UV pretreatment apparatus used in vacuum evaporation

• US 10,446,801 B2
• Filed: 11/02/2017
• Issued: 10/15/2019
• Est. Priority Date: 10/09/2017
• Status: Active Grant

• Current Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
• Original Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
• Inventors: Liu, Zhaosong, Hsu, Yuan-jun, Im, Jangsoon
• Primary Examiner(s): Ippolito, Nicole M
• Application Number:
  US15/735,207
• Publication Number:
  US 20190109301A1
• Time in Patent Office: 712 Days
• Field of Search: 2504921, 2504931, 250504 R
• CPC Class Codes: C23C 14/02 Pretreatment of the material to be coated C23C14/04 takes precedence
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: C23C 14/5806 Thermal treatment
• CPC Class Codes: H10K 50/81 Anodes
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/126 Shielding, e.g. light-blocking means over the TFTs
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition

Abstract

A ultraviolet (UV) pretreatment apparatus used in vacuum evaporation includes a housing having a curing chamber disposed inside the housing; an inlet disposed at one end of the housing and an outlet disposed at an opposite end of the housing; and a UV source disposed in the curing chamber. A light absorption layer is disposed on inner walls of the curing chamber.

Claims

1. A ultraviolet (UV) pretreatment apparatus used in vacuum evaporation, comprising:

a housing having a curing chamber disposed inside the housing;

a base disposed in the curing chamber and disposed on a bottom face of the curing chamber, configured to support a thin film transistor (TFT) array substrate that is to be processed using UV;

an inlet disposed at one end of the housing and an outlet disposed at an opposite end of the housing;

a UV source disposed in the curing chamber; and

a light absorption layer is disposed on inner walls of the curing chamber;

wherein the UV source is disposed on a top face of the curing chamber and the light absorption layer is disposed on the bottom face and lateral faces of the curing chamber.

2. The UV pretreatment apparatus according to claim 1, wherein a light shielding plate is disposed in the curing chamber, the light shielding plate is parallel to the bottom face of the curing chamber, four edge portions of the light shielding plate are correspondingly attached to the lateral faces of the curing chamber, the light shielding plate comprises a blocking region and a transparent region located in the blocking region, wherein a length of a long side of the transparent region is equal to a length of a long side of the TFT array substrate, and a length of a short side of the transparent region is equal to a length of a short side of the TFT array substrate.

3. The UV pretreatment apparatus according to claim 2, wherein the lateral faces of the curing chamber are perforated to form sliding chutes, the sliding chutes are perpendicular to the bottom face of the curing chamber, fastening members matching the sliding chutes are disposed at margins of the light shielding plate, and the fastening members slidably connect to the sliding chutes.

4. The UV pretreatment apparatus according to claim 2, wherein the light absorption layer is also disposed on a surface of the blocking region of the light shielding plate.

5. The UV pretreatment apparatus according to claim 2, wherein an extending plate that is movable to the transparent region is disposed on a surface of the blocking region of the light shielding plate.

6. The UV pretreatment apparatus according to claim 5, wherein one end of the extending plate is hinged at a margin of the blocking region of the light shielding plate.

7. The UV pretreatment apparatus according to claim 1, wherein the light absorption layer is fabricated by carbon nanotubes.

8. A ultraviolet (UV) pretreatment apparatus used in vacuum evaporation, comprising:

a housing having a curing chamber disposed inside the housing;

a base disposed in the curing chamber and disposed on a bottom face of the curing chamber, configured to support a thin film transistor (TFT) array substrate that is to be processed using UV;

an inlet disposed at one end of the housing and an outlet disposed at an opposite end of the housing;

a UV source disposed in the curing chamber; and

a light absorption layer is disposed on inner walls of the curing chamber.

9. The UV pretreatment apparatus according to claim 8, wherein a light shielding plate is disposed in the curing chamber, the light shielding plate is parallel to the bottom face of the curing chamber, four edge portions of the light shielding plate are correspondingly attached to the lateral faces of the curing chamber, the light shielding plate comprises a blocking region and a transparent region located in the blocking region, wherein a length of a long side of the transparent region is equal to a length of a long side of the TFT array substrate, and a length of a short side of the transparent region is equal to a length of a short side of the TFT array substrate.

10. The UV pretreatment apparatus according to claim 9, wherein the lateral faces of the curing chamber are perforated to form sliding chutes, the sliding chutes are perpendicular to the bottom face of the curing chamber, fastening members matching the sliding chutes are disposed at margins of the light shielding plate, and the fastening members slidably connect to the sliding chutes.

11. The UV pretreatment apparatus according to claim 9, wherein the light absorption layer is also disposed on a surface of the blocking region of the light shielding plate.

12. The UV pretreatment apparatus according to claim 9, wherein an extending plate that is movable to the transparent region is disposed on a surface of the blocking region of the light shielding plate.

13. The UV pretreatment apparatus according to claim 12, wherein one end of the extending plate is hinged at a margin of the blocking region of the light shielding plate.

14. The UV pretreatment apparatus according to claim 8, wherein the light absorption layer is fabricated by carbon nanotubes.

15. A ultraviolet (UV) pretreatment apparatus used in vacuum evaporation, comprising:

a housing having a curing chamber disposed inside the housing;

an inlet disposed at one end of the housing and an outlet disposed at an opposite end of the housing;

a UV source disposed in the curing chamber;

a base is disposed in the curing chamber, configured to support a thin film transistor (TFT) array substrate that is to be processed using the UV source; and

a light absorption layer is disposed on inner walls of the curing chamber,

wherein the TFT array substrate comprises;

a glass substrate;

a light shielding pattern formed on a surface of the glass substrate;

a buffer layer fabricated on the surface of the glass substrate and covering the light shielding pattern;

TFT devices disposed on a surface of the buffer layer and disposed corresponding to the light shielding pattern;

an insulating layer fabricated on the surface of the buffer layer and covering the TFT devices;

a passivation layer fabricated on a surface of the insulating layer;

a flattened layer fabricated on a surface of the passivation layer; and

an anode metal pattern fabricated on a surface of the flattened layer,

wherein the TFT array substrate is close to the UV source at one side having the anode metal pattern disposed.