Contact engines, probe head assemblies, probe systems, and associated methods for on-wafer testing of the wireless operation of a device under test

• US 10,571,487 B2
• Filed: 11/22/2017
• Issued: 02/25/2020
• Est. Priority Date: 11/30/2016
• Status: Active Grant

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Beaverton, Inc. (FormFactor Incorporated)
• Inventors: Bock, Daniel Mark, Cleary, Tim
• Primary Examiner(s): Lindsay, Jr., Walter L
• Assistant Examiner(s): Gonzalez, Milton
• Application Number:
  US15/821,101
• Publication Number:
  US 20180149674A1
• Time in Patent Office: 825 Days
• CPC Class Codes: G01R 1/0735 arranged on a flexible frame or film
• CPC Class Codes: G01R 31/3025 Wireless interface with the DUT

Abstract

Contact engines, probe head assemblies, probe systems, and associated methods for on-wafer testing of the wireless operation of a device under test (DUT). A contact engine includes a flexible dielectric membrane having a first surface and a second surface and a plurality of probes supported by the flexible dielectric membrane. The plurality of probes are oriented to contact a plurality of contact locations on the DUT. Each probe in the plurality of probes includes a corresponding probe tip that projects from the second surface of the flexible dielectric membrane and is configured to electrically and physically contact a corresponding contact location of the plurality of contact locations. The contact engine further includes at least one membrane antenna supported by the flexible dielectric membrane. A probe head assembly includes the contact engine. A probe system includes the probe head assembly. Associated methods include methods of utilizing the contact engine.

Claims

1. A contact engine for testing a device under test (DUT), the contact engine comprising:

a flexible dielectric membrane having a first surface and an opposed second surface;

a plurality of probes supported by the flexible dielectric membrane and oriented, relative to one another, to contact a plurality of contact locations on the DUT, wherein each probe in the plurality of probes includes a corresponding probe tip that projects from the second surface of the flexible dielectric membrane and is configured to electrically and physically contact a corresponding contact location of the plurality of contact locations; and

at least one membrane antenna supported by the flexible dielectric membrane;

wherein at least one probe in the plurality of probes is a membrane antenna-connected probe configured to electrically interconnect the membrane antenna and the DUT to permit excitation of the membrane antenna by the DUT.

2. The contact engine of claim 1, wherein at least one probe in the plurality of probes is a power supply probe configured to convey a power supply electric current to the DUT, and wherein at least one other probe in the plurality of probes is a power receipt probe configured to receive the power supply electric current from the DUT.

3. The contact engine of claim 1, wherein the membrane antenna is configured to convey a wireless signal, which has a wireless signal wavelength, and further wherein the membrane antenna defines a membrane antenna length that is at least substantially equal to at least one of one-half of the wireless signal wavelength, one-fourth of the wireless signal wavelength, one-tenth of the wireless signal wavelength, one-twentieth of the wireless signal wavelength, one-fiftieth of the wireless signal wavelength, and one-one hundredth of the wireless signal wavelength.

4. The contact engine of claim 1, wherein the contact engine further includes a plurality of probe-connected electrical traces supported by the flexible dielectric membrane, wherein each of the plurality of probe-connected electrical traces is in electrical communication with a corresponding one of the plurality of probes.

5. The contact engine of claim 1, wherein the contact engine includes a plurality of membrane antennas;

wherein the contact engine further includes a data signal conductor, a plurality of membrane antenna conductors, and a switching matrix;

wherein the data signal conductor is in electrical communication with the switching matrix;

wherein each of the plurality of membrane antenna conductors provides electrical communication between the switching matrix and a corresponding one of the plurality of membrane antennas; and

further wherein the switching matrix is configured to selectively interconnect the data signal conductor with each of the plurality of membrane antenna conductors.

6. A probe head assembly, comprising:

a platen;

a contact engine support structure operatively attached to the platen; and

the contact engine of claim 1;

wherein the flexible dielectric membrane is mechanically supported by the contact engine support structure, wherein the first surface of the flexible dielectric membrane faces toward the contact engine support structure, and further wherein the second surface of the flexible dielectric membrane faces away from the contact engine support structure.

