Piezoelectric MEMS resonator with integrated phase change material switches

• US 10,447,234 B2
• Filed: 04/17/2015
• Issued: 10/15/2019
• Est. Priority Date: 04/18/2014
• Status: Active Grant

• Current Assignee: Northeastern University
• Original Assignee: Northeastern University
• Inventors: Rinaldi, Matteo, Hummel, Gwendolyn
• Primary Examiner(s): Dougherty, Thomas M
• Application Number:
  US15/304,919
• Publication Number:
  US 20170187347A1
• Time in Patent Office: 1,642 Days
• Field of Search: 310313 A, 310313 R, 310318, 310328, 310365, 310366
• CPC Class Codes: G11C 13/0004 comprising amorphous/crystalline phase transition cells
• CPC Class Codes: H03H 2003/027 the resonators or networks being of the microelectro-mechanical [MEMS] type
• CPC Class Codes: H03H 2009/155 using MEMS techniques
• CPC Class Codes: H03H 3/0073 Integration with other electronic structures
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/02228 Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
• CPC Class Codes: H03H 9/131 consisting of a multilayered structure
• CPC Class Codes: H03H 9/133 for electromechanical delay lines or filters
• CPC Class Codes: H03H 9/205 having multiple resonators crystal tuning forks H03H9/21
• CPC Class Codes: H03H 9/54 comprising resonators of piezoelectric or electrostrictive material H03H9/64 takes precedence
• CPC Class Codes: H10N 30/85 Piezoelectric or electrostrictive active materials
• CPC Class Codes: H10N 70/231 based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
• CPC Class Codes: H10N 70/882 Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
• CPC Class Codes: H10N 70/8828 Tellurides, e.g. GeSbTe

Abstract

A monolithic integration of phase change material (PCM) switches with a MEMS resonator is provided to implement switching and reconfiguration functionalities. MEMS resonator includes a piezoelectric material to control terminal connections to the electrodes. The PCM is operable between an ON state and an OFF state by application of heat, which causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state. A method of fabricating the MEMS resonator with phase change material is provided. A reconfigurable filter system using the MEMS resonators is also provided.

Claims

1. A micro-electro-mechanical system (MEMS) resonator, comprising:

a substrate, a first electrode supported by the substrate, a second electrode supported by the substrate, and terminal connections to the first electrode and the second electrode;

a piezoelectric material between the first electrode and the second electrode; and

a phase change material disposed to control the terminal connections to the electrodes, and comprising one or more switches operable between an ON state and an OFF state;

wherein application of heat to the phase change material causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state.

2. The MEMS resonator of claim 1, wherein the first electrode comprises a bottom plate electrode supported from an anchor region above a cavity in the substrate, and the second electrode comprises a top interdigital electrode spaced from the first electrode, the top interdigital electrode comprising a plurality of fingers, and the one or more switches comprise a plurality of switches, each switch associated with one of the fingers of the top electrode.

3. The MEMS resonator of claim 1, wherein the phase change material is disposed to control connections between the first electrode and the second electrode.

4. The MEMS resonator of claim 2, wherein each of the switches comprises via between each of the fingers of the second electrode and the terminal connection to the second electrode.

5. The MEMS resonator of claim 1, wherein the phase change material is disposed to control connections within a layer by bridging a gap between the first electrode and the second electrode.

6. The MEMS resonator of claim 1, wherein each switch is operable to turn ON upon application of a first voltage pulse having a first voltage and a first duration and is operable to turn OFF upon application of a second voltage pulse having a second voltage and a second duration, the second voltage greater than the first voltage and the second duration shorter than the first duration.

7. The MEMS resonator of claim 1, wherein each switch of the one or more switches is independently operable to change from the amorphous state to the crystalline state or from the crystalline state to the amorphous state.

8. The MEMS resonator of claim 1, wherein each switch of the one or more switches is independently programmable to enable one or more of frequency programming of the MEMS resonator, capacitance tuning of the MEMS resonator, shorting of the resonator, and ON/OFF switching of the MEMS resonator.

9. The MEMS resonator of claim 1, wherein each switch of the one or more switches is in electrical communication with the terminal connections for electrical connection to a voltage source and ground, whereby voltage pulses can be applied to each switch to effect a phase change from the amorphous state to the crystalline state or from the crystalline state to the amorphous state.

10. The MEMS resonator of claim 1, wherein each switch of the one or more switches is operable by laser to effect a phase change from the amorphous state to the crystalline state or from the crystalline state to the amorphous state.

11. The MEMS resonator of claim 1, wherein each switch of the one or more switches is operable by pressure to effect a phase change from the amorphous state to the crystalline state or from the crystalline state to the amorphous state.

12. The MEMS resonator of claim 1, wherein each switch of the one or more switches is in electrical communication between radio frequency signal electrodes, with an external heater in electrical communication with the terminal connections for electrical connection to a voltage source and ground, whereby voltage pulses applied to the external heater transfer heat to each switch to effect a phase change from the amorphous state to the crystalline state or from the crystalline state to the amorphous state.

13. The MEMS resonator of claim 6, wherein the voltage pulses range from 0.01 to 25 V.

14. The MEMS resonator of claim 1, wherein the phase change material comprises germanium telluride.

15. The MEMS resonator of claim 1, wherein the phase change material comprises a chalcogenide material.

16. The MEMS resonator of claim 1, wherein the piezoelectric material comprises aluminum nitride.

17. The MEMS resonator of claim 1, further comprising an insulating material surrounding the phase change material, between the piezoelectric material and the phase change material, between the phase change material and an external heater, or between the phase change material and both the piezoelectric material and an external heater.

18. The MEMS resonator of claim 1, wherein the piezoelectric material comprises an insulating material.

19. A method of fabricating the MEMS resonator of claim 1, comprising:

providing a semiconductor substrate;

forming the first electrode comprising a metal layer supported above the substrate;

forming a resonant body comprising the piezoelectric material over the first electrode;

providing the phase change material over the resonant body; and

forming the second electrode comprising a metal material over the phase change material.

20. A reconfigurable filter system comprising the MEMS resonator of claim 1, wherein at least one of frequency, impedance, capacitance, bandwidth, roll-off, and band selection of the filter system can be reconfigured by operation of the MEMS resonator.