Workpiece processing apparatus and workpiece processing method

  • US 10,434,621 B2
  • Filed: 01/16/2015
  • Issued: 10/08/2019
  • Est. Priority Date: 01/29/2014
  • Status: Active Grant
First Claim
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1. A workpiece processing apparatus, comprising:

  • an upper turn table,a load cell disposed above and connected to the upper turn table,a lower turn table,a carrier having a holding hole for a workpiece, the carrier configured to be interposed between the upper turn table and the lower turn table, the workpiece having an upper surface and a lower surface, anda control unit that is provided with a storage medium on which a reference polishing load measured when the upper turn table is moved downward to a fixed position in a state in which the workpiece is properly held between the upper turn table and the lower turn table in the holding hole of the carrier is recorded in advance, the control unit being configured to;

    calculate a difference between a polishing load measured via the load cell that connects to the upper turn table when the upper turn table is moved downward to the fixed position in a state in which the workpiece is held between the upper turn table and the lower turn table in the holding hole of the carrier and the reference polishing load recorded in advance on the storage medium, andbefore the workpiece is processed, judge an occurrence of abnormal holding of the workpiece if the calculated difference exceeds a threshold value;

    wherein the workpiece processing apparatus is configured such that both surfaces of the workpiece can be processed at a same time when the workpiece is held in the holding hole of the carrier and the carrier is interposed between the upper turn table and the lower turn table.

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