7. The probe head assembly of claim 6, wherein the contact engine support structure includes a space transformer configured to at least one of:

(i) provide a plurality of electric signals to the plurality of probes; and

(ii) receive a plurality of electric signals from the plurality of probes.

8. The probe head assembly of claim 7, wherein the space transformer includes a plurality of space transformer contact pads, and further wherein at least a subset of the plurality of probes electrically contacts a corresponding one of the plurality of space transformer contact pads.

9. A probe system, comprising:

a substrate that includes a plurality of devices under test (DUTs);

a chuck defining a support surface configured to support the substrate;

the probe head assembly of claim 6, wherein the second surface of the flexible dielectric membrane faces toward the support surface; and

a translation structure configured to selectively and electrically contact the plurality of probes with a corresponding plurality of contact locations on the DUT.

10. The probe system of claim 9, wherein the probe system further includes a signal generation and analysis assembly configured to at least one of:

(i) provide at least one test signal electric current to a selected probe of the plurality of probes;

(ii) receive at least one resultant signal electric current from the selected probe;

(iii) provide at least one power supply electric current to the selected probe; and

(iv) receive at least one power supply electric current from the selected probe.

11. The probe system of claim 9, wherein the DUT includes a DUT antenna, wherein the membrane antenna is in wireless communication with the DUT antenna, and wherein the membrane antenna is configured to receive a DUT wireless signal from the DUT antenna.

12. The probe system of claim 11, wherein the DUT antenna is configured for wireless communication.

13. The probe system of claim 11, wherein the DUT antenna includes at least one of a contact pad, a solder ball, and a contact location of the plurality of contact locations.

14. The probe system of claim 11, wherein the membrane antenna is configured for near-field communication with the DUT antenna.

15. The probe system of claim 11, wherein the membrane antenna is a single membrane antenna configured to wirelessly communicate with at least two DUT antennas.

16. The probe system of claim 9, wherein:

(i) the plurality of probes includes a power supply probe, which is configured to convey a power supply electric current to the DUT, and a power receipt probe, which is configured to receive the power supply electric current from the DUT;

(ii) the substrate includes a plurality of DUT antennas; and

(iii) the membrane antenna is a single membrane antenna configured to receive a corresponding DUT wireless signal from each of the plurality of DUT antennas.

17. The probe system of claim 9, wherein:

(i) the plurality of probes includes a power supply probe, which is configured to convey a power supply electric current to the DUT, and a power receipt probe, which is configured to receive the power supply electric current from the DUT;

(ii) the substrate includes a first DUT antenna and a second DUT antenna that is spaced-apart from the first DUT antenna;

(iii) the membrane antenna is a first membrane antenna, which is configured to receive the DUT wireless signal from the first DUT antenna;

(iv) the contact engine further includes a second membrane antenna;

(v) the probe head assembly further includes a conveyance structure, which is configured to convey the DUT wireless signal from the first membrane antenna to the second membrane antenna; and

(vi) the second membrane antenna is configured to provide the DUT wireless signal to the second DUT antenna.

18. The probe system of claim 17, wherein the conveyance structure further includes a signal modifying structure configured to modify the DUT wireless signal, and wherein the conveyance structure includes at least one of:

(i) an attenuator;

(ii) a signal delay structure;

(iii) a balun;

(iv) a splitter;

(v) a combiner;

(vi) an amplifier;

(vii) a power amplifier; and

(viii) a low noise power amplifier.

19. A method of operating a probe system to test a device under test (DUT), the method comprising:

contacting at least one DUT with a corresponding at least one probe of the probe system of claim 9;

providing a power supply electric current to the at least one DUT via the at least one probe;

transmitting at least one DUT wireless signal; and

transmitting a DUT data electric current.

20. The method of claim 19, wherein the contacting includes bringing a power supply probe and a power receipt probe into contact with respective contact locations of the DUT, wherein the providing the power supply electric current includes providing the power supply electric current to the DUT via the power supply probe.

21. The method of claim 19, wherein the transmitting the at least one DUT wireless signal includes generating at least one DUT wireless signal with each of a corresponding at least one DUT antenna responsive to receipt of the power supply electric current.

