Semiconductor system and method for supporting data editing

  • US 10,452,767 B2
  • Filed: 10/12/2017
  • Issued: 10/22/2019
  • Est. Priority Date: 10/19/2016
  • Status: Active Grant
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First Claim
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1. A semiconductor system comprising:

  • an input receiver configured to receive comparison process requesting information;

    a processor connected to the input receiver and configured to;

    acquire a plurality of pieces of process related information that are related to a semiconductor process performed by a semiconductor manufacturing apparatus and includes one or more recipes and parameters, based on the comparison process requesting information received by the input receiver;

    compare the acquired plurality of pieces of process related information; and

    specify different data from each other in the plurality of pieces of process related information;

    a screen creator connected to the processor and configured to create a comparison screen that compares the plurality of pieces of process related information based on the different data specified by the processor; and

    a display connected to the screen creator and configured to display the comparison screen created by the screen creator,wherein, when the input receiver receives a selection of one or more editing items to be edited on the comparison screen that are arbitrary items included in the plurality of pieces of process related information displayed on the comparison screen, the screen creator creates an editing screen on which, among the plurality of pieces of process related information, process related information including the one or more editing items is editable such that the editing screen created by the screen creator is displayed without manually starting an editor before the process related information is edited, andwherein the plurality of pieces of process related information is information related to a plurality of processes between a plurality of semiconductor manufacturing apparatuses.

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