UV pretreatment apparatus used in vacuum evaporation

  • US 10,446,801 B2
  • Filed: 11/02/2017
  • Issued: 10/15/2019
  • Est. Priority Date: 10/09/2017
  • Status: Active Grant
First Claim
Patent Images

1. A ultraviolet (UV) pretreatment apparatus used in vacuum evaporation, comprising:

  • a housing having a curing chamber disposed inside the housing;

    a base disposed in the curing chamber and disposed on a bottom face of the curing chamber, configured to support a thin film transistor (TFT) array substrate that is to be processed using UV;

    an inlet disposed at one end of the housing and an outlet disposed at an opposite end of the housing;

    a UV source disposed in the curing chamber; and

    a light absorption layer is disposed on inner walls of the curing chamber;

    wherein the UV source is disposed on a top face of the curing chamber and the light absorption layer is disposed on the bottom face and lateral faces of the curing chamber.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×