22. The method of claim 19, wherein the transmitting the at least one DUT wireless signal includes transmitting from at least one of a DUT antenna and the at least one membrane antenna.

23. The method of claim 19, wherein, subsequent to the transmitting the at least one DUT wireless signal, the method further includes receiving the at least one DUT wireless signal with at least one of a DUT antenna and the at least one membrane antenna.

24. The method of claim 23, wherein the receiving the at least one DUT wireless signal includes receiving a plurality of DUT wireless signals from a plurality of DUT antennas with a single membrane antenna.

25. The method of claim 19, wherein, prior to the transmitting the DUT data electric current, the method further includes generating the DUT data electric current based upon the DUT wireless signal.

26. A probe system, comprising:

a substrate that includes a device under test (DUT);

a chuck defining a support surface configured to support the substrate;

a probe head assembly including;

(i) a platen;

(ii) a contact engine support structure operatively attached to the platen; and

(iii) a contact engine, wherein the contact engine includes;

(a) a flexible dielectric membrane having a first surface and an opposed second surface;

(b) a plurality of probes supported by the flexible dielectric membrane and oriented, relative to one another, to contact a plurality of contact locations on the DUT, wherein each probe in the plurality of probes includes a corresponding probe tip that projects from the second surface of the flexible dielectric membrane and is configured to electrically and physically contact a corresponding contact location of the plurality of contact locations; and

(c) at least one membrane antenna supported by the flexible dielectric membrane; and

a translation structure configured to selectively and electrically contact the plurality of probes with a corresponding plurality of contact locations on the DUT;

wherein;

(i) the flexible dielectric membrane is mechanically supported by the contact engine support structure;

(ii) the first surface of the flexible dielectric membrane faces toward the contact engine support structure;

(iii) the second surface of the flexible dielectric membrane faces away from the contact engine support structure;

(iv) the second surface of the flexible dielectric membrane faces toward the support surface;

(v) the plurality of probes includes a power supply probe, which is configured to convey a power supply electric current to the DUT, and a power receipt probe, which is configured to receive the power supply electric current from the DUT;

(vi) the substrate includes a first DUT antenna and a second DUT antenna that is spaced-apart from the first DUT antenna;

(vii) the membrane antenna is a first membrane antenna, which is configured to receive a DUT wireless signal from the first DUT antenna;

(viii) the contact engine further includes a second membrane antenna;

(ix) the probe head assembly further includes a conveyance structure, which is configured to convey the DUT wireless signal from the first membrane antenna to the second membrane antenna; and

(x) the second membrane antenna is configured to provide the DUT wireless signal to the second DUT antenna.

27. The probe system of claim 26, wherein the contact engine further includes a plurality of probe-connected electrical traces supported by the flexible dielectric membrane, wherein each of the plurality of probe-connected electrical traces is in electrical communication with a corresponding one of the plurality of probes.

28. The probe system of claim 26, wherein the contact engine support structure includes a space transformer configured to at least one of:

(i) provide a plurality of electric signals to the plurality of probes; and

(ii) receive a plurality of electric signals from the plurality of probes.

29. The probe system of claim 26, wherein the probe system further includes a signal generation and analysis assembly configured to at least one of:

(i) provide at least one test signal electric current to a selected probe of the plurality of probes;

(ii) receive at least one resultant signal electric current from the selected probe;

(iii) provide at least one power supply electric current to the selected probe; and

(iv) receive at least one power supply electric current from the selected probe.

30. The probe system of claim 26, wherein the conveyance structure further includes a signal modifying structure configured to modify the DUT wireless signal, and wherein the conveyance structure includes at least one of:

(i) an attenuator;

(ii) a signal delay structure;

(iii) a balun;

(iv) a splitter;

(v) a combiner;

(vi) an amplifier;

(vii) a power amplifier; and

(viii) a low noise power amplifier.

31. A method of operating a probe system to test a device under test (DUT), the method comprising:

contacting at least one DUT with a corresponding at least one probe of the probe system of claim 26;

providing a power supply electric current to the at least one DUT via the at least one probe;

transmitting at least one DUT wireless signal; and

transmitting a DUT data electric current.