate the probe tip.

10. The method claim 8 wherein the probe is mechanically responsive to first and second drive forces generated by the first and second drivers in accordance with the first and second drive signals, and the modification of the second drive signal causes the second driver to generate a second drive force which is directed away from the surface of the sample.