MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
First Claim
1. A MEMS loudspeaker for generating sound waves in the audible wavelength spectrum, comprising:
- a carrier substrate defining a substrate cavity, the carrier substrate defining a first surface and a second surface opposite the first surface, the first surface of the carrier substrate defining a first substrate opening into the substrate cavity, the second surface of the carrier substrate defining a second substrate opening into the substrate cavity;
a membrane spanning across at least one of the two substrate openings of the carrier substrate;
an actuator structure defining an edge area connected to the carrier substrate in an area of one of the two substrate openings and spaced apart from the membrane to define an intermediate cavity between the membrane and the actuator structure, which is configured to generate vibrations in the membrane for generating sound waves;
a coupling element disposed in the intermediate cavity and connecting the actuator structure to the membrane, wherein the coupling element includes a first part connected to the actuator structure and a second part connected to the membrane, wherein the first part of the coupling element is formed from a different material than the material that forms the second part of the coupling element, and wherein the first part of the coupling element is connected firmly to the second part of the coupling element; and
wherein the coupling element, the membrane and the actuator structure are free to vibrate with respect to the carrier substrate.
1 Assignment
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Accused Products
Abstract
A MEMS loudspeaker for generating sound waves in the audible wavelength spectrum includes a carrier substrate with a substrate cavity with two substrate openings formed on two opposite sides of the carrier substrate, and a diaphragm anchored in the substrate. An actuator structure is arranged in the region of one of the two substrate openings and configured to vibrate the diaphragm to generate sound waves. An intermediate cavity is formed in a space between the diaphragm and the actuator structure. A coupling element is disposed in the intermediate cavity and connects the actuator structure to the diaphragm and can vibrate with respect to the carrier substrate.
9 Citations
19 Claims
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1. A MEMS loudspeaker for generating sound waves in the audible wavelength spectrum, comprising:
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a carrier substrate defining a substrate cavity, the carrier substrate defining a first surface and a second surface opposite the first surface, the first surface of the carrier substrate defining a first substrate opening into the substrate cavity, the second surface of the carrier substrate defining a second substrate opening into the substrate cavity; a membrane spanning across at least one of the two substrate openings of the carrier substrate; an actuator structure defining an edge area connected to the carrier substrate in an area of one of the two substrate openings and spaced apart from the membrane to define an intermediate cavity between the membrane and the actuator structure, which is configured to generate vibrations in the membrane for generating sound waves; a coupling element disposed in the intermediate cavity and connecting the actuator structure to the membrane, wherein the coupling element includes a first part connected to the actuator structure and a second part connected to the membrane, wherein the first part of the coupling element is formed from a different material than the material that forms the second part of the coupling element, and wherein the first part of the coupling element is connected firmly to the second part of the coupling element; and wherein the coupling element, the membrane and the actuator structure are free to vibrate with respect to the carrier substrate. - View Dependent Claims (2, 3, 4, 6, 7, 8, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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5. A MEMS loudspeaker for generating sound waves in the audible wavelength spectrum, comprising:
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a carrier substrate defining a substrate cavity, the carrier substrate defining a first surface and a second surface opposite the first surface, the first surface of the carrier substrate defining a first substrate opening into the substrate cavity, the second surface of the carrier substrate defining a second substrate opening into the substrate cavity; a membrane spanning across at least one of the two substrate openings of the carrier substrate; an actuator structure defining an edge area connected to the carrier substrate in an area of one of the two substrate openings and spaced apart from the membrane to define an intermediate cavity between the membrane and the actuator structure, which is configured to generate vibrations in the membrane for generating sound waves; a coupling element disposed in the intermediate cavity and connecting the actuator structure to the membrane, wherein the coupling element includes a first part connected to the actuator structure and a second part connected to the membrane; wherein the coupling element, the membrane and the actuator structure are free to vibrate with respect to the carrier substrate; and wherein the first part of the coupling element defines a first connecting area and the second part of the coupling element defines a second connecting area, wherein the actuator structure is connected to the first connecting area of the coupling element, wherein the membrane is connected to the second connecting area of the coupling element, and wherein the second connecting area is formed in a manner larger, in the sense of wider in a cross-sectional view of the MEMS loudspeaker.
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9. A MEMS loudspeaker for generating sound waves in the audible wavelength spectrum, comprising:
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a carrier substrate defining a substrate cavity, the carrier substrate defining a first surface and a second surface opposite the first surface, the first surface of the carrier substrate defining a first substrate opening into the substrate cavity, the second surface of the carrier substrate defining a second substrate opening into the substrate cavity; a membrane spanning across at least one of the two substrate openings of the carrier substrate; an actuator structure defining an edge area connected to the carrier substrate in an area of one of the two substrate openings and spaced apart from the membrane to define an intermediate cavity between the membrane and the actuator structure, which is configured to generate vibrations in the membrane for generating sound waves; a coupling element disposed in the intermediate cavity and connecting the actuator structure to the membrane, wherein the coupling element, includes a first part connected to the actuator structure and a second part connected to the membrane; wherein the coupling element, the membrane and the actuator structure are free to vibrate with respect to the carrier substrate; and wherein the height of the carrier substrate is less than the height of the coupling element.
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Specification